Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

silencer) ZX Model ZR Maximum suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Connection (One-touch/Screw-in) Max. vacuum pressure Model Nozzle diameter (mm) (kPa) Body type Weight (g) ZM ZH05B 0.5 Type S Type L Type S Type L Type S/Type L 5 8 13 12 20 23 6/Rc 6/Rc 24 34 46 40 70 78 8/Rc 10/Rc 5 8 13 12 20 23 24 34 46 40 70 78 55 75 95 65 110 150 85 135 185 SUP VAC EXH 28 28 33

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1B 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1H 150 50 50 130 60 16 The above values are the maximum allowable

Thermo-chiller

35C) Automatic uid ll port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Brass, Bronze, PTFE, PU, EPDM, PVC, NBR, PE, NR, PBT, PP , POM, Carbon, Ceramic Temperature range 41 to 104F (5 to 40C) Pressure range 44 to 73 psi (0.3 to 0.5 MPa) Required ow 50/60 Hz 8.7/9.0 gal/min (33

NCA1

Bore size (in) 1.50 2, 2.50 3.25, 4 Standard stroke 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 How to Order Mounting Bore Stroke NC D A1 XC35 Ex: NCDA1B 150-0400-XC35 With coil scraper Auto switch capable 6-15-33 33 Series NCA1 Accessory Bracket Dimensions Eye Bracket Part no.

SYA3000/5000/7000

/ exhaust center / pressure center SYA7 403 4 5 02 03 3/8, 1/4 (A, B port) 21 22.5 11.5 13.5 71.1 18.6 57 4 2 x M5 x 0.8 (Pilot port) 61 42 B A PE 38 46 B A Manual override P EB EA 2 x 4.3 (For mounting) 21 69 28.6 109.7 SYA SYJA VZA VFA VFRA 26.5 2 x 1.8 (Ventilation hole) VA 13.5 3/8, 1/4 (P , EA, EB port) 20.5 20.5 33 1743

5 Port Air Operated Valve SYA3000/5000/7000 Series

/ exhaust center / pressure center SYA7 403 4 5 02 03 3/8, 1/4 (A, B port) 21 22.5 11.5 13.5 SYA SYA SYJA VZA VFA VFRA VPA4 SYJA VZA 71.1 18.6 57 42 61 2 x M5 x 0.8 (Pilot port) 4 VTA B A VGA PE 38 46 B A VPA Manual override P EB EA VPA3 2 x 4.3 (For mounting) 21 69 28.6 109.7 2 x 1.8 (Ventilation hole) 26.5 13.5 3/8, 1/4 (P , EA, EB port) 20.5 20.5 33 1473

3 Port Solenoid Valve Series VQ100

Blanking plate with 2 screws and gasket L dimension 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. 40 510.5 L dimension 4-12-16

TL/TIL

Type Length Fluorine ion Al Fe Ni Na Ca Type Type 50 Ft. (16 m) Roll 100 Ft. (33 m) Eluting amount 0.1 or less Eluting amount 4.5 0.3 0.2 7.1 1.3 Please refer to the Series and Specifications above, as the tubing length differs dependant on each size.

Slide Unit Series CX2/CXWM/CXWL

D-X Individual -X 475 Series CXWM Construction: 10, 16, 25 CXWM10 With end lock CXWM16, 25 16/With end lock 25/With end lock Slide Unit: Built-in Shock Absorber Slide Bearing Type Series CXWM Construction: 10, 16, 25 Component Parts: With End Lock No. 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 Component Parts No. 1 2 3 4 5 6 7 Note Description Description Material Material Aluminum alloy

3 Port Solenoid Valve Series VQ100 1

Blanking plate with 2 screws and gasket L dimension 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. 40 510.5 L dimension 4-12-16

Material: Super PFA High Purity Fluoropolymer Tubing TL/TIL Series

m (100 ft) Type Symbol 16 33 Type Fluorine ion Type Al Fe Ni Na Ca Roll 0.1 or less 4.5 0.3 0.2 7.1 1.3 Eluting amount Eluting amount A 15 g piece of fluororesin tubing is cut off, washed in DI water (puer water) and immersed in 15 mL of 25% methyl alcohol extract at room temperature for 24 hours.

VX

$% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

VX

$% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

Electric Actuator

For open collector method, it is 2 m or less. 33 AC Servo Motor Driver Series LECS; Control Signal Wiring Example: LECSC Model Selection LEJS LEJB LECSC Note 2) CN6 + 24 VDC Power supply 14 RD RA1 Ready CN6 DICOM 5 15 ALM RA2 Failure Note 3) DOCOM 17 Home position return completion 16 ZP RA3 EMG 1 Forced stop DOG 2 Proximity dog 10 m or less LSP 3 Forward rotation stroke end LSN 4 Reverse

Step Motor Controller (Servo / 24 VDC)

1 0 0 0 0 1 33 1 0 0 0 0 1 34 1 0 0 0 1 0 34 1 0 0 0 1 0 35 1 0 0 0 1 1 35 1 0 0 0 1 1 36 1 0 0 1 0 0 36 1 0 0 1 0 0 37 1 0 0 1 0 1 37 1 0 0 1 0 1 38 1 0 0 1 1 0 38 1 0 0 1 1 0 39 1 0 0 1 1 1 39 1 0 0 1 1 1 40 1 0 1 0 0 0 40 1 0 1 0 0 0 41 1 0 1 0 0 1 41 1 0 1 0 0 1 42 1 0 1 0 1 0 42 1 0 1 0 1 0 43 1 0 1 0 1 1 43 1 0 1 0 1 1 44 1 0 1 1 0 0 44 1 0 1 1 0 0 45 1 0 1 1 0 1 45 1 0 1 1 0 1 46

KS/KX

38 39 29 32 33 34 1 8 18 15.2 27 18.5 6 1 4 3 8 1 4 3 8 1 2 3 8 1 2 17 21.6 14.9 8 Applicable tubing 42 10 18.5 32 23.5 21 22 30.5 25.0 7 43 44 45 Connection thread 42 40 43 24 20.9 26 35 22 8 35.1 35.1 12 Reference dimensions after R thread installation.

Air Cylinder Series CA2

Stopper ring Carbon steel Zinc chromated 28 5 Piston rod Carbon steel Hard chromium electroplated Cushion valve seal NBR 29 6 Bushing Lead-bronze casted Rod end nut Rolled steel Nickel plated 30 7 Cushion ring A Rolled steel Electroless nickel plated Rod seal NBR 31 8 Tie-rod Carbon steel Zinc chromated Piston seal NBR 32 9 Tie-rod nut Rolled steel Nickel plated Cylinder tube gasket NBR 33

3 Position Cylinder Series RZQ

(mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 32 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc 1/8 24.5 14 10 5.5 7 4.5 49.5 14 40 110 92 28 14 M10 x 1.5 26 57 16 52 35 9 69 5 24 18 40 5.5 M6 x 1.0 9 Rc 1/8 14 10 5.5 7 4.5 14 50 118.5 96.5 M8 x 1.25 35 14 M10 x 1.5 30 71 16 64 37 12 86 7 30 22 50 6.6 11 Rc 1/4 17 14 3 8 5.5 19

Soft Start-up Valve

) 2(A) 1(P) 37.5 Bracket (Option) T M N P X Built-in silencer (Option) 3(R) Q S L K R AV5000-A Flow adjustment needle at low speed air supply D D [mm] 4 x W 2 x W Body size Coil type B Y 20 AC 85 V Y DC 83 30 AC 85 DC 83 U H 40 AC 95 DC 93 50 AC 98 H DC 96 U Dimensions [mm] Standard specifications Port size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33