SMC Corporation of America
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Nominal thread size Required torque Port size Width across flats of attachment Rc1NPT1 36 to 38 Nm 1 45 mm Rc1 1/2, NPT1 1/2, Rc2, NPT2 48 to 50 Nm 1 1/2 60 mm 2 70 mm 16 No.PF-OMU0002-D Wiring Connection Connections should only be made with the power supply turned off. Use a separate route for the product wiring and any power or high voltage wiring.

(Displays 0 when the value is below 60 L/min) 140 to 2100 L/min 70 to 1050 L/min (Displays 0 when the value is below 140 L/min) 7.0 0 to 7%F.S. (Displays 0 when the value is below 70 L/min) 160 to 2100 L/min 80 to 1050 L/min (Displays 0 when the value is below 160 L/min) 8.0 0 to 8%F.S.

50 30 45.6 40.6 15.2 24 14 35 26 18 13.6 2.7 14 PF3W520 3/8 1/2 78 54 30 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W540 1/2 3/4 98 71 38 53.6 48.6 19.2 32 28 49 35 28 16.8 2.7 12 PF3W511 3/41 124 92 46 62.6 57.6 23 41 42 63 48 28 18 3.5 14 S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2

Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g -12No.LV50***-OMQ0002-G Summary of Product Parts Body With lead wire and M12 connector (4 pins) Display (Option) Connector Piping port Piping port Bracket (Option) Description Function Connector The part to which lead wires are connected.

Installation distance mm Detection range mm IZD10-110 Sensor head 10 45 20 85 Installation distance 25 100 Detection hole 30 120 40 150 50 180 Installation distance mm Detection range mm IZD10-510 Detection range 25 100 30 120 Detection hole 40 150 50 180 Sensor head 60 205 70 225 75 235 6-3.

Cable Sensitivity block Model supply crimp Specifications Breaker of screw voltage terminal 1 size leakage diameter (A) current (mA) 3-phase 4 cores x 380 to 415V AC AWG10 HRS400-A(50Hz/60Hz) (4 cores x 5.5 mm2) M5 R5.5-5 40 30 463-phase including 460 to 480V ground AC(60Hz) 1 Cable specifications are the examples when using the product at a continuous allowable operating temperature of 70

Note2) Refer to the Construction of each series for the construction numbers. 6 XL-OMM0005-A Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials used

Use it within 60 to 100 degrees. 5 No.DIG-31900-OM002 70 Error Code List Table 16 shows errors detected while the positioner is being adjusted. When errors are detected during adjustment, adjust the settings again in accordance with the countermeasure. Once an error has been detected, it is possible to reset it to the mode before the detection with the set button ( ).

The INP output signal is turned on from 100[mm] 0.5[mm]=99.5[mm] Table Position[mm] c Area2[mm] j Area1[mm] j b Speed[mm/s] 100 0 AREA Output signal ON OFF INP Output conodition INP Output signal ON In pos[mm] k OFF 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] 27 - Example of step data input (2) Positioning operation Relative a b c d e f g h i j k Step data No.

20 20 10 10 10 0 0 0 100 200 300 400 500 V(mm/s) 0 100 200 300 400 500 V(mm/s) -10- (2)DC24V LEFS16A LEFS25A (mm) 1) 100,200,300,(400) 100,200,300,400 500(600) 7 10 11 18 (kg) ) 2 4 2.5 5 (mm/s) 2) 10500 5250 12500 6250 (mm/s 2) 3,000 (mm) 0.02 (mm) 10 5 12 6 (m/s 2) 3) 50/20 () 540 (%) 90 RH ) 28 42 (W) 30 36 DC24V A/B 800 //Z (V) DC2410% (W) 4) 63 102 (W) 5) 4 /9 4 /9 (W) 6) 70

