SMC Corporation of America
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Insulation resistance Ambient temperature Operation: -10 C to 50 C Storage: -20 C to 60 C Ambient humidity 35% to 85% RH (non-condensing) Atmospheric pressure Operation:80 kPa to 108 kPa (under 2000m) Storage: 66 kPa to 108 kPa (under 3500m) 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration) 49 m/s2 2 hours for each direction X, Y and Z EN 60068-2-6 Vibration

(4) 2.9 14.5 psi (0.1 MPa) (20) 0.07 (2) 0 0 0 0.07 (2) 0.14 (4) 0.21 (6) 0.28 (8) 0 4 2 8 6 10 Suction flow SCFM (L/min (ANR)) Needle opening [rotations] The actual suction flow at the point of suction varies depending on the vacuum pumps piping conditions.

Refer to SSCNET III optical cable on page 15 for cable models. 1 2 LECSS (Axis n) Note 6) CN1A SW1 CN1B SW2 Note 7) Cap Note 8) 1 2 Cable Cable length Cable model LE-CSS-m SSCNET III optical cable 0.15 m to 3 m Note 6) Connections from Axis 2 onward are omitted. Note 7) Up to 16 axes can be set.

For connector cable of M8 connector, refer to page 1-5-78. 1-5-6 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 SV SZ u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) SY y 3 position closed center/exhaust center/pressure center SYJ 3 position closed

occurs .6-1 6.2 Communication alarm reset.6-2 6.3 Setting and checking.6-2 6.3.1 Setting and checking items.6-2 6.3.2 Setting and checking.6-3 HRSH Series HRX-OM-R028 Chapter 1 Read before using Chapter 1 Read before using The communication of this device consists of contact input/output communication and serial communication.

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

Features 2 Model Selection 1 Obtain the correction factor for the temperature from data A or B and the correction factor for the air pressure from data C. Temperature Data A or B = Series IDU: Data A IDF1D to 240D: Data B-1 IDF 370B: Data B-2 Air pressure Data C = Series IDU and Series IDF: Data C 2 Calculate corrected air flow by using A or B and C.

11.8 18.2 2.8 depth 8.4 PF2M711/721W-C8(-L) 88 12 20 2.8 depth 6.2 PF2M711/721W-N7(-L) 88 10.3 20 2.8 depth 6.2 -104No.PF-OMW0007-E PF2M7#S-#1/2(-L) (mm) Model A B P Q PF2M705/710/725/750S-01(-L) 94 14 2.8 depth 8.4 2.5 depth 6 PF2M705/710/725/750S-N1(-L) 96 14 2.8 depth 8.4 2.5 depth 6 PF2M705/710/725/750S-F1(-L) 98 14 2.8 depth 8.4 2.5 depth 6 PF2M711/721S-02(-L) 98 17 2.8 depth 6.2 2.5

5 e r t q w @9 @4 @2 CXTM Guide rod/bearing @8 @5 CXTL Guide rod/bearing @1 @6 !9 @7 !2 y !3 u o !8 !0 !7 !6 Description Material Note Component Parts No. Component Parts No.

-2No.PS-OMU0005CN-C / *3) 1 1.5 3) 1 1 -3No.PS-OMU0005CN-C () () () () -4No.PS-OMU0005CN-C () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (1 20 ) -5No.PS-OMU0005CN-C * FG (35 N () ,() *() 6 33 () () 30m DC(-)() () * -6No.PS-OMU0005CN-C ( ) () CE -5~50(5 ) * , 1015 10 1% 2365 LCD * -7No.PS-OMU0005CN-C 3 ISE20B -0.100~1.000MPa ZSE20B 0.0~-101.0kPa Y ZSE20BF -100.0~100.0kPa

SV OU T 1 [Tips] OU T 2 AL 2 C OM R D Y DI AL 1 Status when control is stopped Lights up when control is stopped. When control is stopped, the RDY LED lights up.

Description Part number Remarks Bracket A ZS-38-A1 Mounting screw (M3x5L, 2 pcs) Bracket B ZS-38-A2 Mounting screw (M3x5L, 2 pcs) Bracket C ZS-38-A3 Mounting screw (M3x5L, 2 pcs) Panel mount adapter ZS-27-C Mounting screw (M3x8L, 2 pcs) Panel mount adapter + Front protective cover ZS-27-D Mounting screw (M3x8L, 2 pcs) Front protective cover ZS-27-01 Lead wire with connector ZS-38-3L 3 cores

. 6-1 6.1 Troubleshooting . 6-1 6.2 Reset the Thermal relay and High Pressure Switch . 6-3 Chapter 7 Documents. 7-1 7.1 Specifications. 7-1 7.2 Refrigerant and GWP . 7-2 7.3 Dimensions. 7-3 7.4 Electrical circuit diagram . 7-4 7.5 Air and refrigerant circuits and functions . 7-6 Chapter 8 Option C . 8-1 8.1 Specifications. 8-1 8.2 Precautions for installation and handling . 8-1 Chapter 9

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

MRHQ MA D625 Series MHC2-6/MHCA2-6 Dimensions MHCA2-6 (Short body type) 2 x M2 x 0.4 thread depth 4 (Mounting thread) 4 x M2 x 0.4 through Thread for attachment mounting 5 10 Attachment mounting limiting range 16 11 2 x M3 x 0.5 through Prepared hole dia. 2.6 through 5 2.5 2 x M2 x 0.4 depth 6 (Mounting thread) 4 2 2 When closed 10 When open 30 13.6 14 20 12 0.05 10 4 6 +0.022 0 7H8 depth

: 4-digit, 7-segment, 2-colour; red/green, Display method Sub screen: 6-digit, 11-segment, White) Display updating frequency 5 times/sec.

Maximum load mass (kg) Without adjuster Optional adjuster Model Shock absorber Internal rubber cushion Rubber stopper With bumper Metal stopper RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 Use 2 position 4/5 port solenoid valve. Use Recommended Air Pressure Circuit.

Speed loop I constant A 110 50 50 10 to 200 B 90 60 60 C 100 60 60 Positioning time level 2 2 2 Sets the time to generate the positioning time error alarm. (Unit: s) 0.1 to 25.5 70 - *1 After changing the rotation direction reference and turning on the power again, return to origin is executed with the first movement command.