Exhaust Cleaner for Clean Rooms AMP Series hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90
(Between lead wires and case) 50 M or more (at 500 VDC by megameter) 01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type Approx. 40 g (Including 0.6 mLong lead wire) Operating pressure range/Regulating pressure range Proof pressure Fluid Power supply voltage Current consumption Response time Repeatability 500 kPa ZSE ISE PSE Enclosure Operating temperature range Operating humidity
C: Erratum Correction. D: Fully revised following product review. E: Added a note of caution.
Maximum Load Weight (g) Weight (g) Cylinder stroke (mm) 5 Maximum load weight Model Model 10 15 20 25 30 MXU6 MXU10 MXU16 MXU6 MXU10 MXU16 100 66 72 81 88 97 103 200 115 124 138 147 166 174 400 216 215 251 250 285 300 8-3-3 4 Series MXU Allowable Moment Precautions Allowable moment (Nm) Correction value of moment center position distance (mm) Model Stroke Be sure to read before handling.
Maximum Load Weight (g) Weight (g) Cylinder stroke (mm) 5 Maximum load weight Model Model 10 15 20 25 30 MXU6 MXU10 MXU16 MXU6 MXU10 MXU16 100 66 72 81 88 97 103 200 115 124 138 147 166 174 400 216 215 251 250 285 300 8-3-3 4 Series MXU Allowable Moment Precautions Allowable moment (Nm) Correction value of moment center position distance (mm) Model Stroke Be sure to read before handling.
Tightening the threaded portion of an M3, M5 or M6 fittings 1) M3 First, tighten it by hand, then give it an additional 1/4 turn with a wrench. 2) M5 and M6 First, tighten it by hand, then give it an additional 1/6 turn with a wrench. Mounting Caution 1. Check tubing for damage before installing. Confirm model size, etc. 2.
Bracket (Option mark: B) H I 15 R S K L M E T: Long hole for mounting P O A F D Q 4 positions C Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80
[50], ISA3-H: [50] ISA3-F: [3], ISA3-G: [20], ISA3-H: [20] Display Thank you for purchasing an SMC ISA3-#L series Gap Checker.
Side Thread Type Nil Rc G NPT NPTF T F F 1 2 3 4 N.O. N.C. N.O. N.C. N.O. N.C. N.C. N.O. Manifold Type 1 0 Side Ported Top Ported Rated Voltage, Elec.
Please keep this manual handy for future reference. 4 x M5 : Tightening torque: 1.5 Nm Ethernet communication cable COM A COM B COM C COM D 685 Display Description The power supply for input and control is OFF LED is OFF Operating normally Green LED is ON MS To obtain the operation manual about this product and control unit, please refer to the SMC website (URL http://www.smcworld.com) or
Please keep this manual handy for future reference. 4 x M5 : Tightening torque: 1.5 Nm COM A COM B COM C COM D PROFINET communication cable 685 Display Description Operating normally LED is OFF SF Abnormality detected Red LED is ON To obtain the operation manual about this product and control unit, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly.
Bore d C B H NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 * Refer to p.1.3-12 for details of the mounting nut. (mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.
Size: A (Body Ported), Operation: 3 (Manual Handle Style), Sealant: B (Fluoro Rubber), Port Size: M5, Thread: Rc(PT), Option: G (Pressure Gauge)
Size: B (Base Mounted), Operation: 3 (Manual Handle Style), Sealant: Nitrile Rubber, Port Size: M5, Thread: Rc(PT), Option: G (Pressure Gauge)
Size: B (Base Mounted), Operation: 3 (Manual Handle Style), Sealant: B (Fluoro Rubber), Port Size: M5, Thread: Rc(PT), Option: G (Pressure Gauge)
Diameter: [M5] M5, Pressure Gauge: [With Pressure Gauge] With Pressure Gauge, Size of Body: B, Accessory: Pressure gauge, Piping Specification: Base mounted, Operation Mode: Manual handle type, Seal Material: FKM
Size: Body Ported, Operation: Manual Handle Style, Sealant: Fluoro Rubber, Port Size: M5, Thread: Rc(PT), Option: Pressure Gauge
Size: Base Mounted, Operation: Manual Handle Style, Sealant: Nitrile Rubber, Port Size: M5, Thread: Rc(PT), Option: Pressure Gauge
Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.
M5 After tightening by hand, tighten additional 1/6 to 1/4 rotation with a tightening tool Tapered thread for Rc port (MGP) and NPT port (MGPTN) Use the correct tightening torques listed below. Before tightening the plug, wrap pipe tape around it.