Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: CDNW (C+D+N+W)

IDX-OM-W031

Turn to 30 8) Hold the bowl assembly lightly and pull down the lock button (right or left) with thumb. Then, turn the bowl assembly to the left (or right) to 30o to align the marks. 9) Release your thumb from the lock button and slowly pull down the bowl assembly (vertically) to remove it. 10) Pour solution of neutral detergent into the bowl assembly and shake it well to clean.

Regulator

Recommended tightening torque [N-m] Piping Warnin Warnin Warnin Warning g g g Thread 1/4 3/8 1/2 IN OUT port 12 to 14 22 to 24 28 to 30 EXH port 8 to 10 Do not apply any additional twisting, or bending moments except for the weight of the filter regulator itself. Provide separate support for external piping, as damage may otherwise occur.

IR30-OM00013

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

VBA-OM-S001

No gap Booster regulator Air tank Booster regulator A B C D E F G H I J K L M Grooves There should be no damage or dust O-rings VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc 3/8 257 60 Rc 1/4 20 Air tank There is a slight play on the diagonal parts.

VBA-OM-P018

VBA-0M-P018-A VBAT10A1-U-X104 VBAT-M35C 2 / VBAT05A1-U-X104 VBA1 4 / VBA1 4 /VBAT10A-Y-3 VBA2 4 VBAT05A1-U-X104 VBAT10A1-U-X104 VBA1 1 O /VBAT5A-Y-3 O VBA1 1 VBA2 1 1 1 / VBAT-U 1 1 1 / VBAT-U 1 1 1 / VBAT-M35 / VBAT-M35C () () 1 1 / VBAT-M35 / VBAT-M35C () () 1 1 1 1 SMC ( 3 ) VBA2 VBA1 () 30 IN 1.5MPa VBA1A 2MPa, O 1.5MPa OUT VBATA1--X104 VBAT-V1 OUT

VBA-OM-P019

2 VBA-OM-P019-A VBAT20A1-T-X104VBAT38A1-T-X104 VBAT-M36C / VBA2 4 VBA4 4 /VBAT20A-Y-3 VBA2 4 VBAT20A1-T-X104 VBAT38A1-T-X104 VBA4 4 VBA2 1 O VBA4 1 1 / VBAT-T 1 1 1 / VBAT-M36 / VBAT-M36C () () 1 1 1 SMC ( 3 ) () 30 IN 1.0MPa OUT VBATA1--X104 O VBAT-V1 OUT 4 13 () 1 VBAT20A1-T-X104 VBAT38A1-T-X104 1.0MPa Q235B 22L 38L 075 15kg 26kg VBAT-V1 IN 1/2 OUT 1/2 3/

VBA-OM-S008

[Documents supplied with the air tank, the Check ticket of the safety valve and the certificate supplied with the pressure gauge are necessary.] (4) Register the product and related documents with the Special Equipment Safety Supervision Department before using the device or within 30 days after starting to use the device. (1) To confirm that the pressure is set at the set value, submit the

VBA-OM-S006

VBA-0M-S006 1.5MPa VBA1A 2MPa, 1.5MPa 1 1 1 VBA1 1 O VBA2 4 VBA2 1 VBA1 4 1 1 1 1 () () / OUT / VBAT-M46C / VBAT-M46 4 11 () VBAT10S1-U-X104 / /VBAT10S-Y-4 () VBAT-U 30 1 1 VBA1 4 O VBA1 1 /VBAT5S-Y-4 1 1 / 1 VBAT-U 1 1 ( 3 ) VBAT-V1 () () / / VBAT-M46C / VBAT-M46 VBAT05S1-U-X104 2 OUT VBAT-M46C VBAT05S1-U-X104 VBAT10S1-U-X104 IN VBAT05S1-U-X104

VBA-OM-S007

VBA-OM-S007 4 13 ()() OUT () 30 1 1 VBA2 4 VBA4 4 VBA2 1 O VBA4 1 1 1 VBA4 4 VBA2 4 1 1 1 1.0MPa ( 3 ) VBAT-V1 () () VBAT20S1-T-X104VBAT38S1-T-X104 / / VBAT-M47C / VBAT-M47 / 2 /VBAT20S-Y-4 VBAT-T OUT VBAT-M47C VBAT20S1-T-X104 VBAT38S1-T-X104 VBAT20S1-T-X104 VBAT38S1-T-X104 13kg 19kg 20L 38L OUT 1/2 3/4 O IN TSG R0003-2007 VBA2/VBA4 1.0MPa SUS304 0~75

S Couplers

Thread size Tightening torque (Nm) NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 NPT, R3/4 28 to 30 NPT, R1 36 to 38 NPT, R1 1/4 40 to 42 NPT, R1 1/2 48 to 50 (3) If the product is screwed in with excessive torque, a large amount of sealant will seep out.

