Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Floating Joint

Applicable model P215420-07 For JT20 7 Dust cover P215432-07 For JT32 P215440-07 For JT40 Dimensions JT20 to 40 M, P D M E F C G A B H Standard Pneumatic: Up to 0.7 MPa [mm] Model Connection thread M A B C D E F G Width across flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28 12 16.3 27 11.5 38 g JT40 M14 x 1.5

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 05 (5 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 05 (5 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 06 (6 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 06 (6 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 07 (7 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 07 (7 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 10 (10 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: S (w/Flow Adj.

Stations: 10 (10 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: S (w/Flow Adj.

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor ( 100/200 W )

Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver Applicable Stroke Table 4 )Standard DProduced upon receipt of order Stroke (mm) Model 200 400 300 500 600 700 800 900 1000 1200 1500 LEJS40 LEJS63 ) ) ) D D ) ) ) ) D D D D ) ) D ) D D D 4: Strokes other than those shown above are produced as special order (1 mm increments).

XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-FM AS-D AS-T ASP ASN AQ Dimensions ASV Universal type AK Applicable tubing O.D. d VCHC Applicable tubing O.D. d Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 (1) A (2) M1 Max. Min. Max. Min.

20

D H1 KNH-R02-100 KNH-R02-150 KNH-R02-200 1 1.5 2 R1/4 14 52 46 D H1 A L1 Reference dimensions after R thread installation Low noise nozzle with male thread: KNS [mm] Connection thread L1 A Width across flats Nozzle size Part no.

Series H, DL, L, LL Self-align Fittings

Female union Plug P. 104 DHF Use to pipe from male threaded portion such as pressure gauge. P. 106 DP Use to plug unused fitting Branch tee P. 105 DT Use to branch line from female thread of both sides 90 direction. Swivel elbow P. 106 L Use to pipe at right angle to female thread portion. Swiveled at any direction.

Unit Manifold Valve

D-DN This catalog is printed on recycled paper with concern for the global environment.