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25-MLA-X523 (6) Digital pressure switch (with accessories for mounting) PNP ISE35-N-65-MLA-X523 ISE35-R-65-MLA-X523 NPN ISE35-N-25-LA-X523 ISE35-R-25-LA-X523 ZA : Unit selection function PNP ISE35-N-65-LA-X523 ISE35-R-65-LA-X523 Z : Unit selection function Initial setting: psi NPN ISE35-N-25-PLA-X523 ISE35-R-25-PLA-X523 NPT PNP ISE35-N-65-PLA-X523 ISE35-R-65-PLA-X523 Note) [12.

N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40W-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50W-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D Contents Page 1.

-2No.PF-OMJ0005CN-I / 1 1.5 *3) 1 1 [] -3No.PF-OMJ0005CN-I () () () N2CO2Ar () -4No.PF-OMJ0005CN-I () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL , (100 20 ) JIS B 8392-1 1.1.21.6.2 -5No.PF-OMJ0005CN-I * 14 FG (49 N () IN () -6No.PF-OMJ0005CN-I * () 6 33 () () 30 m DC(-)() -7No.PF-OMJ0005CN-I * () () CE 0~50 -8No.PF-OMJ0005CN-I * 3 (20 ) LED * OUT * 23% -9No.PF-OMJ0005CN-I

) output type Max. 80 mA Internal voltage drop: 1 V or less Analogue output: 1 to 5 V Output impedance: approx. 1 k PFM34 PNP (2 outputs) + Analogue (4 to 20 mA) output type Max. 80 mA Internal voltage drop: 1 V or less Analogue output: 4 to 20 mA Max. load impedance: 600 (24 VDC) Min. load impedance: 50 PFM35 PNP (2 outputs) + External input type Max. 80 mA Internal voltage drop: 1 V or

40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12 11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T) 4

(R) EEPROM = Memorize data although power is off. (R/W) RAM = Actual memory the SI unit is working with. (R/W). 1. Reset node, Reset com or Power cycle: EEPROM is copied into RAM 2. STORE: Copy RAM (with modified/non modified values) into EEPROM 3.

M8 x 1.25 6.6 32 25, 50, 75, 100 125, 150, 175 200, 250, 300 350, 400 91 69 16 12 10 54 14 10 14 120 M6 27 27 40 M8 x 1.25 20 M8 x 1.25 6.6 40 97 69 20 16 12 64 14 11 12 148 M8 32 32 46 M10 x 1.5 22 M10 x 1.5 8.6 50 102 74 20 16 12 78 16.5 13.5 16.5 162 M10 39 39 58 M10 x 1.5 22 M10 x 1.5 8.6 63 (mm) WB WA Bore size (mm) OB OL P PA PB PW Q R S T U VA VB 75st or less Over 75 to 175st 75st

, 25 50, 75, 100 50 83.5 75.5 14 73.5 65.5 10.5 10.5 15 20 64 M10 x 1.5 86 7 17 63 85 77 15.5 79 71 10.5 15 15 20 77 M10 x 1.5 103 7 17 (mm) Bore size (mm) R W Z L M N O P 32 7 34 5.5 9 Rc 1/8 7 49.5 14 40 7 40 5.5 9 Rc 1/8 7 57 14 50 8 50 6.6 11 Rc 1/4 8 71 19 63 8 60 9 14 Rc 1/4 10.5 84 19 Series CBQ2 Dimensions Foot type/CBQ2L, CDBQ2L (mm) Foot type B + Stroke L With rear lock With front

sealant) S valve (Material: Stainless steel 304) i Valve side exhaust Refer to page 478 for the maintenance parts. 473 XLDQ Series Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143

HOLD keykey SVON DRIVE RESET SETUP JOGJOG+ FLGTH MODE WRST Brake Origin SW: Origin switch Origin SW Limit SW-F: Limit switch F side Limit SW-F Limit SW-R: Limit switch R side EMS: Stop (Normal close) Limit SW-R EMS [ ] Stop Enable SW EMS [ ] Stop cancelled EMS 90 - (6-3-4) Output pin monitor It is possible to monitor the output pin of the controller with the pin number. (6-

When viewed from the side of the vacuum ports, the far left station is designated as station 1. 50 AEP 40 40 20 HEP Air consumption 30 20 20 10 Related Suction flow Equipment 10 0 0.6 0.4 0.2 0.5 0.3 0.1 0 8 6 4 2 Suction flow (l/min(ANR)) Supply pressure (MPa) Blanking plate assembly Part no.: ZA1-BP1 ZA07 Flow Characteristics ZA07 Exhaust Characteristics Supply pressure: 0.45 MPa Vacuum

Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Specications Model HRSH100-Al-20-l HRSH150-Al-20-l HRSH200-Al-20-l HRSH250-Al-20-l HRSH300-Al-20-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.27 2.1 2.1 2.8 2.8 Control method PID control Ambient temperature/Altitude Note 1), 9) C Temperature: 20 to 45, Altitude: less than 3000

10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal 10 10 P.42 Non-standard motor 6 6 P.50 Vertical 10 10 P.58 Options P.66 Construction P.67 Mounting P.68 Non-standard Motor Mounting P.69 Deflection Data P.71 Part Number Designations

Cooling Capacity: 030 [Cooling Capacity: 2500/2900 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: None

Cooling Capacity: 050 [Cooling Capacity: 4500/5000 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: None

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This product is obsolete. Please contact us for the latest version.sales@ocaire.com