Compact Type Dual-Rod Cylinder Series CXSJ

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 r q e !2 !1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

JIS B2401-1A-P85 NBR I.D. 84.6 x 5.7 O-ring r JIS B2401-4D-P85 FPM JIS B2401-1A-P11 NBR u !

Series M Miniature Fittings M3, R(PT) 1/8, M5

32 to 140F (5 to 60C) Ambient and fluid temperature Accepts Many Types of Plastic Tubing 1 8 M3, M5, R(PT) Port size JIS B 0209 Class 2 (Metric coarse thread), JIS B 0203 (Taper pipe thread) Thread Hose nipple and hose elbow accepts nylon, soft nylon, and polyurethane tubing.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

O

Com pressed ai r can be dangerous i f an operat or i s unf am i l i ar w i t h i t . Assem bl y, handl i ng or repai r of pneum at i c syst em s shoul d be perf orm ed by t rai ned and experi enced operat ors. D o not servi ce m achi nery / equi pm ent or at t em pt t o rem ove com ponent s unt i l saf et y i s conf i rm ed. A.

O

Com pressed ai r can be dangerous i f an operat or i s unf am i l i ar w i t h i t . Assem bl y, handl i ng or repai r of pneum at i c syst em s shoul d be perf orm ed by t rai ned and experi enced operat ors. D o not servi ce m achi nery / equi pm ent or at t em pt t o rem ove com ponent s unt i l saf et y i s conf i rm ed. A.

CJP

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

R.

XLAQ/XLDQ

t w, r, t e Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

RZQ

To confirm this distance of an extra travel (overrun) in Graph 3 , Lines q to r can be selected from the following table.

CJP

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

LV50-OMQ0002

Approx. 1.7 mm Colours Brown, White, Black, Blue Sheath Material Lead free heat and oil resistant PVC Finished O.D. 6 -66No.LV50***-OMQ0002-G Characteristics Chart Flow characteristics (pressure loss) LFE1 LFE2 0.02 0.02 P r essur r e l oss[ M P a] 0.015 0.015 P r essur e l oss[ M P a] 0.01 0.01 0.005 0.005 0 0 0 5 10 15 20 0 20 40 60 80 100 Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n]

XLDV Series

Barrel Perfluoro R is a registered trademark of Matsumura Oil Co.,Ltd. Kalrez R is a registered trademark of Dupont Dow Elastomers. Chemraz R is a registered trademark of Greene, Tweed & Co. 3.

IP8001 Series

(740) = qo50 Quick opening 50:1 (R=50) Y=(1-R-X)1/0.98 (750) = USEr Users definition11 polygonal line settings The default value at shipping is (700) = (Lin) Linear.

Rotary Table: High Precision Type

Basic moment of inertia 2 r m I m : Weight [ kg ] r : Center of gravity of load and distance of rotational axis [ m ] This shows moment of inertia of m (weight) at r distance from the axis of rotation. The calculation for the moment of inertia depends on the shape of the object. Date 2 shows formulae to find moment of inertia of various shapes.

LV50-OMQ0004

[L/min] Flow rate [L/min] Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n] LFE3 0.02 Pressure loss [MPa] 0.015 P r essur e l oss[ M P a] 0.01 0.005 0 0 50 100 150 200 Fl ow r at e[ L/ m i n] Flow rate [L/min] -25No.LV50***-OMQ0004-F IN side straight pipe length (reference value) Straight pipe length 5 Change of accuracy [%F.S.]

REGULATOR

AR-OMT0015 PRODUCT NAME REGULATOR MODEL/ Series AR20K-(F,N)01 (F,N)02(B,E,G,H,M)(-1,N,R,Y,Z)-B AR25K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR30K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)02 (F,N)04(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)06(B,E,G,H,M)(-1,N,R,Y,Z)-B AR50K-(F,N)06 (F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B AR60K-(F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B Contents PAGE 1.

Mini Rotary Actuator

Basic moment of inertia 2 r m I m : Weight [ kg ] r : Center of gravity of load and distance of rotational axis [ m ] This shows moment of inertia of m (weight) at r distance from the axis of rotation. The calculation for the moment of inertia depends on the shape of the object.

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise