Plug-in/Plug Lead: Single Unit

Note 5) Dusttight/splash proof enclosure (IP65) is not available with interface regulator. 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) ARBQ5000-00-P (P A) 0.7 0.6 Outlet pressure (MPa) 0.5 0.4 How to Order 0.3 0.2 0.1 Regulating port Solenoid valve Interface regulator 00 2500 2000 1500 1000 500 3000 A ARBQ5000-00-A-1 Flow rate (l/min (ANR)) VQ50 (Plug-in type) B ARBQ5000-

ZL3-OM00801

7 15 PBT 2 POM 16 POM 2 3 PBT 17 PBT 4 POM 18 5 FKM 6 PBT 19 7 PBT 3 6 8 1 PBT 20 , 9 1 4 1 10 2 21 11 2 PBT 5 22 12 POM 8 13 3 O HNBR/NBR 16 No.ZL3-OM00801-A 7.2 1 (/) ZL3/ZL6 ZL3-JSY3140-5LZ -a 1 3) 2) DC24V 1) 300mm 300mm * *0.150.18Nm 2) D: E: 1 1 1 1 3) 1 1 2 X12 ZL3/ZL6 SY100-30-4A-6 1 2) / 1) 2) 300 4 DC24V 6 600 10 1000 15 1500 20 2000 25 2500

VHS

1 e 3(R) Effective area (mm2) Model Component Parts VHS 2500, 3500 5 VM/VR Description Material ADC12 ZDC2 ADC12 Zinc alloy Zinc alloy C3604B A2017B C3604B Description No. q w e r t y u i No. !0 !1 !2 !3 !4 !5 !6 !7 !

MWB

100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Up to 2500

HRX-OM-W002

Ambient temp. 3500 2500 2500 2500 2500 Ambient temp. Ambient temp. 3500 2500 2500 Ambient temp. Ambient temp. or 2500 or 2500 Ambient temp. Ambient temp. or or Ambient temp. or or Facility water temp. 3000 Facility water temp. or or Facility water temp. 3000 Facility water temp. or Facility water temp. Facility water temp. 2000 2000 2000 2000 Facility water temp.

Compact

T1 = V/a1 = 1000/2500 = 0.4 [s], T1 T2 T3 T4 11LEJS T3 = V/a2 = 1000/2500 = 0.4 [s] L: Stroke [mm](Operating condition) V: Speed [mm/s](Operating condition) a1: Acceleration [mm/s2](Operating condition) a2: Deceleration [mm/s2](Operating condition) T = T1 + T2 + T3 + T4 [s] L 0.5V(T1 + T3) V 25AT2 = T1: Acceleration time and T3: Deceleration time can be obtained by the following equation

3 Port Solenoid Valve Rubber Seal Series SY100

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

442 491 491 OUT 25 10 82.4 124 165 206 247 288 330 371 412 412 IN 161 241 322 402 482 563 643 724 804 804 OUT 32 12 138 207 276 346 415 484 553 622 691 691 IN 252 378 504 630 756 882 1010 1130 1260 1260 OUT 40 16 212 318 424 530 636 742 848 954 1060 1060 IN 392 588 784 980 1180 1370 1570 1760 1960 1960 OUT 50 20 330 495 660 825 990 1160 1320 1490 1650 1650 IN 624 936 1250 1560 1870 2180 2500

Thermo-chiller/Rack Mount Type

temperature [C] HRR018-A-10 -20, HRR018-W-10 -20 [50 Hz] [60 Hz] 2500 2500 25C 25C 2000 2000 Cooling capacity [W] Cooling capacity [W] 32C 1500 1500 32C 40C 1000 1000 40C 500 500 Ambient temperature or facility water temperature Ambient temperature or facility water temperature Ambient temperature or facility water temperature Ambient temperature or facility water temperature 0 0 0 10 20

3 Port Solenoid Valve Rubber Seal Series SY100 1

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

Electric Actuator

2500 0 0 0 5 10 15 20 Work load [kg] 0 5 10 15 20 Work load [kg] LEFS25S;A LEFS25/Ball Screw Drive: Vertical LEFS25S;B 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] Duty ratio: 50% 17500 17500 Duty ratio: 50% 15000 15000 12500 12500 10 10 7500 7500 Duty ratio: 75% 5000 5000 Duty ratio: 75% 2500 2500 0 0 0 2 4 6 8 Work load [kg] 0 5 10 15 Work load [kg] LEFS32S

