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B F Accumulated pulse output Brown 1 Load ON OFF OUT1 Main circuit Main circuit 4 Black Analog output White A 50msec 2 + 24VDC Load DOWN MODE SET U P 3 Blue 2-G C 60 PF2A7H-(-M) 28 29 (41.5) 3 4 Accumulated pulse output Brown 1 ON OFF OUT1 4 Black Analog output Load 2 1 50msec 2 + White Connector pin numbers Load 24VDC 3 Blue Pin no.

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

retainer 2 3 Stopper block 2 2 Stopper ring 1 1 Rotary actuator 1 Product No.

1 . i-2 i-2-2 . i-3 i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5

4 1.3 15 26 12 4 Accessory option: Hexagon socket head screw (special screws) 3 2-2H9 +0.025 0 depth 2 3 8 5 8 5 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 58 11 Low Profile Air Gripper Series MHF2 Dimensions MHF2-12D Scale: 65% 3H9 +0.025 0 depth 3 26 3H9 +0.030 0 depth 3 2-M4 x 0.7 thread depth 10 Mounting thread 4 42 4 40 52 2-M4 x 0.7 thread depth 5

. 1-1 1.2 . 1-2 1.2.1 C . 1-2 1.2.2 G . 1-2 1.2.3 K . 1-2 1.2.4 P . 1-2 1.2.5 R . 1-2 1.2.6 V . 1-2 1.2.7 . 1-2 1.3. . 1-3 2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-5 2.2.5 . 2-5 2.2.6 . 2-6 2.2.7 . 2-7 2.3 . 2-9 1 3 / 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-2 3.5 . 3-2 3.6 . 3-3 3.7 . 3-4 4 4.1 . 4-1 4.2 . 4-1 4.2.1 () . 4-1 4.2.2 . 4-

5 6 3 11.2 Nm 2 -15No.PS-OMF0005CN-E NPN PNP DC(+) DC(+) OUT OUT DC(-) DC(-) 2 DC AC DIN DC AC DIN DC VCA -16No.PS-OMF0005CN-E 2NG 1 1 1 DC(+) 2 2 NC 3 DC(-) 3 3 4 4 OUT 1 2 35Nm (21) -17No.PS-OMF0005CN-E LED 1 2 3 1 2 4LED 5 2 1 2 () 3 5 -18No.PS-OMF0005CN-E () 90 90 () () 1 OPEN OPEN (15), 2 2 0.2MPa 0.16MPa 3 OPEN (A ) A (OPEN ) -19No.PS-OMF0005CN-E

2 (R A) 2 1 (A P) Flow characteristics Weight (g) Operating pressure range (MPa) 1 2 (P A) 2 3 (A R) Port size Valve model C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.44 0.40 0.40 0.44 0.40 0.41 0.63 0.63 0.41 0.63 0.13 0.10 0.10 0.13 0.10 0.20 0.14 0.14 0.20 0.14 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.47 0.38 0.38

2 1/2 4 Fluororesin (TLM, TILM Series) (TH, TIH Series) 1/8 2 R 1/4 3/8 3 NPT 1/2 4 2 1/8 2 2 2 1/4 Gasket seal Uni Brass/Steel wire 1/4 3 3/8 2 1/2 4 1 Without sealant type can be selected as a standard option. 2 Universal type is not available.

Sensor connector port 4 3 2 1 Power supply/Output connector 2. Connecting power supply/output connection cable To connect the power supply/output connection cable to the controller, insert the cable connector with the C part facing down until it clicks. C 2 m 16-3-20 20 Series PSE Specific Product Precautions 3 Be sure to read before handling. Wiring Caution 3.

2 !2 O-ring Gasket NBR NBR, Stainless steel !3 !3 O-ring Retaining ring for hole type C NBR Tool steel !4 !4 Spacer Note) 10, 12, 3/8", 1/2" are made of POM, stainless steel, and brass (Electroless nickel plated). POM (2) !5 Gasket NBR, Stainless steel !6 Retaining ring for hole type C Tool steel !

screws) 3 3 2-2H9 +0.025 0 depth 2 8 5 8 5 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 58 12-3-14 15 Series MHF2 Low Profile Air Gripper Dimensions MHF2-12D 3H9 +0.025 0 depth 3 26 3H9 +0.030 0 depth 3 MHZ MHF MHL 2-M4 x 0.7 thread depth 10 MHR Mounting thread 4 42 4 MHK MHS 40 52 MHC 2-M4 x 0.7 thread depth 5 20 38 Mounting thread MHT E MHY 7.7 14.8 15 19

Note) F9NWV F9NW 3-wire (NPN) Diagnostic indication (2-color display) F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire Lead wire length symbols: 0.5 mNil 3 m L 5 m Z (Example) M9N (Example) M9NL (Example) F9NWZ Note) Be careful for the differential of 2-color display type.

Accuracy [%F.S.] 50% 50% 50% 40% 40% 40% With 1 1/4" connected With 1 1/2" connected 30% 30% 30% With 3/4" connected Elbow piping (2") Elbow piping (1 1/2") 20% 20% 20% Elbow piping (1") 10% 10% 10% 3% 3% 3% 8 7 6 5 4 3 2 1 0 0% 0% 0% 8 7 6 5 4 3 2 1 0 8 7 6 5 4 3 2 1 0 Straight section [d] Straight section [d] Straight section [d] Straight When piping with diameter smaller than the straight

CAT.ES100-41 A Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 1 A single controller monitors 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 Space saving 1 40mm MPa kPa OUT1 76% OUT2 CH 1 2 3 4 PRESSURE

3 !4 #0 !1 o !2 t r @2 @1 #3 #4 @9 #1 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 No.