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Rubber seal Metal seal Rubber seal Single VS4 2 position Double VQ7 Closed center EVS Exhaust center 3 position VFN Pressure center Note) Values for 2 position single from the cylinder port to the exhaust (from 2 to 3 and from 4 to 5) C (Sonic conductance) and b (Critical pressure ration) are subject to ISO 6358/JIS B 8390.

IDX-OM-W093-B / Series IDF60-20-A,C,L,R,T,V IDF60-30-A,C,L,R,T,V IDF70-20-A,C,L,R,T,V IDF70-30-A,C,L,R,T,V IDF80-20-A,C,L,R,T,V IDF80-30-A,C,L,R,T,V IDF90-20-A,C,L,R,T,V IDF90-30-A,C,L,R,T,V URLhttp://www.smcworld.com/ English instruction manual can be downloaded from our URLhttp://www.smcworld.com/ SMC *1) JIS B8370 *2) ISO4414 *1) ISO4414Pneumatic fluid power Recommendations for the application

Recommended Sonic Conductance and Solenoid Valves (Reference) C [dm3/(sbar)] ZH10--X185 1.48 or more ZH20--X185 3.12 or more ZH30--X185 5.92 or more ZH40--X185 11.08 or more Model VQZ200 VP300 VP500 VP700 Solenoid valve (Reference) Sonic conductance C [dm3/(sbar)]: 1.7 Sonic conductance C [dm3/(sbar)]: 4.2 Sonic conductance C [dm3/(sbar)]: 8.9 Sonic conductance C [dm3/(sbar)]: 15.3 791 C

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] HRS012--10 HRS018--10 1-phase 100V AC(50Hz) 100 200 15 15 or 30 HRS01--10-T 1-phase 3 cores x Sharing 100V to 115V 14AWG (High pump head AC(60Hz) [Optional]) (3 cores x 2.0mm2) HRS012--20 HRS018--20 HRS024--20 1-phase 10 30 (including ground) 200, 200-230V AC 230 HRS0--20-T (50/60Hz) 15 30 (High pump head

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 Load weight m0 (kg) MGF63 Load weight m0 (kg) Load

Note 1) The same bracket is used for VCB3 and VCB4 (port size 1/2). 17-2-26 7 Series VCB Direct Operated 2 Port Solenoid Valve For Heated Water Dimensions Grommet : G Conduit: C Q 300 F D 280 D Q F VC C G1/2 C R R VDW VQ E E B A H 2-P Port size VX2 2-P A B H 2-M Thread depth N VX Port size 2-M Thread depth N Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

CD-MU02 CD-MU03 CD-MU04 CD-MU05 (mm) 25 C shape for axis8 C shape for axis10 33(10) 32 32(5) 40 36(5) 50 38(0) 63 Size C shape for axis10 L(d) 49(0) C shape for axis14 If the cylinders must be operated with the mounting pitch less than indicated above, they must be shielded with steel plates or magnetic shield plates (Part No.: MU-S025). Contact SMC for details.

All data given in a technical specification sheet is based on 25[C]. The temperature range is dependent on the product series. Normally SMC products are rated from 0 to 50[C] or 0 to 60[C]. The repeatability is defined as the ability of an instrument to provide the same output every time for the same input. Usually given as a percentage of the full scale value.

Insulation type Electrical entry Electrical option Class B G C D, T S Note) S L, Z 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) AC DC Note) Surge voltage suppressor is attached in the middle of a lead wire. 17-3-72 3 The VX series will be revised shortly.

[F/C] +100 (+115) / +37.8 (+45) Nominal inlet air pressure [psig / bar] 34 / 7 Max. inlet air pressure [psig / bar] 232 / 16 Exit pressure drop p [psig / bar] 2.9 / 0.2 Inlet outlet connections NPT-F 1/2 3/4 1 Type of refrigerant HFA 134.a Refrigerant loading [oz / gr] 7.1 / 200 9.7 / 7.1 / 11.5 / 325 275 200 Nominal electric absorption [A / W] 2.2 / 170 2.7 / 210 3.3 / 250 4.3 / 330 5.9

The proof pressure is double the operating pressure range. -69No.LV50***-OMQ0002-G Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow[L/min] B Model Minimum Maximum A LFE1 0.5 20 Flow rate 0 Minimum rated flow Maximum rated flow LFE2 2.5 100 LFE3 5 200 Out of range -70No.LV50***-OMQ0002-G Dimensions Note) The electrical

The proof pressure is double the operating pressure range. -70No.LFE*-OMZ0011 Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow [L/min] Model B Minimum Maximum A LFE1 0.5 20 LFE2 2.5 100 Flow rate 0 Minimum Maximum rated flow LFE3 5 200 rated flow Out of range -71No.LFE*-OMZ0011 Dimensions Note) The electrical entry

Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 14-2-63 Series AL10 to 60 Dimensions AL10 AL20 L D Bracket (Option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50/60 AL30/40 L D D L Port size Bracket (Option) Bracket (Option) G F G F Port size M K M K E J C B R

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H

Rated Rated Sensitivity supply voltage x size voltage current of leak [V] [A] current [mA] 3 cores x 10 30 HRS030--20 1-phase 14AWG (3 cores x 2.0mm2) 200, 200-230V AC 230 HRS030--20-T (50/60Hz) 15 30 (including (High pump head [Optional]) ground) HRS Series 3.3 Installation 3-9 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.3.3 Preparation and wiring of power supply cable The electrical

0 20 40 60 80 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74/7D 6, 1/4" ZFC75/7E 8, 5/16" ZFC76/7F 10, 3/8" 0.3 MPa 0.3 MPa 0.3 MPa 30 30 30 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 0.1 MPa 0.1 MPa 0.1 MPa 20 20 20 0.5 MPa 0.5 MPa 0.5 MPa 0.7 MPa 0.7 MPa 10 10 10 0.7 MPa 0 0 50 100 150 250 200 0 0 0 100 200 300 400 500 0 200 400 600 Flow

Selects the time to hold the input signal. 15 ms 200 ms Memorizes the number of times the input device is ON. Generates error per channel when the operation count exceeds the set value. 3 Enable Generates an error.

Err42 Err8 No.1ON ON ON LEDNo.10 Err9 3 P3 2 P2 Err9 Err9 ON ON ON ()5mm Err5 5mm 1 1 Err10 Err11 CPU Err12 ON 8P8 48 11-2 () 200 200 6P6 *L=1mm *200.0 1 PRG STEP P6 200 200 300mm/sec 50% 35% 49 12. 121 No. P1 No.