ZISE20B-L.eng

.: ZS-46-D) [F 2] Setting of OUT2 Same setting as [F 1] OUT1. Item Default setting OUT2 set value Bottom value Peak value OUT2 hysteresis Switch output specifications Diagnostic information PNP ALL : One arbitrary display mode can be added to the sub display by setting the [F10] sub display.

ZISE20C-L.eng

.: ZS-46-D) Switch output specifications Diagnostic information PNP Panel ALL : One arbitrary display mode can be added to the sub display by setting the [F10] sub display. If the sub display is switched during the arbitrary display setting, the display will be returned to the arbitrary display 30 seconds later. (The default setting does not include arbitrary display.)

ZISE20.eng

.: ZS-46-D) Hysteresis "Nil" or M kPa ZSE20(F) : Arbitrary display These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of "Caution", "Warning" or "Danger".

ZISE3.eng

In this case "d" is displayed on the LCD. To reset holding, press the button again. 2. OUT1(1) set value input Pressing the button increases the set value. Pressing the button decreases the set value. Press the "SET" button to set the value and select the output OUT1(2) set value input mode. The set value of P2 is displayed.

VP3145-OMM0003

: 1 : JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VP3145-OMM0003 VP31*5 / 1 1.5 *3) *3) 1 1 3 VP3145-OMM0003 VP31 5 3 / / () C-R C-R ( ) DC 5% AC 15% (ON)(OFF) 0.1 0oC 0.2Mpa (INOUT ) 4 VP3145-OMM0003 VP31 5 3 / ( ) 9 ) 1 ()ISO VG32 2 ()ISO VG32 5m Nm Rc 3/8 2224 Rc 1/2 2830 Rc 3/4 2830 Rc 1 3638 Rc 11/4 4042 Rc 11/2 4850 Rc 2 4850 +/5 VP3145-OMM0003 VP31 5 3 / ( ) 30

VT307N-OMV0001

2) 3) NO.1 ( -1) 4) 1) NO.2 NO.1 2) (+) 1) 0.5Nm15% 2) 68mm 3) Y 1) NO.2 (-) () DIN 2) 3) 1) 0.5Nm20% 2) 180 DIN B1B09-2A() DIN GM209NJ-B17(CE ) D 68 AC100V AC200V DC + 7 No.VT307N-OMV0001 VT307 Series/ VT/O307V 3(R) 3(R) 2 M4 M4 1.4Nm(M4 ) N.C.

VT317-OMH0003

(T) (G) (C) DIN (D) () (S) 101.2kPa0.1MPa 1. (S) 2. ACl00V AC200V DC + DIN 7 VT317**-OMH0003-A DIN 1. 1) () 2) 3) 3a 4) 2. 1) 2 33f 3e Y 3f )0.5Nm15% a 3f 3d 2 3.5 b O 1.25mm 2 4 Y 1.25mm c 612mm 912 3. 1) ) 2) 3) )0.5Nm20% 904 DIN AC DC DC AC 8 VT317**-OMH0003-A N.C.N.O. 1. N.C./N.O.180 N.C. N.O. N.C.N.O. * N.C.N.O. N.C. N.O. N.C. N.O. 1.M4 2 1.4Nm 2.

VFR3000-OMY0001

-2No.VFR3000-OMY0001 / 1 1.5 *3) *3)1 1 () No.VFR3000-OMY0001 -3- VFRA30004000 5 / () () () () -10 3 3 EXH (VVFS3000-R-03-1,2 VVFS4000-R-04-1,2) () () 3 , 4 VFR3000-OMY0001 VFRA3000,4000 5 1) 2) 1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 1 1) M5 1/61/4 11.5Nm ) 2) Rc Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 5 VFR3000-OMY0001 VFRA3000,4000 5 () () 5 3 30 ( ) 1 ()ISO

SI unit for DeviceNet ®

D: Limited warranty and Disclaimer are added. E: Modified errors in text. F: Revision. G: Contents are added. [July 2016] H: Contents revised in several places. [December 2021] I: Contents are added.