0.1 - 0.7MPa (high pressure type 1.0MPa), Effective area mm 2 (Cv): metal seal 2.2 (0.12) - 16.2 (0.9); rubber seal 3.6 (0.2) - 21.6 (1.2), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50° C, 3000 SERIES 5 PORT VALVE, 4/5 PORT SOLENOID VALVE, 121

, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, 3000 SERIES 5 PORT VALVE, 4/5 PORT SOLENOID VALVE, 121

Bar stock type valve manifold for VQZ200/300 series valves, Optional DIN rail mount, Side porting, Maximum 20 stations available as standard, 12 port sizes available, VQZ100 Base Mounted Manifold, 3 PORT SOLENOID VALVE, 121 lb

Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing p, Compact Cylinder, CQ2, COMPACT CYLINDER, 489, 121 lb

EX600-WEN_WSV.eng

SWITZERLAND (41) 052 396 31 31 Dorfstrasse 7, CH-8484, Weisslingen, Switzerland Diagnostic Step 3 Connection to PLC UNITED KINGDOM (44) 0845 121 5122 Note) Refer to the operation manual of the PLC manufacturer for connection to PLC and Configurator.

EXxx-OMV0028.eng

Diagnostic UNITED KINGDOM (44) 0845 121 5122 With the above settings, it is possible to control the upper level controller. Refer to the operation manual for each manufacturer for how to set the controller and the PLC.

EXW1-NT1_eng

Bucharest, Romania SLOVAKIA (421) 41 321321 1 Fantransk 1223, 01301 Teplika nad Vhom, Slovakia SLOVENIA (386) 7388 5412 Mirnska cesta 7, SLO-8210 Trebnje, Slovenia SPAIN (34) 945 184 100 Zuazobidea 14, 01015 Vitoria, Spain SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden SWITZERLAND (41) 052 396 31 31 Dorfstrasse 7, CH-8484, Weisslingen, Switzerland UNITED KINGDOM (44) 0845 121

PSxx-OMG0001CN

0.001 MPa 1 kPa 0.01 kPa DC1224 V10P-P10 50 mA() PSE30DC15 V(1 M) PSE31DC420mA100 ) 1 26.4V NPNPNP 2 80 mA DC30 V(NPN) 1 V(80 mA) 1ms 20 ms160 ms640 ms1280 ms 0.1F.S. 2 15 V()1 k 0.2F.S.()150 ms 0.6F.S. 1.0F.S. 1.5F.S. 420 mA() 300 (DC12 V)600 (DC24 V) 50 0.2F.S.() 150 ms 2 1.0F.S. 1.5F.S. 2.0F.S. 0.5F.S. 2 digits 0.5F.S.1 digit 31/2 72(/) OUT1ON()OUT2ON() 2 ()Low5 msLow0.4 V 121

High Vacuum L Type Valve

A6063) Valve (Material: SUS304) 6 Valve seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121

XL-OMY0001

-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121

High Vacuum L Type Valve

Valve (Material: SUS304) 6 3 Valve seal 2 (Maintenance part) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMV0007 5-2.Dimensions Size 16, 25, 40 E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121

High Vacuum L Type Valve

Material: SUS304) 6 3 Valve seal 2 (Maintenance part) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) Shaft (Material: SUS304) 7 11 XL-OMV0017 5-2.Dimensions C E C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121

XMC/XYC Series

XYC Exterior dimensions D G C C B J Fd (K Flange) 45 H Fn (KF Flange) A E Unit:mm Model A B C D E Fn Fd G H J XYC-25 100.2 85 48 1 23.5 40 26 64 28 XYC-40 130 115 66 2 38 55 41 84 36 C D G C B J Fd (K Flange) 45 K H Fn (KF Flange) A E Unit:mm Model A B C D E Fn Fd G H J K XYC-50 178 121 80 31 53 75 52 104 29 10.5 XYC-63 209 148 100 39 61 87 95 70 126 36 9 XYC-80 268 177 117 45.5 80 114 110

