01-mxf-e

Applied part GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide Cylinder 120

01-mxp-e

GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit 123

01-mxq-e

Applied section GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide Cylinder 118

01-mxqr-e

Applied part GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit 119

01-mxs-e

Applied unit GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit 117

01-mxw-e

Applied part GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide Cylinder 121

01-mxy-e

GR-S-010 (10 g) GR-S-020 (20 g) 124

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: -, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: -, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Pressure Range: -100.0 to 100kPa, Piping Specifications: R1/8 Piping Adapter, Side Ported, Output Specifications: PNP Open Collector 1 Output+Analog Voltage, Unit Specifications: -, Lead Wire: -, Adapter: -, Calibration Certificate: -

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: R1/8 Piping Adapter, Side Ported, Output Specifications: PNP Open Collector 1 Output+Analog Voltage, Unit Specifications: -, Lead Wire: -, Adapter: -, Calibration Certificate: -

Model: 0 to -101kPa, Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: -, Lead Wire: -, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

Model: -100 to 100kPa, Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: -, Lead Wire: -, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: -, Lead Wire: -, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

Series HAW Water Cooled Aftercooler 1

Description Housing Outside tube Body Flower fin tube assembly Material Note SGP, SS400 STK FC200 C1220T Flower fin Flower fin q w e r q w e r Water chamber cover FC200 t AFF AM Replacement Parts Replacement Parts Misc. HAW22 HAW55 HAW75 HAW37 HAW110 No. Description HAW2 HAW7 Material No.

K35-OMX0069

Example of fail-safe circuit Fail-safe circuit (7) (9) FU port FB port FA port (6) Air (8) Manual EB Manual EA cylinder G (3) Shut off valve Shut off valve (1) (2) E-STOP valve Servo valve Servo valve Air supply port (4) R3 port (5) (10) R2 port R1 port P port Air servo cylinder circuit (Main circuit) Components No.

MHx-OMU0057

MHZ-A1010 MHZ-A16010 MHZ-A2010 MHZ-A2510 Ass'y MHZ-AA1004 MHZ-AA1604 MHZ-AA2004 MHZ-AA2504 3 1= 2= 3= /GR-S-010 (10g) W= K= M=M5 E= Assy E 17 - 32,40 / / / / 11 1 12 2 13 3 14 C 4 15 A 5 16 6 17 NO 7 18 NC 8 19 NBR 9 20 NBR 10 21 NBR MHZ2-32 MHZ2-40 MHZ32-PS MHZ40-PS 19,20,21 MHZ2MHZ-A3202 MHZ-A4002 MHZ2-1 MHZ-A3202-1 MHZ-A4002-1 4,5,6,11,13 Ass'y MHZ2-2 MHZ-A3202-2 MHZ-A4002

LEC-T1_C

L E C T 1 3 J G S 1 S 1 2 J 2 E 2 3m 1 6.43 2 6.3 9 TB 12 - 3. 3.1 (1) TB Ver.5.11 TB Ver2.1LECPA No.0 1 LECPA TB Ver2.1LECPA No. 1 ) TB Ver1.** TB Ver2.**/ / (2)Tree TB Ver.5.11 MENU Data No. 2 Data Monitor JOG Test Alarm Setting Ver1.** Ver2.** 12 TB Ver2.1*LECPANo.0 Monitor No. 2 JOG Test 1 LECPATB Ver2.1*LECPA Alarm Setting Ver1.

Pneumatic Purification

inlet temperature; 100OF ambient and 100 PSIG IDF Series : Compact Series Low noise operation (to 45db) Compact size Economical 50OC dewpoint External float autodrain included High performance heat exchanger IDF3/4 IDF6-37 PDE Series : Standard Series MODEL AIR FLOW POWER CONS COMPRESSOR VOLTAGE CONNECTION PRESSURE FREON DIMENSIONS (INCHES) WEIGHT AMPS HP CFM NOM MAX MAX PSIG A B C D E

MGC

Stroke MGCMl40-R Stroke MGCMl50-R Stroke 3.20-8 Compact Guide Cylinder Series MGC Allowable Tip Load and Deflection Ball bushing bearing MGCLl20-R Stroke MGCLl25-R Stroke MGCLl32-R Stroke CL MLGC CNA CB CV/MVG CXW CXS CXT MX MXU MXS MGCLl40-R Stroke MXQ MXF MXW MXP MG MGP MGQ MGG MGCLl50-R Stroke MGC MGF CY1 MY1 3.20-9 Series MGC Basic/With Rear Plate Bore (mm) Stroke range (mm) AF F AE E