NCA1

/16 2 1/4 200 (2") 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 0.551 5/16-24 2 1/2 0.3 3/8 1.26 1.06 7/16 5/16-18 1.84 1 1.71 3 5/8 2.4 4 3/4 7/8 1 15/16 2 1/4 CS1 250 (2.5") 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 0.551 5/16-24 3 0 3/8 1.3 1.06 19/32 3/8-16 2.19 1 1.75 3 3/4 2.48 4 7/8 1 1/4 1 15/16 2 3/8 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-15-15 15 Series NCA1K Non-rotating Rod-Foot Style: NCA1KL (MS1 mounting

CXS

When using CXSJM6-10 and l = 15 mm: Imaginary stroke l = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 (6) ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 2.

CXS

When using CXSJM6-10 and l = 15 mm: Imaginary stroke l = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 (6) ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 2.

JXCx-OMU0004

16 15 L 11 30.7 64 No.JXC-OMU0004-A 12.

Programless controller Step motor (servo 24 VDC)

4000 150 4000 14 350 4500 175 4500 15 400 5000 200 5000 59 No.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

119 99 0.5 1.1 LEC-MR-RB-12 40 15 169 149 1.1 2.4 11 15 11.

CQS

5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 1*

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

15 18.3 15 6 6 9 9 With air cushion Air cushion type is not available for 21-/22-CJ2.

Proposals for Energy Saving

4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

SV

L Dimension n: Stations L n 2 135.5 125 102.6 16.5 63 3 148 137.5 113.1 17.5 73.5 4 148 137.5 123.6 12 84 5 160.5 150 134.1 13 94.5 6 173 162.5 144.6 14 105 7 185.5 175 155.1 15 115.5 8 198 187.5 165.6 16 126 9 210.5 200 176.1 17 136.5 10 210.5 200 186.6 12 147 11 223 212.5 197.1 13 157.5 12 235.5 225 207.6 14 168 13 248 237.5 218.1 15 178.5 14 260.5 250 228.6 16 189 15 273 262.5 239.1 17

LEC-OM07605CN

0 250 350 40 0 300 0 50 150 250 350 350 (1,2 [%]) (1,2 [%]) b a 1. ()30r/min100% 2. 300%350%LE-T10.1 10 3 10. 10.2 (1) 10.1 10.1 1 (1) (2) [W] 2] [m [kVA] LECSS2-T5 LE-T50.3 25 15 0.5 LE-T60.3 25 15 0.5 LECSS2-T7 LE-T70.5 25 15 0.5 LECSS2-T8 LE-T80.9 35 15 0.7 LECSS2-T9 LE-T91.3 50 15 1.0 1. . 2

Magnetically Coupled Rodless Cylinder

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

Programless Controller Series LECP1

Note 3) 10 to 15 in decimal number are displayed as follows in the 7-segment LED.

Applicable Auto Switch Model

17 17 17 17 17 17 13 13 13 14 14 15 Note) Average value at normal temperature including hysteresis.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

Thermo-chiller

Applicable model Min. operating flow rate [L/min] HRL-BP002 HRLE050-m-m CH1: 15/15 (50/60 Hz) CH2: 1/1 (50/60 Hz) HRL-BP001 HRLE090-m-m CH1: 25/35 (50/60 Hz) CH2: 1/1 (50/60 Hz) CH1 Circulating fluid return port Applicable hose I.D.: 19: HRL-BP001 Applicable hose I.D.: 15: HRL-BP002 u q r t i !0 CH2 Circulating fluid return port Applicable hose I.D.: 15 o u !

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Internal Pilot Manifold L Dimension n: Stations L n 2 110.5 100 86 12 3 123 112.5 96.5 13 4 135.5 125 107 14 5 148 137.5 117.5 15 6 160.5 150 128 16 7 173 162.5 138.5 17 8 173 162.5 149 12 9 185.5 175 159.5 13 10 198 187.5 170 14 11 210.5 200 180.5 15 12 223 212.5 191 16 13 235.5 225 201.5 17 14 235.5 225 212 12 15 248 237.5 222.5 13 16 260.5 250 233 14 17 273 262.5 243.5 15 18 285.5 275

•

.:) zpno 10 12 171 (6) (13) ZPn3 10 12 10 12 10 12 ,'6.5) (6) : (13) (6.5) (6) ' :13) 1 1 6.5) (6) (13) II . 13 (7) (7) (13) ZPn6 I ZPT20 IS 26 15 26 15 15 15 16 . ZPT25 (8.5) (8) (17) (16)I,S.5) (81 1 17l (16) (10) (10) (18) (17) (S.S) (8) (171 (16) ZPT~2 . 1(29) (27) (25) (30)1129) (27) (29),(27) (25) * On parentheses. 1 are figures fOf female thread connecllons.

5 Port Solenoid Valve Series VQZ1000/2000/3000

For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage.