XM, XY

viscous flow) Shows flow rate when P= 0.1 MPa 20 18 XMD/XYD-63 XMD/XYD-80 16 14 XMD/XYD-50 12 10 XMD/XYD-40 8 6 XMD/XYD-25 4 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.4 4.0 4.5 5.0 5.5 6.0 Adjustment nut rotations (n) 490 Stainless steel High Vacuum Angle/In-line Valve XMD, XYD Series Dimensions XMD/Angle type D C L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123

Stability of suction position,

31.2 Model Weight [g]/Pad material N/U/CL S F ZP3E-T50BMl-B8 41.0 39.5 51.5 ZP3E-T50BMl-B10 39.6 38.1 50.1 ZP3E-T63BMl-B12 ZP3E-T63BMl-B18 ZP3E-T80BMl-B12 ZP3E-T80BMl-B18 Width across flats 24 32 61 Width across flats 24 32 50 A A 43 57.5 12 B 35 49.5 12 B 18 12.5 85 80 57 68 63 45.8 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-T63BMl-B12 M12 x 1.75 12 103 100 123

•

. -500 1.37 2.1 3 3.34 5.47 8.54 13.3 PreSsure 45E' 123 1.92 3.00 4.92 7 69 12.0 , mmFlg 4OE , 1.09 1.71 10.7 2.67 4.37 6.83 .. (Max. Vacuum pressure: 660mmHg ') final Vacuum pressure \ Max. Suction rate 24 N2/min Leakage frOm adsorption 350, 0.96 1.50 2.33 3.83 6.00 9,34 " ... , m 0.82 1.28 2.00 3.28 5.12 8,01 Tube length " " lm, lube diajIoB/6 area between work and pad.

MY2

2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123

Table of Contents

Maintenance . 118 119 122 122 122 123 125 126 128 128 128 128 130 131 133 133 133 134 136 137 140 141 142 142 142 143 143 144 145 149 149 149 146 146 146 147 147 148 148 156 156 156 157 158 158 158 158 159 159 159 160 160 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

High Power Cylinder:

9 Wear ring CM-020-07-301A CM-025-07-302A CM-032-07-304A C1A040-07-305A Resin @0 Piston gasket SO-012-13 SO-010-22 SO-010-23 SO-013-7 NBR @1 Cylinder tube gasket CM-020-16-123 CM-025-16-124 CM-032-16-126 CM-040-16-127 NBR @2 Rod seal PDU-10Z PDU-12LZ PDU-12LZ PDU-16Z NBR @3 O ring SO-017-30 SO-017-32 SO-017-34 SO-017-36 NBR @4 O ring SO-015-23 SO-015-23 SO-017-36 SO-017-37 NBR @5 4.10-10

MK

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 Accessory Bore size (mm) Clamp stroke (mm) 12 16 20 25 32 40 50 63 J 10 20 50 70 100 250 280 500 595 Clamp bolt Hexagon socket head cap screw Hexagon nut Spring washer MK-A020 87 123 290 320 525 640 1100 1520 D1350 1805 MK-A032 (g) Additional Weight 12 -X MK-A050 16 20 25 32 40 50 63 Bore size (mm) 20Both ends tapped style 6

RB/RBL/RBQ

-X 123 147 172 270 295 368 614 Taking into consideration the corresponding weight of the impacting object Me, calculated using Data D and collision speed , check provisional model compatibility with the condition of application. If this is satisfactory, then the said provisional model will be the applicable one. 177 212 247 389 424 530 884 7.

RZQ

. 10-10-3 4 Series RZQ Theoretical Output Theoretical Output Table 1 [N] Air pressure [MPa] (with same air pressure applied to each port) Piston area [mm2] First stage Extension Retraction Extension Retraction Second stage Bore size (mm) Piston B Piston A Front side q Rear side w Front side e Rear side r 0.3 0.5 0.7 0.3 0.5 0.7 0.3 0.5 0.7 0.3 0.5 0.7 32 40 50 63 119 276 197 118 287 205 123

C85

101 to 150 51 to 100 101 to 150 1 to 50 65.2(71.2) {75.2(81.2)} 65.2(69.2) {75.2(79.2)} 76(79.5) {86(89.5)} 82(85.5) {92(95.5)} 97.5(101) {118(121.5)} 113(116.5) {144(147.5)} 68(74) {78(84)} 68(72) {78(82)} 78(81.5) {88(91.5)} 84(87.5) {94(97.5)} 73(79) {83(89)} 73(77) {83(87)} 86(89.5) {96(99.5)} 92(95.5) {102(105.5)} 99.5(103) {120(123.5)} 115(118.5) {146(149.5)} 107.5(111) {128(131.5)} 123

Table of Contents

(g) Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260

CQS

20DCM Cylinder weight: CQSB20-20D101 g Option weight: Rod end male thread 10 g : Rubber bumper 2 g : Double clevis style 92 g Cylinder stroke (mm) Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 12 29 36 42 49 56 63 93 100 113 147 180 107 16 38 47 56 64 73 82 119 128 145 187 229 136 201 g 20 63 75 88 101 114 127 140 153 178 306 370 434 498 562 627 166 25 91 107 123

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

13 Series CY1F Theoretical Output Weight Unit: kg Unit: N Piston area (mm2) Operating pressure [MPa] Standard adjustment bolt weight Weight of adjustment bolt for 25 mm adjustment Basic weight Model Bore size (mm) Additional weight per each 50 mm of stroke 0.2 0.3 0.4 0.5 0.6 0.7 CY1F10 78 23 31 39 46 54 0.520 0.095 0.004 0.012 10 15 CY1F15 176 0.815 0.133 0.004 0.012 15 35 52 70 88 105 123

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Holding force (N) CY1H10 1.0 1.3 1.6 CY1H15 2.2 2.7 3.2 3.6 4.1 Theoretical Output CY1H20 3.0 3.5 4.0 4.4 4.9 5.4 CY1H25 4.6 5.3 6.0 6.6 7.3 8.0 9.4 (N) CY1HT25 5.1 6.2 7.3 8.3 9.4 10.4 12.5 14.6 Operating pressure (MPa) Piston area (mm2) Bore size (mm) CY1HT32 8.4 9.6 10.7 11.9 13.0 14.2 16.5 18.8 0.3 0.7 0.6 0.5 0.4 0.2 10 15 23 54 39 31 78 46 Shock Absorber Specifications 15 35 52 123

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123

Type: Rail, Type: DIN Rail for SV1000 / 2000, Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: -, Specification: -, Thread standard: -, Dimension: Length: 123 mm, Applicable valve: -, Pressure reduction port: -, Option: -

Type: Rail, Type: DIN Rail for SV3000 / 4000, Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: -, Specification: -, Thread standard: -, Dimension: Length: 123 mm, Applicable valve: -, Pressure reduction port: -, Option: -

・While it is possible to mount a G36-10-01 or G46-10-01 pressure gauge on a VEX113□/123□ series regulator, it will be larger than the width of the product body.
・It is also possible to mount a G46-10-01 pressure gauge on a VEX133 □ series regulator so long as it does not interfere with the piping.

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 123, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Without magnet, Port thread type: Rc, Auto Switches: Without auto switch

Load Mass (Horizontal Mounting)(kg): 20~39.9, Table Size Length L(mm): 110.8, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 123, Table Size Height H(mm): 37, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 32, Piping Format: Centralized