Low Maintenance Filter Series FN1

Rc 1/4 108 Head end cylinder port Rc 1/4 Dustproof cover Rod end cylinder port (Manual lock release) D (Stroke) Rc 1/8 Unlocking port IN OUT (125) (102) C B A Rc 1 DRAIN 195 (270) Dimensions (mm) A B C D Model Bore size (Nominal size B) FN111 FN112 610 (730) (844) 20 Rc 1 860 (1000) (1134) 40 8 Series FN1 Options Reservoir Dust removal filter 108 32 0 315 45 P.C.D.220 70 70 90 270 (80) 50

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Plug: M-5P) A 19 6.5 30 4-M6 x 1 Prepared hole dia. 5.1 4-M5 x 0.8 depth 7 32 0.05 W D B 80.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting reference planes B D 16.5 14.5 Section AA MXP16-30B Without magnet and switch rail 2-M3 x 0.5 depth 3.5 For rail mounting 8 2-M2 x 0.4 depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8 depth 7 20 20 L (mm) L K J V H S Z M MA W Model 36 40 93 82 58 20 102

Electro-Pneumatic Regulator IT1000/2000/4000

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

(Station 1) Light/Surge voltage suppressor Side A: Orange Side B: Green 18.9 (DIN rail dimension) (62.4) ON ON 43.5 OFF OFF (7.5) 34.2 Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Stations L1 L2 L3 L4 2 123 112.5 91.5 15.5 3 4 5 6 7 8 9 10 148 137.5 123 12.5 173 162.5 144 14.5 198 187.5 165 16.5 135.5 125 102 16.5 160.5 150 133.5 13.5 185.5 175 154.5 15.5 210.5 200 175.5 17.5 148 137.5 112.5 17.5 Stations SS5X3-45GDBC4 C6 Stations L1 L2 L3 L4 2 135.5 125 108 13.5 3 4 5 6 7 8 9 10 160.5 150 129 15.5 185.5 175 150 17.5 185.5 175 160.5 12.5 210.5 200 181.5 14.5 148 137.5

Compact Rotary Actuator Series CRQ2

CRQ2X MSQX CRQ2XB20CRQ2XB30CRQ2XB40101 101 MSQXB30A MSQXB50A MSQXB20A 102 102 Moment of inertia (kgm2) Moment of inertia (kgm2) MSQXB10A 103 CRQ2XB10CRQ2XB15103 104 104 D105 5.0 0.7 106 5.0 0.7 105 2.0 1.0 0.5 0.3 0.2 1.0 0.5 0.3 0.2 2.0 Rotation time (s/90) Rotation time (s/90) If the rotation time exceeds 2 s per 90, kinetic energy is calculated with rotation time of 2 s per 90. 315 Model

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

. *7 With lock only *8 For an actuator with lock, add the power consumption for the lock. 13 Battery-less Absolute Encoder: Electric Actuator/High Rigidity and High Precision Slider Type LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor LEKFS25E (102) 64 3H9 (+0.025 0 ) depth 3 Body mounting reference plane (B dimension range)1 4 x M5 x 0.8 thread depth 8.5

Refrigerated Air Dryers

IDF190D, 240D IDF370D IDF4E to 15E1 IDU3E to 15E1 (A) (A) No-fuse breaker D 40 Earth leakage breaker 60 A C Power connection B E Power cable outlet (17) 35 Grommet with membrane [mm] Dimensions Model A B C D E IDF4E, 6E, 8E, 11E 32 230 97 34 15 IDF15E1 43 258 102 82 IDU3E, 4E, 6E 32 97 34 15 IDU8E 42 100 37 Earth leakage breaker with cover 230 IDU11E 75 IDU15E1 43 258 102 82 Model A IDF190D

HRS100/150

Page 102 . Page 103 HED qPiping Conversion Fitting . Page 113 Air-cooled 200 V wCaster Adjuster-foot Kit . Page 113 Water-cooled 200 V HEA eElectric Conductivity Control Set . Page 114 Air-cooled 400 V IDH rBypass Piping Set . Page 114 Water-cooled 400 V Cooling Capacity. Page 104 tRelief Valve Set . Page 115 Pump Capacity . Page 105 ySnow Protection Hood . Page 116 Dimensions .

