Cylinder with Lock Series MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 No. No.

CG1

1 !2 !3 !4 !5 !6 !7 !8 !

MU

1, !2, and !3 MUB40-PS Hard anodized Aluminum alloy Cylinder tube e MUB50-PS Chromated Aluminum alloy Piston r MUB63-PS Hard chrome plated Carbon steel Piston rod t Seal kit includes !1 to !3. Order the seal kit, based on each bore size.

MU

1, !2, and !3 MUB40-PS Hard anodized Aluminum alloy Cylinder tube e MUB50-PS Chromated Aluminum alloy Piston r MUB63-PS Hard chrome plated Carbon steel Piston rod t Seal kit includes !1 to !3. Order the seal kit, based on each bore size.

ALF400 to 900, ALT-5/-9

Auto Feed Lube Port size Description Applicable model Symbol Nil 02 03 04 06 10 12 14 20 4 1 With bracket ALF400 to 600 B 8 3 Body size 2 1 F.R.L. 40 50 60 80 90 2 1 4 3 4 3 1 AV 1 1 1 4 1 2 1 1 2 2 1 Line pressure (MPa) AU 2 Thread type AF Nil N F Rc NPT G AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

ALF400 to 900, ALT-5/-9

Auto Feed Lube Port size Description Applicable model Symbol Nil 02 03 04 06 10 12 14 20 4 1 With bracket ALF400 to 600 B 8 3 Body size 2 1 F.R.L. 40 50 60 80 90 2 1 4 3 4 3 1 AV 1 1 1 4 1 2 1 1 2 2 1 Line pressure (MPa) AU 2 Thread type AF Nil N F Rc NPT G AR Note 1) Tank pressure is removed when line pressure is stopped.

VFR4000-OMH0003

Especially when using a 3-position exhaust center valve or a single acting cylinder take appropriate measures to prevent malfunction by using it with an individual EXH spacer assembly(VVFS4000-R-04-1,2). 1. Precautions for 2-position double solenoid valves 5.

VFRA3000, 4000 Series

For 3-position exhaust center valve or single acting cylinder, take appropriate measures to prevent malfunction by using it with an individual EXH spacer assembly (VVFS3000-R-03-1,2 / VVFS4000-R-04-1,2). 5.

Precision Cylinder Series MTS

8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty. Note Material Qty.

VFR5000 Series

Warning Caution 1) Current leakage When using a snubber circuit (C-R element) for surge protection of the output, a very small amount of electrical current will continue to flow even during the OFF state. This results in the valve not returning.

Pressure Switch/Reed Switch Type

IS10E-4004 IS10E-4006 + 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/4 AC20m AR20m, AW20m AWM20, AWD20 Nil Set pressure 0.1 to 0.4 MPa 0.1 to 0.6 MPa V V V V V V 30 66 52 28 16 a 6 Note 2) range + AC25m, AC30m AR25m, AR30m, AW30m AWM30, AWD30 Nil 0.5 m V V V V V V V V V Semi-standard Lead wire 32 73 56 30 13 L Z b 3 m 5 m length r V + Note 2) AC40m AR40m, AW40m AWM40, AWD40 Nil Scale plate MPa

VFR5000-OMN0001

industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 VFR5000-OMN0001 / / / / 1 1 3) 3) 1 1 () 3 VFR5000-OMN0001 VFR5000 Series 5 / 1 DC 3 () 0.1 2 C-R () C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04-1,2) ( ) () 3 4 No.VFR5000-OMN0001 VFR5000 Series 5 / (SSR )AC 1) (C-R ) OFF 2)() 1 -10 1 1) M5 1/6~1/4 1

VFR3000-OMY0001

-2No.VFR3000-OMY0001 / 1 1.5 *3) *3)1 1 () No.VFR3000-OMY0001 -3- VFRA30004000 5 / () () () () -10 3 3 EXH (VVFS3000-R-03-1,2 VVFS4000-R-04-1,2) () () 3 , 4 VFR3000-OMY0001 VFRA3000,4000 5 1) 2) 1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 1 1) M5 1/61/4 11.5Nm ) 2) Rc Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 5 VFR3000-OMY0001 VFRA3000,4000 5 () () 5 3 30 ( ) 1 ()ISO

Regulator AR30 to 60

R Z Standard specifications AR40 AR40-06 AR50 AR60 1 AR30 Model Port size Fluid Proof pressure Maximum operating pressure Regulating pressure range Gauge port size Relief pressure Ambient and fluid temperature Construction Weight (kg) 1 2 1 4 3 8 , 1 4 3 8 , , 4 3 3 4 1 , Air 1.5MPa 1.0MPa 0.05 to 0.85MPa 1 4 1 4 1 8 1 4 1 4 Note 1) Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

Filter Regulator AW30, 40

04 06 1 4 3 8 Note 2) 1 2 3 4 Note 1) Bracket assembly is not mounted at the time of shipment, but rather packaged together with the filter regulator for shipment.

HRX-OM-X010

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Circulating fluid disposal. 1-16 1.7.3 System disposal . 1

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

BM Bellows type with groove UM Flat type with groove KJH C2 06 Pad diameter Applicable tubing O.D. 63 63 80 80 04 4 06 6 03 5/32" 07 1/4" When changing the pad diameter, replace also the plate together. !

Air-hydro Unit

VNA VNA 2 1 2 1 2 1 VNA VNA D-X Technical Data 1177