XMD/XYD Series

6x6.6 XMD-50 70 183 79 2 75 52 68 20 17.5 XMD-63 88 217 100 3 87 95 114 70 72 20 19.5 P.C.D 92.1 8x 8.4 XMD-80 90 256 117 3 114 110 83 98 20 26.5 D G C C K J H B Fd (K Flange) 45 Fn (KF Flange) A E Unit: mm Model A B C D E Fn Fd G H J K XYD-25 100.2 86.7 48 1 23.5 40 26 66 16 7.5 XYD-40 130 114 66 2 38 55 41 84 20 15 XYD-50 178 128 79 2 53 75 52 95 20 17.5 XYD-63 209 163 100 3 61 87 95 70 121

7ND9071en

or 1/4" 1.6* 1.6* 6 mm or 1/4" 1.0* 1.0* 9 0.6 37 1/4 6 mm or 1/4" 2.0 2.0 11 1.1 67 3/8 10 mm or 3/8" [6 mm or 1/4" (x)] 4.1 4.1 13 2.3 140 3/8 10 mm or 3/8" 17 4.3 262 1/2 10 mm or 3/8" 3.6 3.6 20 5.4 330 1/2 10 mm or 3/8" 5.0 5.0 25 10.5 610 1/2 10 mm or 3/8" 9.5 9.5 32 21 1282 3/4 10 mm or 3/8" 18.0 18.0 40 43 2624 3/4 10 mm or 3/8" 35.0 35.0 50 84 5126 1 10 mm or 3/8" 67.0 67.0 60 121

CEx-OMQ0013

Err42 Err8 No.1ON ON ON LEDNo.10 Err9 3 P3 2 P2 Err9 Err9 ON ON ON ()5mm Err5 5mm 1 1 Err10 Err11 CPU Err12 ON 8P8 48 11-2 () 200 200 6P6 *L=1mm *200.0 1 PRG STEP P6 200 200 300mm/sec 50% 35% 49 12. 121 No. P1 No.

MRQB-OM0002

2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15 2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75 100 32 14 13 13 13 13 13 12 11 10 9 40 23 22 22 21 21 21 19 18 16 15 , , , 4.24.34.2, 15 4.2 4.2 [N] [MPa] [mm 2] 0.15 0.2 0.3 0.4 0.5 0.6 0.7 [mm] OUT 804 121

LEH_C

ON/OFF / / 2 2 3 3 1 2 / 11 - 5.3 [] (LEC ) (LEC ) / P.42 7.3 <> (NPNPNP) LEHZ10K2-4 NPN <> INP(IN ) INP ON ON INP ON OFF ) P.50,P.52 8.3 12 - <> No.0 a b c d e f g h i j k a ABSINC ABS() / / INC()// b c ) / P.50 8.3 d e f 0(0 ) g h i )150%/ P.52 8.3 j 12 AREA ON 121 INC ABS() )No.0 120 222 AREA 13 - k INP(IN )ON INP INP ON )0.50 )No.0 22 10 12 INP 14 -

JXCx-OMU0004

ALARMOFF 3 OFF LED a I/O STOP OFF * ALARM 10 8.6 1 2 3 PLC 15ms 30ms I/O3ms IN0 IN1 ON3IN0 IN1 IN0 ON IN0 OFF ON IN1 OFF INO IN0 44 No.JXC-OMU0004-A 8.7 LED 7 LED ALM LED ALM LED b PWR LED a 7 LED () / *1 F *4 F *4 1 9 A E 1 9 A E AE / *2 L *3 / *1 ON 8.5 ON *2 OFF LED *3 ON/OFF ,, 3 L L *4 RESET STOP ON M24V7 LEF a b 45 No.JXC-OMU0004-A 9. () 9.1 .121

JXCx-OMT0023

SERVO MOTOR 121 to 126 12.1 Servo motor with a lock . 122 19 12.1.1 Features 122 12.1.2 Characteristics of servo motor with a lock 124 12.2 Protection from oil and water . 125 12.3 Cable . 125 12.4 Rated speed of servo motor. 125 12.5 Mounting connectors . 126 13.