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

. -3No.LEY*-OMZ0010 1Rod type / LEY Series 1.1 Specification Model LEY 25E-X8 LEY 32E-X8 LEY 40E-X8 (3000 [mm/s2]) 20 40 60 30 45 60 50 60 80 Horizontal Work load [kg] Note1) (2000 [mm/s2]) 30 55 70 40 60 80 60 70 90 Vertical (3000 [mm/s2]) 7 15 29 10 21 42 12 26 52 Pushing force [N] Note2) Note 3) Note 4) 63 to 122 126 to 238 232 to 452 80 to 189 156 to 370 296 to 707 132 to 283 266 to 553

Electric Actuators/Common Precautions 67 17.1 Design and selection 67 17.2 Mounting 68 17.3 Handling Precautions 69 17.4 Operating environment 70 17.5 Maintenance Precautions 71 17.6 Precautions for actuator with lock 71 18.

(LE ) ,, () EMG() 1000 1 -69- /(Best Pneumatics No(2)) 17.2 () () -70- 17.3. 90 100 (DC24V)SVON () a) b) c) d) e) D (100) -71- 17.4. 1. 2. () 3. () 4. 5. 6. 7. 8. () 9. 1000m (-10603585%) -72- 17.5 5 17.6.

/16 70/16 (2.667) (3.333) (4.375) (4.375) Max. speed [mm/s] 80 100 100 100 Min. speed [mm/s] (Independent and interpolation) 5 5 5 5 Min. speed [mm/s] (Speed tuning control) 7 8 8 8 Model LEHS10 LEHS20 LEHS32 LEHS40 Lead symbol K Lead [mm] 255/76 (3.355) 235/56 (4.196) 235/40 (5.875) 235/40 (5.875) Max. speed [mm/s] 70 80 100 120 Min. speed [mm/s] (Independent and interpolation) 5 5 5 5 Min

/16 70/16 (2.667) (3.333) (4.375) (4.375) mm/s 80 100 100 100 [mm/s] () 5 5 5 5 [mm/s] () 7 8 8 8 LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) mm/s 70 80 100 120 [mm/s] () 5 5 5 5 [mm/s] () 8 8 9 9 TM -111No.JXC-OMT0001CN-C Revision history 2015 9 2015 12 A 2016 3 B 2019 3 C 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN

h 2)-700.00mm GW [OUT Data]Address.6 Address.9 Address.7 Address.6 01h 00h 15bit 8bit 7bit 0bit (H) 00 01 11 70 h (H) Address.9 Address.8 70h 11h 15bit 8bit 7bit 0bit (L) 00 01 11 70 h (L) 0.01mm 2 -700.00mm -7016 FFFEEE90h PLC FF FE EE 90 h Address.7 Address.6 FEh FFh 15bit 8bit 7bit 0bit (H) FF FE EE 90 h (H) Address.9 Address.8 90h EEh 15bit 8bit 7bit 0bit (L) FF FE EE 90 h (L)

Note : The filter check port applies to the type built-in filter. 70 389 498 15 2402 297 270 62 IDH Series 6.3 Dimensions IDX-OM-W037 Thermo-dryer 6.

Figure 5-70 MESSAGE Screen [Tips] The setting is not performed when the [NO] key is touched, which causes the CH1(2) Analog Output Setting screen 1, 2 where the box is flashing to be displayed. Procedure for initializing TYPE, SCALING, and LIMIT settings 1. Touch the [Initial] key. The MESSAGE screen is displayed. Figure 5-71 CH1(2) Analog Output Setting Screen 1, 2 2.

JXC-OMT0002-C Model LEHF10 LEHF20 LEHF32 LEHF40 Lead symbol K Lead [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) Max. speed [mm/s] 80 100 100 100 Min. speed [mm/s] (Independent and interpolation) 5 5 5 5 Min. speed [mm/s] (Speed tuning control) 7 8 8 8 Model LEHS10 LEHS20 LEHS32 LEHS40 Lead symbol K Lead [mm] 255/76 (3.355) 235/56 (4.196) 235/40 (5.875) 235/40 (5.875) Max.