1.63

11 11 14 14 30.5 36.5 40.5 46.5 54.5 68.5 NPT1/8 NPT1/8 NPT1/8 NPT1/8 NPT1/4 NPT1/4 G1/8 G1/8 G1/8 G1/8 G1/4 G1/4 512 Compact Guide Cylinder/Wide Type MGPW Series 20 to 63/MGPWL, MGPWA Stroke Z 4 x YY depth YL Stroke Z L 4 x MM depth ML 4 x NN through DA DB T R U H X V PW MGJ 2 x P JMGP OL MGP GA GB MGPW MGPW 4 x OA through 2 x OB counterbore FA FB MGQ C + Stroke Q J K B + Stroke E S G MGG

MHF2

Stroke can be selected to suit the workpiece. 8 12 16 20 8 12 16 20 Short mm mm mm mm Medium 16 24 32 40 mm mm mm mm Long 32 48 64 80 mm mm mm mm 12-3-2 3 Improved mounting repeatability With positioning pin holes Auto switches can be mounted on both sides.

MHF2

Auto switches marked "O" are produced upon receipt of order. 12-3-8 9 Series MHF2 Low Profile Air Gripper Specifications Air 8: 0.15 to 0.7 MPa 12 to 20: 0.1 to 0.7 MPa 10 to 60C (with no condensation) 0.05mm 120 c.p.m. 120 c.p.m. 60 c.p.m.

MHY2/MHW2

8 !

New

R U T 64.5 20 149 52.5 Q VXF26D< 167 18.6 78.4 59.8 30 22 Series VXF2 Dimensions: Flange body II type VXF26D<<< Conduit terminal Conduit 206 206 S S J Qp2 Tp2 J 24.4 I R 24.4 I R Q z280 1/2 Exhaust port K 1/2 Exhaust port K (32) 8 x M10 x 1.5 x 75 8 x M10 x 1.5 x 75 G1/2 G1/2 (49) E (49) E U U (15) 24 24 96 96 (15) 106 106 Faston terminal 206 S J 11 Q I R 24.4 1/2 Exhaust port K 8 x M10

ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

Power Valve Precision Regulator

VBA VBAT AP100 841 VEX13 Series 0 3 Specifications VEX1A33 VEX1B33 VEX113 0 3 VEX123 0 3 VEX133 0 3 VEX153 0 3 VEX173 0 3 VEX193 0 3 Model Port 1(P) 2(A) 3(R) M5 01 M5 01 01 02 01 02 03 02 04 04 06 10 12 14 10 20 1 8 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 2 1 1 1 1 1 Port size M5 M5 1 2 4 1 4 1 2 Operation Manual knob (Push locking slotted type) and Air operated type Manual knob (Push locking

2-Color Display High Precision

None Nil M5 x 0.8 NPT1/8 (With M5 female thread) N01 Bracket A Rc1/8, G1/8 A W1 Rc1/8 WF1 G1/8 Rc1/8, G1/8 Bracket B B M5 M5 x 0.8 (Female thread) M5 x 0.8 Bracket D C4 4 one-touch fitting D C6 6 one-touch fitting 4, 6 one-touch fitting Made to Order Panel mount adapter Combination of piping specifications with option 1 and part numbers of options 01 N01 W1 WF1 M5 C4 C6 Option 1 Description

Step Motor Controller (Servo / 24 VDC)

Product Outline . 6 2.1 Product features . 6 2.2 Product configuration . 7 2.3 How to Order . 8 2.4 Option . 9 (1) Actuator cable (5m or less) . 9 (2) Actuator cable (8-20m) . 9 (3) Actuator cable for with lock and sensor (5m or less) . 10 (4) Actuator cable for with lock and sensor (8-20m) . 10 (5) I/O Cable . 11 (6) Controller setting kit . 11 (7) Teaching box . 12 2.5 Startup Procedures

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

2 x 3.4 28 8 2 x 2.5 depth 5 PFMB7201-F02L 88 48 18 OUT2 OUT1 10.2 DC () DC (+) 17 43 1 (34.2) 3 1 IN 18 2 x 3.4 IN OUT 2 x Port size G1/4 Width across flats 21 68 28 8 2 x 2.5 depth 5 8 Series PFMB7 Dimensions PFMB7201S-C8 96 76 58 48 18 OUT1 OUT2 10.2 DC () DC (+) 43 1 51.5 (Max. 58.5) IN OUT (34.2) 3 13 1 IN 18 2 x 8 One-touch fitting 2 x 3.4 28 20 8 3 x 2.5 depth 5 PFMB7201S-C8L 88 58

ZQ-OM01301

ZQ-OM01301-A 8.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

N1: 1/8 N3: 5/32 N7: 1/4 Y Note 2) Note 1) When specifying two or more options, enter symbols in alphabetical order.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

FKM: Fluoro rubber Trade names: Viton, Dai-el, etc. 8

Water-cooledThermo-chiller

the circulating fluid flow drops below 2.1 gpm (8 L/min)., the shutdown alarm activates and operation stops.

ChemicalThermo-con

Circulating fluid HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products Wetted parts material PFA Operating pressure Note 3) 0 (atmospheric pressure) to 0.35 MPa Tube size (PFA tube) 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 50 to 95 F (10 to 35C) (no condensation) Temperature Wetted parts material FEP , Stainless steel 304, Stainless steel 316 Facility

With Factory Installed

D.8 AR3001 1/4 3/8 53 127.5 35 53 29.5 41 2.3 40 46 6.5 8 53 52.5 36 8 AR4001 1/4 3/8 1/2 70 149.5 37.5 70 38 50 54 54 8.5 10.5 70 2.3 4 ~ Dimensionwameans from port center to eccentric direction of gauge center. Modular Type Filter I Regulator with Built-in Pressure Gaug.

CLA

::;Hs 1(0) 1(0) 5(1.5 8 4 0(6.5) 71.5 76.5 84.0 92.5 \02.5 D-A4 A 0(0) 0(0) 0(2.5) 2(6 4(75) [).Q3 B 1(0) 1(0) 5(1.5) 8(4) 10(6. 5) D-K3 ~ H, B3 88 95.5 10. 114 A 0(0) 0(0) 0(3 2.56.5 4.5 8 D-G5, [)'B5 1.5(0 1.5(0) 5.5(2) 8.5 4.5 10.5(7) ~.D-K5 ~ , 38 43.5 SO.5 59 69.5 A 0(0) 0(0) O{4.S 3 8) (9.5) D-I'S B 3(0) 3(0) 7(3.5) 10{6 12(8.5) , , D-JS 40 43.5 49 55.5 83 ~ Ht 31 42 35 so 51.5 _A 0

Auto Switch Guide

Avoid sources of surge generation and crossed lines. 8. Avoid accumulation of iron debris or close contact with magnetic substances.

Guide Table Series MGF ø40, ø63, ø100 1

Rc 1/8 relief port Port for extending cylinder Port for retracting cylinder 8-23-8 9 Guide Table Series MGF Construction @2 !2 y u !3 e q t r o w @0 !1 !7 !8 !9 !5 !6 !0 MX i MTS @4 MY CY MG @1 !

Auto Switch Guide

Avoid sources of surge generation and crossed lines. 8. Avoid accumulation of iron debris or close contact with magnetic substances.