: M5, JSY3: Rc1/16, JSY5: Rc1/8)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Model: 1FS, Thread: R (or None), Port Size: M5 (M5 x 0.8), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 04 (ø4), Seal: without Sealant

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: 1(180°), Thread: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 04 (ø4)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FS, Thread: R (or None), Port Size: M5 (M5 x 0.8), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 03 (ø5/32"), Seal: without Sealant

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 0°, Thread: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 03 (ø5/32")

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FS, Thread: R (or None), Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Applicable Tubing: 04 (ø4), Seal: without Sealant

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: E (8mm), Tube Size: 04 (ø4), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 06 (ø6), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Model: 1FS, Thread: R (or None), Port Size: M5 (M5 x 0.8), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 04 (ø4), Seal: without Sealant

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Model: 1FS, Thread: R (or None), Port Size: M5 (M5 x 0.8), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 06 (ø6), Seal: without Sealant

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 06 (ø6), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: 2 (90°), Thread: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 06 (ø6)

High Purity Fluoropolymer

M M H W Y L E 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size 18.5 35 1/8" 16.5 14 14 15 (L) 21.5 36.5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M H L M E W Y 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size VC 18.5 35 1/8" 16.5 14 15 14 L VDW 21.5

Fluoropolymer Piping Equipment

21.5 LQ1R2E-F3/16" 2.9 LQ1R2F-F 1/8" 1.8 LQ1R3A-F 3/8" 1/4" 3.6 21.5 LQ1R24-F 4 2.6 LQ1R2F-F 3 1.8 LQ1R31-F 10 1/4" 5.8 21.5 LQ1R3B-F 1/4" 3.6 LQ1R3C-F 3/8" 3/8" 25.5 5.8 25 LQ1R3D-F 1/4" 3.6 LQ1R3F-F 3/8" 1/8" 34.5 19.7 5.8 18.5 LQ1R4A-F 1/2" 3/8" 24 7.4 5 20 9 18 17 36.5 21.5 LQ1R32-F 8 5.5 LQ1R33-F 6 3.6 LQ1R34-F 10 3/8" 25.5 24 23 5 9 18 36.5 7.4 20 17 23 25 LQ1R35-F 8 5.5 LQ1R36-F 6

&snac

m i n i m u m c l e a r a n c e o f 1 0 O m m u n d e r t h l s e q u i P m e n t ' ( R e f e r t o P . 7 , 8 . ) f u n c t i o n r e f e r r e d i n P . 5 f l D o u t . , C L E A N I N G O F A U T O D R A I N , , . a c o n f i r m n o r m a I P e r f o r m a n c e o f r n e m b r a n e a i r d r Y e r b Y c o l o r o f g r a i n s i n s i d e t n e d e w P o i n t c h e c k e r ( O P t

LG1H

Refer to pages starting with 181 for mounting. 30 100 95 95 B 8(4)-6.2 (160) () () 110 95 20 95 A () () (140) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H202SC-100-F LG1H202SC-200-F LG1H202SC-300-F LG1H202SC-400-F LG1H202SC-500-F LG1H202SC-600-F LG1H202SC-700-F LG1H202SC-800-F LG1H202SC-900-F LG1H202SC-1000-F LG1H202SC-1200-F 50 150 250 350 450 550 650 750 850 1050

V

30.5 15 46 12 10 D I M E N S I O N S PA D D I A M E T E R S 10, 13, 16 D I M E N S I O N S PA D D I A M E T E R S 40, 50 F L AT T Y P E F L AT W I T H R I B G:M5x0.8 G:M6x1 Y Model A B C D F L AT T Y P E F L AT W I T H R I B E F E F Flat Flat with rib H:M6x1 H:M8x1 Y ZPT10 U C 10 12 12 17 20 38 25 43 3 1.7 Model A B D E C F G C F G Flat Flat with rib ZPT13 U C 13 15 12 17 20 38 25 43 3 1.8

7

J I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN terminal C T U T T U U V 10

PFxx-OMP0001CN

OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -35No.PF-OMP0001CN-F [F 2] OUT2 OUT2 (28 )(29 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] OUT2 [---] [oU2][] [2ot][] 37 38 39 40 -36No.PF-OMP0001CN-F a.