Ozone Resistant

discharge Industrial environment Semiconductor dry cleaner Industrial environment Electric dust collector A few ppm Reference: Shigeyuki Ota and Hironori Shimizu (Eds) Ozone Riyo no Riron to Jissai ("Theory and Practice of Ozone Use") Riaraizu Co., Inc., (1989) 8 List of Ozone Resistant Products 1: Standard (HNBR) Description Series Description Series ARM Pressure control valves 1000 2000 2500

HAW

HAW22 HAW37 HAW55 HAW75 HAW110 Screw flange (With companion flange) HAWF-141 HAWF-142 HAWF-200 HAWF-200 Auto drain AD402-04 AD600-06 AD600-10 Model Selection (Flow Capacity l/min (ANR)) JIS Symbol Model HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 50C 2000 6000 12000 12000 12000 18000 1000 70C 100C 180C Inlet air temperature 300 1000 3300 5700 8600 12000 18000 150 700 2500

Micro-Mist Separator with Prefilter Series AMH

.-.r. 0 0 500 1000 1500 2000 2500 Air flow rate Qlmin (ANR) 3 SeriesAMH Construction AMH150 ~ AMH650 AMH850 OUT OUT IN IN ... ... ... ... ,~ I 4 , I 2 2 I 3 Main Parts Note) Sight glass is indicated in the figure above for easy Material Remark Description No. understanding of parts, however mounting position is different. Refer to Dimensions for details.

Series HAW Water Cooled Aftercooler 1

HAW55 HAW75 HAW110 Applicable model Screw flange (With companion flange) HAWF-141 HAWF-142 HAWF-200 HAWF-200 ID Auto-drain AD402-04 AD600-06 AD600-10 AMG Model Selection (Flow Capacity l/min (ANR)) AFF HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model 1000 70C 100C 180C 50C 2000 6000 12000 15000 22000 30 Inlet air temperature 300 1000 3300 5700 8600 12000 18000 150 700 2500

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Piston Note 3) speed H (High speed/ High frequency type) 5 to 3000 mm/s (Refer to page 20.) 250 cm3/min or less 300 cm3/min or less 150 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage 1000 cm3/min or less 1200 cm3/min or less 800 cm3/min or less Supply pressure 0.3 MPa 2500 cm3/min or less 3000 cm3/min or less 1500 cm3/min or less Supply pressure 0.5 MPa Note 1) Value when

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

iron core assembly Fixed iron core Exhaust poppet Return spring Poppet spring Coil assembly VFN u i o How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A SY100 30 A Lead wire length Without lead wire: (With connector and 2 pcs. of socket) Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500

Electric Actuator / Slider Type 《 AC Servo Motor 》

Initial value Recommended value Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 2500 1500 750 3000 2000 1000 3750 2500 1250 Feel length multiplication (STM) (Multiplier) PA05 0 0(Less than stroke 1000)/ 0001(Stroke 1000 or more) Home position return type PC02 0 3Stopper type Home position return direction PC03 0001 1 (Motor side) Home position return Speed

LMU100/200 Series Mist Spray Unit

Model LMU100 LMU200 ALF ALT Inlet air pressure Oil tank set pressure range Oil Dynamic viscosity of oil (40C) 0.1 to 1.0 MPa 0.05 to 0.2 MPa Turbine oil, Non-water soluble cutting oil (JIS, N1 type) 2 to 200 mm2/s Total capacity: 3000 Effective capacity: 2500 5 to 50C 100 VAC 50/60Hz, 200 VAC 50/60Hz, 24 VDC ALD ALB Oil tank capacity (cm3) Ambient and fluid temperature Solenoid valve voltage

IDX-OM-W026

() ON OFF ON IDF Series 5-2 5 3 IDX-OM-W026 6 6-1 IDF22E-20 IDF22E-30 IDF37E-20 IDF37E-30 IDF55E-30 IDF75E-30 50Hz 3.9 5.7 8.4 11.0 m 60Hz 4.3 6.1 9.8 12.4 3/min (ANR)1 MPa 0.7 35 40 32 10 550 MPa 0.151.0 24085% (4) V AC200(50Hz) / AC200,220(60Hz) (2) A 4.3 / 4.7 3.3 / 3.5 4.3 / 4.7 3.3 / 3.5 6.0/6.6 7.2/8.0 (2) W 810 / 940 850 / 1070 810 / 940 850 / 1070 1450/1890 2000/2500