KB

D L A2 A1 M Part No.

CU

L A93L 5m .

CXT

Nil (Example) AC73C 3 m L (Example) A73CL 5 m Z (Example) A73CZ None N (Example) A73CN Since there are other applicable auto switches than listed, refer to page 8-27-12 for details.

Pneumatic Transfer System Series MF

Applicable cylinder D G F H L I C E J K M N Part No.

Rotary Table Series MSU

Free-mount Without Auto Switch Unit 20 90 S M SUA With Auto Switch Unit 20 90 S D SUA L R73 M Number of auto switches 1 pc. 2 pcs. S With auto switch unit Nil Nominal size (torque) For 1 piece, a right hand auto switch is installed.

High Vacuum L Type Valve

M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/

VP300-OMP0001

No. 1 1 1 1 1 M3 M3 M3 M3 1/4 0.4~0.5Nm 2 2 2 2 M5 M5 M5 M5 1/6~1/4 1~1.5Nm 1) 1) 1) 1) ISO VG32 (MSDS) 6 No.VP300-OMP0001 VP Series VP Series VP Series VP Series 3 3 3 3 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 30 () 1 ()ISO VG32 2 ()ISO VG32 IP65 (IEC60529) IP65 7 No.VP300-OMP0001 VP Series VP Series VP Series VP Series/ / / / L L L L /M /M /M /M 3.2~3.7mm () (+-) () (1mm

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

0 -0.1 H B 2-P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-T010B CJ-T016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3 6, 10 3.3 12.2 15.2 1.2 0.3 4.8 16 5 18.3 22.7 1.5 0.7 8.6 20,25 9 19.2 25 1.75 1.15 17

VQD1000

4 Port Solenoid Valve Direct Operated Poppet Type Series VQD1000 How to Order Valves 5 1 5 L 1 VQD1 Type of actuation Made to Order Fluid-contact part: Oil-free X16 (A) 4 (B) 2 Single type Port size 1 M5 Nil M5 M5 thread Without sub-plate (Manifold) M5 thread Body ported 1 (P) 3 (R) Base mounted (A) 4 (B) 2 Latching type Electrical entry 2 L: Plug lead type L plug connector, With lead wire

Model Selection 1

M N P Q S V Note 1) B Brass/Copper H B Note 1) Stainless steel/Silver High corrosive spec., Oil-free Note 1) Non-leak, Oil-free H Steam (Max. 183C) Brass/Copper Non-leak, Oil-free B Note 1) L, M, V options are for non-lube treatment.

Heavy Duty Stopper Cylinder Series RSH/RS1H

30 40 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 16

212

min] Flow rate gal/min [L/min] Flow rate gal/min [L/min] Input/Output Characteristics: Flow Rate (Representative Value) Inlet pressure: 44 psi (0.3 MPa) Fluid: Water LVR20 LVR40 LVR50 12 [45] 26 [100] 1.1 [4] 24 [90] 11 [40] 0.9 [3.5] Flow rate gal/min [L/min] Flow rate gal/min [L/min] Flow rate gal/min [L/min] 21 [80] 9.2 [35] 0.8 [3] 18 [70] 7.9 [30] 0.7 [2.5] 16 [60] 6.6 [25] 13 [50] 0.5

ML1

CE2 ML2B ML1C Mounting Position (Stroke End)/Reed Switch Mounting Position (Stroke End)/Solid State Switch D-E73A (L), D-E76A (L), D-E80A (L) D-M5B (L), D-M5N (L), D-M5P (L) D-M5BW (L), D-M5NW (L), D-M5PW (L) D-M5NTL, D-M5PTL REA REC RHC MTS CC Lead wire clamp/Lead wire cap (option) Series Lead wire clamp Lead wire cap ML1C LC-01 LP-01 Unit: mm Lead wire clamp/Lead wire cap (option) 25 32

VCA

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R

CRB1/Size: 10, 15, 20, 30

Q (Depth) 90 100 R P E(g6) A F(h9) B C D G1 G2 J K L M N Model RQ1 M3 (10) RQ2 3.4 (6) (Q3 M3 (5) CRB1BW15-lD CRB1BW15-lDE CRB1BW20-lD CRB1BW20-lDE CRB1BW30-lD CRB1BW30-lDE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 29 5 34 12 20 9 18 4 1.5 6 10 0.5 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 36 6 42 14 29 10 20 4.5 1.5 7 10 0.5 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014

EXxx-OMY0006CN

L/A LED Table 10-22 L/A LED L/A 1/2 SI 1/2XF1/2PROFINETEthernet SI 1/2XF1/2PROFINETEthernet SI 1/2XF1/2 SI 1/2XF1/2 * *: Link LED Act LED 10.9.1.5. FO1/2 LED Table 10-23 FO 1/2 LED FO 1/2 2dB 0dB 2dB 0dB 10.9.2. LED 2 LED UT1 UT2 UT1 UT2 IN0, IN1, , IN7 M IO (Zone M) / Z1,Z2,Z3 (Zone 1-3) / Fig. 10-4 EX245-FPS1/2/3 LED 2 10.9.2.1.

Compact Proportional Solenoid Valve Series PVQ

Series PVQ10 Dimensions L plug connector PVQ13-L--M5 & + ! ! ' "()* % "#$ % ! ! ' ()* ( + #$ ( + Interface "#$ % & ' "()* % & ' M plug connector PVQ13-M--M5 , . & + ! ! ' "()* % "#$ % ! !

Speed Controller: Standard Type Series AS In-line Type 1

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

Plug-in/Plug Lead: Single Unit

(A) 4 (B) 2 Electrical entry 6 1 (P) 5 (R1) 3 (R2) G Coil voltage Lead wire length 0.6 m 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Lead wire length 1.5 m Grommet Body 5: Plug lead sub-plate H Function Nil Y R Standard type (1 W) Low wattage type (0.5 W) External pilot Seal (1) 0 1 Metal seal Rubber seal (2) Note 1) Applicable to