Special Applications: Clean Room Compliant, Size: 20, Backflow Function: None, Thread: NPT, Port Size: 1/4, Accessory: G+H, Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Special Applications: Clean Room Compliant, Size: 40, Backflow Function: Backflow Function, Thread: NPT, Port Size: 1/2, Accessory: G [Round Pressure Gauge ("20-" Type Includes Limit Indicator)], Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Special Applications: Clean Room Compliant, Size: 20, Backflow Function: Backflow Function, Thread: NPT, Port Size: 1/8, Accessory: B+G, Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Special Applications: Clean Room Compliant, Size: 20, Backflow Function: Backflow Function, Thread: NPT, Port Size: 1/4, Accessory: B+G, Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Special Applications: Clean Room Compliant, Size: 20, Backflow Function: None, Thread: NPT, Port Size: 1/4, Accessory: B+G, Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Special Applications: Clean Room Compliant, Size: 30, Backflow Function: Backflow Function, Thread: NPT, Port Size: 3/8, Accessory: None, Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Special Applications: Clean Room Compliant, Size: 30, Backflow Function: None, Thread: NPT, Port Size: 1/4, Accessory: None, Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Special Applications: Clean Room Compliant, Size: 20, Backflow Function: None, Thread: NPT, Port Size: 1/8, Accessory: Bracket, Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Special Applications: Clean Room Compliant, Size: 30, Backflow Function: None, Thread: NPT, Port Size: 3/8, Accessory: Bracket, Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Special Applications: Clean Room Compliant, Size: 20, Backflow Function: None, Thread: NPT, Port Size: 1/8, Accessory: G [Round Pressure Gauge ("20-" Type Includes Limit Indicator)], Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Compact Guide Cylinder JMGP Series ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 25, 50, 100, 150, 200 Intermediate strokes are available as a special order. Refer to pages 10 and 11 for cylinders with auto switches.

CH

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

Note 10) Weight in the dry state without circulating fluids 108

Return Filter FH100 Series

DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70 387 540 17.5 3 520

AMX-OM-Q018E

Standard dew point -20oC, -15oC : about 10 min.

VP300-OMP0001

0.6Nm U +-( ) 1V ( ) +DIN > > > S 10 No.VP300-OMP0001 1/3(DC24V 40ms ) <> 0.5V () > > > S L M VP Series VP Series VP Series VP Series/ / / / DC 24V 12V AC S,Z 1V 1V R,U 47V 32V N.C N.O 1 1 1 1 N.O. 180N.O. 2 2 2 2 180N.O.

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Copper-free Actuators

, 3) 20-CDQS Standard 2.2-2 20-CDQS Standard long stroke SCQSl 2.2-10 20-CDQSW Double rod 2.2-30 20-CDQSlS Anti-lateral load Air cylinder Series C(D)M2 20-CM2l Standard 1.4-3 20-CM2lA Standard with air cushion SCM2l 1.4-22 20-CM2W Double rod 1.4-50 20-CM2K Non-rotating rod 1.4-66 20-CM2R Direct mounting Air cylinder Series M(D)B 1.7-6 20-M(D)B Standard 20-M(D)BW Double rod SMB-l 1.7-16 20

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

Cost effective and clean looking, series AR regulators offer various pressure range settings to accommodate most applications. The locking adjustment knob prevents accidental setting changes. The modular design of the AR series connects with other SMC air preparation equipment.Modular type regulator, Optional embedded pressure gauge , Available with built-in backflow mechanism , Knob is