(C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}3/8, 1/21.50

temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}

Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case of Inlet air pressure

Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case of Inlet air pressure

temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}

(C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/21.50(1.65

(C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/21.50(1.65

Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure

Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure

Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure

temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}

temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}

Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure

Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure

(C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/21.50(1.65

temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}

(C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/21.50(1.65

(C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/21.50(1.65

Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure

°C; rubber seal -5 to 50°C, 5 port solenoid valve, VQ, 4/5 PORT SOLENOID VALVE, 0.00000 lb