JA/JAH/JB/JS

-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

AZ1000

psig (2.1 MPa) Vacuum to 3500 psig (24.1 MPa) 1) Source pressure 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160C (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra 10 in. (0.25 m) Option: 25 in. (0.62 m) Face seal, Tube weld 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel

CXWM/CXWL

10 15 15 20 MS4-10 MS5-10 MS6-15 MS6-15 MS8-20 Left Right Left Right Operating direction of the housing Operating direction of the housing Manufactured by Misumi Trading Ltd.

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

Series AP3500

thread (2 each) Sides (2 each) Bottom mount 0.06 in3 (1.07 cm3) Leak rate Across the seat leak Surface finish Connections Actuation pressure Actuation port connection Actuation port location Installation Internal volume Adjustable range of metered flow 2) 10 to 200 slpm 10 to 350 slpm 6 slpm 10 slpm 15 slpm 20 slpm 10 to 20 slpm 21 to 50 slpm 51 to 100 slpm 101 to 200 slpm 201 to 350 slpm

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(Different surfaces) 15 15 15 1 pc. 15 15 10 2 pcs. (Same surface) 25 25 25 D-A9V 2 pcs. (Different surfaces) 10 10 10 1 pc. 5 5 5 2 pcs. (Same surface) 30 30 30 D-M9V 2 pcs. (Different surfaces) 10 10 10 1 pc. 5 5 5 2 pcs. (Same surface) 55 55 55 D-M9 D-M9W 2 pcs. (Different surfaces) 15 15 15 1 pc. 15 15 10 2 pcs. (Same surface) 30 30 30 D-M9WV 2 pcs.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

OMR0032

Range Resolution LAT3-10 0 to 10 Refer to the 0.03 LAT3-20 0 to 20 Area Range table on the LAT3-30 0 to 30 right. LAT3M-50 0 to 50 LAT3F-10 0 to 10 LAT3F-20 0 to 20 0.005 LAT3F-30 0 to 30 LAT3F-50 0 to 50 This determines the condition for when the INF signal is activated. The INF signal turns ON when the pushing force generated by the Card Motor exceeds the 0.5 to 5.0 set value.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

3Ybore size 63 63 all types 4 x 28AW 30 10 14 6 M18 x 1.5 80 32 23 43 16 35 65 30 18.3 80 80 all types 100, 125 all types 4 x 36AW 35 10 14 7 M22 x 1.5 95 36 28 50 16 39 78 35 22.3 N M L E F 100 5 x 40AW 42 10 15 8 M27 x 2 110 40 33 59 20 46 90 43 27.5 160 160 all types 5 x 50AW 50 10 15 10 M33 x 2 120 44 37 66 22 50 100 45 34 C D Spring pin hole Drilled after assembly P A 100 Series CHA

51

Switch bracket Auto switch b Switch holder d Auto switch mounting screw c Auto switch mounting band D-X Technical Data 375 CG3 Series Operating Range (mm) Auto switch model Bore size 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-M9A(V) 4.5 5.0 4.5 5.5 5.0 5.5 D-A9 7 6 8 8 8 9 D-C7/C80 D-C73C/C80C D-B5/B64 D-B59W D-H7/H7W D-H7NF/H7BA 9 8 10 10 10 11 8 10 9 10 10 11 11 11 13 13 14 14 14

HRX-OM-R026

HRSH Series HRX-OM-R026 Contents 9.4.1 HRSH090-A-20. 9-10 9.4.2 HRSH090-A-40. 9-10 9.4.3 HRSH090-W-20-HRSH090-W-40. 9-11 Pump capacity . 9-12 9.4.4 HRSH090-A-20/40-HRSH090-W-20/40. 9-12 9.5 Types of hazard labels . 9-13 9.5.1 Locations of Hazard Labels . 9-14 9.6 Compliance standard . 9-15 9.7 Sample DoC. . 9-16 9.8 Daily Check Sheet . 9-17 Chapter 10 Product Warranty . 10-1 HRSH Series

Floating Joint

150 10 16 20 32 40 63 Be sure to read this before handling the products.

Compact

0.06 ST 15, 20 0.04 0.04 ST 15, 20 0.04 ST 5, 10 0.02 0.02 0.02 ST 5, 10 0.00 0 5 10 15 0.00 0 5 10 15 0.00 0 5 10 15 Load [N] Load [N] Load [N] MXZ16 MXZ16 MXZ16 0.15 0.15 0.15 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 25, 30 ST 25, 30 ST 25, 30 ST 15, 20 0.10 0.10 0.10 ST 15, 20 ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25 0.00

48

CAT.NAS100-92 Gripper Step Motor (Servo/24 VDC) With dust cover Z type (2 fingers) Series LEHZJ F type (2 fingers) Series LEHF S type (3 fingers) Series LEHZ Series LEHS Opening/closing stroke Opening/closing stroke 4 6 10 14 22 30 Opening/closing stroke 4 6 8 12 Opening/closing stroke 16 (32) 24 (48) 32 (64) 40 (80) Size Size Size Size 10 20 32 40 10 20 32 40 10 16 20 25 10 16 20 25 32

Guide Cylinder Series MGG

(Assuming approximately 30% dispersion) There may be the case to change substantially depending on an ambient environment. 4 4 4.5 5 6 6.5 6.5 7 8 10 9 10 10 11 D8 10 9 10 10 11 5 5 5.5 6 7 7.5 7.5 8 11 11 13 13 14 14 14 17 35 40 40 45 45 45 45 50 16 18 -X 8 10 9 10 10 11 Individual -X 387 Series MGG Auto Switch Mounting Bracket: Part No.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

30 20 Transfer load m (kg) 300 L2 200 Mer m 100 L2 0 10 30 20 Mer Transfer load m (kg) m 300 a = 500 a = 1000 200 a = 2000 L3 100 m Mey a 0 10 30 20 Transfer load m (kg) Refer to page 145 for deflection data. 92 Standard Motor/Horizontal Mount Specification Series LJ1S30 Dimensions/LJ1S303SC Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12 x 1.75 thread depth 15 20 80 12.5

100

Set pressure range/Display pressure range 10 to 101 kPa 105 to 105 kPa Withstand pressure 500 kPa Smallest settable increment 0.1 kPa Applicable fluid Air, Non-corrosive gas, Non-flammable gas VPressure switch correspondence table Power supply voltage 12 to 24 VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) Compact digital pressure switch ZSE10 series Current consumption

Rotary Cylinder Series MRQ Size: 32, 40 1

CRA1 2 or less Backlash P . 11-10-18 to 11-10-19 For detailed explanation of effective output, refer to the description on page 11-10-5. CRQ2 MSQ Linear Motion Parts/Standard Stroke 32, 40 Standard stroke (mm) Size MRQ 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 Refer to page 11-10-18 for other intermediate strokes.

Fieldbus system PROFIBUS DP compatible SI unit

Enable Generates an error. 1 Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Sets the analogue input device range per channel. Analogue input range (Range) Selects the analogue input range. -10..10 V 2 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to PLC per unit.

IDX-OM-W022

IDU Series 10-1 Safety instructions 101 IDX-OM-W022 Air Dryer 10 Specification for Option M 10-2 Specifications The float type auto drain used in the standard air dryer is replaced with a motor type auto drain (ADM200). The customer is required to mount the auto drain to the air dryer.