Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: DN (D+N)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: S (Pump Inverter Type), Option: DN (D+N)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: DN (D+N)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: DYZ (D+Y+Z)

Cooling Capacity: 030 (30 kW), Type: Fluorinated Fluid, Pump Inverter Control: None, Option: D (DeviceNet Communication)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: S (Pump Inverter Type), Option: CDNWYZ (C+D+N+W+Y+Z)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: DNWYZ (D+N+W+Y+Z)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: S (Pump Inverter Type), Option: DYZ (D+Y+Z)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: S (Pump Inverter Type), Option: DNYZ (D+N+Y+Z)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: S (Pump Inverter Type), Option: CDNW (C+D+N+W)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: S (Pump Inverter Type), Option: DNWYZ (D+N+W+Y+Z)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: CDNWYZ (C+D+N+W+Y+Z)

Cooling Capacity: 030 (30 kW), Type: Fluorinated Fluid, Pump Inverter Control: S (Pump Inverter Type), Option: CDNWZ (C+D+N+W+Z)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: S (Pump Inverter Type), Option: CDWYZ (C+D+W+Y+Z)

Cooling Capacity: 030 (30 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: None, Option: CD (C+D)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: CDNW (C+D+N+W)

IDX-OM-W031

Turn to 30 8) Hold the bowl assembly lightly and pull down the lock button (right or left) with thumb. Then, turn the bowl assembly to the left (or right) to 30o to align the marks. 9) Release your thumb from the lock button and slowly pull down the bowl assembly (vertically) to remove it. 10) Pour solution of neutral detergent into the bowl assembly and shake it well to clean.

Regulator

Recommended tightening torque [N-m] Piping Warnin Warnin Warnin Warning g g g Thread 1/4 3/8 1/2 IN OUT port 12 to 14 22 to 24 28 to 30 EXH port 8 to 10 Do not apply any additional twisting, or bending moments except for the weight of the filter regulator itself. Provide separate support for external piping, as damage may otherwise occur.

IR30-OM00013

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

VBA-OM-S001

No gap Booster regulator Air tank Booster regulator A B C D E F G H I J K L M Grooves There should be no damage or dust O-rings VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc 3/8 257 60 Rc 1/4 20 Air tank There is a slight play on the diagonal parts.