D. P. Lube (Unit) Series ALD(U)600/900

Port size (2) 1 2 1 2 2 2 Air 1.5 MPa Fluid AF Proof pressure AR 0.15 to 1.0 MPa 0.1 to 1.0 MPa Operating pressure range 0.03 to 0.1 MPa 0.05 MPa 102 /min (ANR) Operating pressure differential range IR Recommended press. differential (3) Press. differential setting min. flow VEX 2000 5000 2000 5000 Bowl capacity between levels (cm 3) Turbine oil Class 1(With no additives), ISO VG32 Recommended

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

(NN 1) x H H 10.5 5.5 10.5 5.5 A B 3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102

Possible to transfer a workpiece at low-speed.

CRQ2X MSQX CRQ2XB20CRQ2XB30CRQ2XB40101 101 MSQXB30A MSQXB50A MSQXB20A 102 102 Moment of inertia (kgm2) Moment of inertia (kgm2) MSQXB10A 103 CRQ2XB10CRQ2XB15103 D104 104 105 5.0 0.7 106 5.0 0.7 105 2.0 1.0 0.5 0.3 0.2 1.0 0.5 0.3 0.2 2.0 Rotation time (s/90) Rotation time (s/90) If the rotation time exceeds 2 s per 90, kinetic energy is calculated with rotation time of 2 s per 90. 305 CRQ2X

7

Port size K L F I J (D) Flat terminal C E U 11 T A OUT IN M B 2 x P Port size I F J L K (D) (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Port size P A B C E F I J K L D M T T V U U T 68.5 (74.5) 126.5 (134.5) 76.5 (84.5) 76.5 (84.5) 82.5 (90.5) U 62.5 (68.5) 107.5 (113.5) 29 62.5 (68.5) 5 C VXD2 30 3/4 99.5 68.5 47.5 23 71 20 4.5 17 51 32.5 38.5 35 6 D VXD2 33 35 1 102

1

Width across flats 22 G1/2 32 H (44) H 31.5 25 C C J G1/2 J Dimensions [mm] Model A B C D E F M P Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-1P(N) 30 30 66 30 11 20 8 1/8 19 27 56.5 30 43 47.5 50.5 23 56.5 64.5 48.5 52.5 99.5 50.5 68.5 XSA2-2P(N) 36 36 79 35 14 22 10 1/4 24 29.5 68.5 32.5 55 50 62.5 25.5 68.5 67 60.5 55 102

ML2B

G 2-PA (Hexagon socket head taper plug) I F B + Stroke 2-PA (Port for operating cylinder) J J J J D D 2-PB 2-PB 2-MB, Depth LB II II (Hexagon socket head taper plug) (Hexagon socket head taper plug) J J 28 32 36 G 30 37 45 J 40 46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69 84 102

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .

ML2B

G 2-PA (Hexagon socket head taper plug) I F B + Stroke 2-PA (Port for operating cylinder) J J J J D D 2-PB 2-PB 2-MB, Depth LB II II (Hexagon socket head taper plug) (Hexagon socket head taper plug) J J 28 32 36 G 30 37 45 J 40 46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69 84 102

MVGQ

J MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions DSymbol A E Symbol Bore size (mm) 40 A DB E DB Bore size (mm) Stroke Up to 50 st Over 50 st Up to 50 st Over 50 st -X 40 54 90 0 36 16 71.5 20 17.5 50 50 60 102 4 46 20 81 25 25 2063 63 61 102 0 41 20 81 25 20 Data 10-16-13 14 Valve Mounted Guide Cylinder Series MVGQ 80, 100 How to Order How to Order

REC

D-C80 D-C80C D-B53 D-B64 D-G5NTL Without indicator light Reed switch Without indicator light With timer Solid state switch 10-2-102

C85

22 6 6 19.7 16 22 20 8 G 1/8 M22 x 1.5 8.2 M8 x 1.25 24 13 12 15 15 11 32 17 6 20 16 11 44 24 8 28 20 8 22 22 10 G 1/8 M22 x 1.5 10.2 M10 x 1.25 30 17 12 15 15 11 32 20 8 22 16 11 50 28 8 33.5 25 (mm) S XC ZZ Z Bore 1 to 50 1 to 50 1 to 50 1 to 50 101 to 150 101 to 150 101 to 150 101 to 150 51 to 100 51 to 100 51 to 100 51 to 100 8 46(52){56(62)} 64(70){74(80)} 76(82){86(92)} 86(92){96(102