High Vacuum Angle Valve, XL Series XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
How to Order 2 2 0 0 01 M AS Option Body size None With seal Nil S 1 2 2 Meter-out Meter-in M5 standard 1/8, 1/4 standard Type Direct cylinder elbow type Control type M5 and U10/32 are not available with seal.
depth 4 (Piping port) OUT IN Steel balls 8-28-25 25 Series CXSJ Dimensions: 15 to 32 Standard Piping U Q R T ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2 x 2-4.3 through
A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2 x 2-4.3 through 2 x 2-8 counterbore with depth 4.3 2 x 2-5.5 through 2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11
(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.
type GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge Round G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.
CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.
VQZ2000-SVQZ2000 (1) (1) VQZ3000-SVQZ3000 (2) (2) (2) Coil voltage (2) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 Note 1) L, LO, M and MO types are attached with light and surge voltage suppressors as standard. Note 2) DIN style is applicable to VQZ2000, 3000.
Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver * Please consult with SMC for non-standard strokes as they are produced as special orders. * Specifications and dimensions for the 25A-series are the same as standard products.
Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 Series MB 6 x 1 m AS2301F-06 AN110-01 VZ5120-01 3-3-55 Series VZ5000 Construction 2 position single 2 position double De-energized De-energized 3 position closed center/exhaust center/pressure center 3 position closed center De-energized De-energized 3
15 to 32 Standard Piping U Q R T ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-Rc1/8 thread depth 5 SS T Bore size (mm) 2 2-4.3 through 2 2-8 counterbore with depth 4.3 2 2-5.5 through 2 2-9.5 counterbore with
8 (Metric) 04 2 x Rc1/2 (Branch specification) F06 G3/4*2 *3 The same thread type selected for e is used for the port. t Supply valve/Release valve combination u Electrical entry F04 2 x G1/2*2 (Branch specification) N06 NPT3/4 5/16" (Inch) N04 2 x NPT1/2 (Branch specification) L plug connector M plug connector L: Lead wire length 0.3 m M: Lead wire length 0.3 m K1 Supply valve (N.C.),
Y7BWV Solid state switches marked with are produced upon receipt of order. 3-wire (NPN) 2-wire IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V Relay, PLC IC circuit 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil(Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since there are other
Grommet T79 2-wire 12V Connector T79C S79 3-wire (NPN) IC circuit Grommet 5V, 12V Heavy-duty cord 3-wire (PNP) S7P For 20, Relay, PLC D24V 30 and 40 Grommet 100V R73 Connector R73C 2-wire Grommet 48V, 100V IC circuit 100 V or less R80 Connector R80C 24 V or less Lead wire length symbols: 0.5 m Nil (Example) R73C 3 m L (Example) R73CL 5 m Z (Example) R73CZ None N (Example) R73CN 63 Series
EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series
(R) 2-Applicable tubing 10 41 18.5 29 24 29.4 17 M L1 M L1 17 12 58 20.9 46 25 31.4 22 D1 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.
(R) 2-Applicable tubing 10 41 18.5 29 24 29.4 17 M L1 M L1 17 12 58 20.9 46 25 31.4 22 D1 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.
P4DWZ 5 m 2-wire (14) 2-color display P79WSE Pre-wired connector 24 VDC 0.3 m CLK2P series DC / AC magnetic field P74L 3 m Reed switch 24 VDC 100 VAC Grommet (Pre-wired connector) 1-color display 2-wire P74Z 5 m Note 1) PLC: Programmable Logic Controller Note 2) Refer to page 17 when ordering the auto switch mounting bracket assembly or switch mounting rod assembly. 1 Series CLK2G/CLK2P
A96 V V IC circuit 2-wire 24 V 12 V 100 V A93V*2 A93 V V V V Relay, PLC No 100 V or less A90V A90 V V IC circuit *1 Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. *2 1 m type lead wire is only applicable to D-A93. * Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example
Item Load factor n Note Examine m. mmax is the max. load mass for Va. 1 = m/mmax 1: Maximum load mass Examine M1, M2, M3. Mmax is the allowable moment for Va. 2 = M/Mmax 2: Static moment Examine M1E, M3E.