VZ3000

Refer to page 3-13-4.) 20 or less 35 or less 10 3 2 position single Operating pressure range (MPa) 2 position double 3 position Ambient and fluid temperature (C) Response time (ms) (1) (at the pressure of 0.5 MPa) 2 position single, double 3 position 2 position single, double 3 position Max. operating frequency (Hz) Effective area Refer to the table below.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

Plate Cylinder

Load voltage Wiring (Output) Pre-wired connector Applicable load Auto switch model Lead wire length (m) Indicator light Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 3 (L) 5 (Z) 1 (M) DC AC M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9N M9P M9B M9NW M9PW M9BW M9NA 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 2-wire

3 Port Air Operated Valve Series SYJA300

N.O. 0.4 0.3 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Effective area (mm2) Pilot port size Type of actuation Port size SYJA312-M3 SYJA322-M3 SYJA314-M5 0.41 0.18 0.086 0.35 0.33 0.086 Body ported N.C. N.O. N.C.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

2 !3 !4 !5 !6 !7 !8 !

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

2 !3 !4 !5 !6 !7 !8 !

Air Slide Table Series MXS

2 !3 !

Air Cylinder CLA Series Fine Lock Model

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA3 MSUA3-S, SE Scale: 70% 8-M4 x 0.7 depth 7 C 58 B 36 44 27 30 4-M4 x 0.7 depth 5.5 22.5 5 +0.025 0 41h9 0 0.062 3H9 A +0.052 0 21H9 Long groove depth 5 (positioning pin hole) 22.5 29 2.5 3 +0.025 0 3-3H9 depth 3 ( A , B , C ) 2-4.5 through 3-R1.5 15.5 45 9 42h9 0 0.062 2 36 3 8 11 8 1.5 5 5 18.3 29 11 Angle adjustment bolt 2-4.5 through 3-R1.5 6 2-M5 x 0.8

Escapements Series MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

IP8101 Series

2 1/4NPT M201.5*2 3 1/4NPT 1/2NPT Construction 4 G1/4 G1/2 0 Standard type 2 Output function {analog (4-20mADC) output+ alarm output2} 5 G1/4 M201.5*2 6 G1/4 1/2NPT 3 HART communication function Accessory*1 1 If two or more accessories are required, the part Nil No accessory numbers should be made according to alphabetical order.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

8 @4 #3 #0 #4 $0 #9 @5 #2 w @6 @3 u e !6 !5 !1 !2 !0 #7 @1 #5 @2 @8 @7 #6 @0 #8 !3 !

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

2 !3 !4 !5 !6 !7 !8 !

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators C 5 C Max. 4 20 4 Without stroke adjuster 2 x M4 x 0.7 depth 6 G Max. 3 M 7.5 Stroke: S C 2 x M3 x 0.5 depth 4 11-/22-MXP12-15 A Width across flats 2 H 14 Width across flats 7 Piping port 4 x M4 x 0.7 depth 4.5 17.8 M4 x 0.7 8.5 2 x M5 x 0.8 8 4 (Plug: MGP12-08-CA001-R) 4.2 25 24 8.5 A 0 +0.030 depth 3 3 3 0 +0.030 depth 3 1.5 19 220.05 4 x

Digital Flow Switch (Integrated display type)

/OUT2 White Not connected/Switch output 2 (SIO) 3 DC(-) Blue 0 V 4 OUT1 Black Switch output 1 Used as IO-Link device No. Name Lead wire colour Function 1 L+ Brown 18 to 30 VDC 2 N.C.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

11-/22-MXP6-10 Max. 10.5 F 4-M3 x 0.5 depth 3 12 2-M2 x 0.4 depth 3 (mm) E F H J M Q QL S W Y Z AA Model 23 25 38 33.5 37 28 8 5 42 22 45 2 11-/22-MXP6-51 30 35 42 48.5 47 37 11 10 53 27.5 60 9.5 11-/22-MXP6-10 101 Air slide table MXP/MXPJ6 11221122Dimensions: MXP10 2-M3 x 0.5 depth 5 Z 3 Metal stopper V K C 4 5 C Max. 5.5 20 G Without stroke adjuster N M Max. 3.5 C Stroke: S 2-M3 x 0.5

Fluoropolymer Tubing Variations

4.75 1/8" 3.15 TILM07 1/4" x 5/32" 1/4" 6.35 5/32" 3.95 TILM11 3/8" x 1/4" 3/8" 9.53 1/4" 6.33 TILM13 1/2" x 3/8" 1/2" 12.7 3/8" 9.5 TILM19 3/4" x 5/8" 3/4" 19.05 5/8" 15.85 TILM25 1" x 7/8" 1" 25.4 7/8" 22.2 TILM32 11/4" x 11/10" 11/4" 31.75 11/10" 27.95 KQB2 O.D. 3.18 1/16" 1.58 0.086" 2.18 KS KX I.D.

IDX-OM-W026

-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5-1 . 5-1 5-2 . 5-3 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 1 6-5 . 6-4 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 11 M 11-1 . 11-1 11-2 .

Flow Control Equipment

How to Order 2 1 01 06 2 AS 1 F E S K Hexagonal lock nut Body size 2 3 4 1/8, 1/4 3/8 1/2 Sealant Applicable tube O.D.

High Vacuum L Type Valve

ULTIC ARMOR R is a registered trademark of Nippon Valqia Industries, Ltd. 6 XL*-OMJ0005-C 3. Specifications 3-1. Valve specifications 3-2.