Aluminum High Vacuum Angle Valve Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.
8 KGY08-03 17 47 30.5 37 1 8 KGY10-01 27 49.5 31 R(PT) 1 4 3 8 KGY10-02 KGY10-03 50.5 52 30 32 17 29 10 21 28.4 40.0 18.5 26.5 17 39 1 2 KGY10-04 36 54.5 66 31 41 22 1 4 3 8 KGY12-02 KGY12-03 53.5 55 31 33 17 12 22 45.4 57.4 20.9 17 28.5 1 2 KGY12-04 37 57.5 22 68 3 8 KGY16-03 26.5 38 20.9 34 25 81 (81) 113 (113) 65.5 112 16 22 1 2 KGY16-04 41 67 116 Reference dimensions after R(PT) thread
41 8 18.5 15.2 79 R3/8 19 23 9.5 1.5 47.4 19.8 52.6 79 19.8 52.6 AS321F-03-10ST AS321F-N03-09ST 18.5 1.5 47.4 5/16" 15.2 29.5 41 NPT3/8 19 23 9.5 31.8 43.3 10 21 18.5 81 81 AS321F-03-12ST AS321F-N03-11ST 21 3/8" 17.9 31.8 43.3 32.8 44.3 12 22 20.9 83 141 AS421F-04-10ST AS421F-N04-11ST 21 3/8" 17.9 33.6 47.9 33.6 47.9 10 21 18.5 141 24 28.6 12 1.5 55.8 1/2" NPT1/2 23.8 21.7 28.6 12 35.2 49.5
Tightening torque (Nm) M22 x 1.5 Mounting nut width across flats (mm) Bore size (mm) Mounting nut thread 20 25 32 40 26 45 M24 x 1.5 32 60 M30 x 1.5 38 85 M33 x 1.5 41 110 2.
51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."
M 13 40.5 6 18.5 10 10 12.8 12.8 KB 8 A L 14 44.5 48.5 53.5 57 54 59.5 62.5 4.2 8 17 15.2 20.5 26 18 15.2 KR (R) Connection threads H 10 19 18.5 23 41 29 18.5 KA (R) 12 22 20.9 20.9 24 58 46 2 x Applicable tubing KQG2 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.
51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26
51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26
8 KGY08-03 17 47 30.5 37 1 8 KGY10-01 27 49.5 31 R(PT) 1 4 3 8 KGY10-02 KGY10-03 50.5 52 30 32 17 29 10 21 28.4 40.0 18.5 17 26.5 39 1 2 KGY10-04 36 54.5 66 31 41 22 1 4 3 8 KGY12-02 KGY12-03 53.5 55 31 33 17 12 22 45.4 57.4 20.9 17 28.5 1 2 KGY12-04 37 57.5 22 68 3 8 KGY16-03 26.5 38 20.9 34 25 81 (81) 113 (113) 65.5 112 16 22 1 2 KGY16-04 41 67 116 Reference dimensions after R(PT) thread
13 26 19 15 15.5 25 to 800 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 M10 x 1.25 13 28 19 15 19.5 32 to 800 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 M14 x 1.5 13 36 19 15 21 40 to 800 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 M16 x 1.5 19 44 24 21 21 (mm) Foot bracket plate thickness is dimension LT + 1mm.
D-A3 D-G39 D-K39 D-A44 100 + 100 (n 2) (n = 2, 3, 4, 5 ) 35 + 30 (n 2) (n = 2, 3, 4, 5 ) 35 100 10 Mounting nut width across flats (mm) Bore size (mm) Mounting nut thread Tightening torque (Nm) n: Number of auto switches 20 25 32 40 45 M22 x 1.5 26 Theoretical Output 60 M24 x 1.5 32 85 M30 x 1.5 38 Unit (N) M33 x 1.5 41 110 1 3 7 Operating direction Operating pressure (MPa) Bore size (mm
XB XC + Stroke Rod clevis, Head clevis: C76C32, C75C40 XB XC + Stroke CZ CW CH LT LT 4-AB 4-AB CO CO CR CT CE CE CR CU CG CG (mm) Rod/Head trunnion Rod foot (Flange) Rod clevis, Head clevis AB 7 9 Bore CZ XB 47 57 XC AB 7 9 AO AU 14 20 LS LT 4 5 NH 28 33 TF 28 30 TR 52 60 UR 49 58 US 66 80 W 34 40 XL 120 154 XS 48 60 12 0.032 0.059 NB TDe8 TZ 47.9 59.3 XB 47 57 XC CW 13 17 LT 4 5 CE CG 41
XB XC + Stroke Rod clevis, Head clevis: C76C32, C75C40 XB XC + Stroke CZ CW CH LT LT 4-AB 4-AB CO CO CR CT CE CE CR CU CG CG (mm) Rod/Head trunnion Rod foot (Flange) Rod clevis, Head clevis AB 7 9 Bore AB 7 9 AO AU 14 20 LS LT 4 5 NH 28 33 TF 28 30 TR 52 60 UR 49 58 US 66 80 W 34 40 XL 120 154 XS 48 60 12 0.032 0.059 NB TDe8 TZ 47.9 59.3 XB 47 57 XC CW 13 17 LT 4 5 CZ XB 47 57 XC CE CG 41
53-SS5Y5-41-05-01 1 set (Type 41, 5 station manifold base part no.) 53-SY5240-LL3 2 sets (Double solenoid part no.) 53-SY5140-LL3 2 sets (Single solenoid part no.)
52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121
41 41 42.5 41 50.5 85 93 49 42 48 42 85.5 91 93.5 91 41 43.5 41 46 41 49.5 49.5 48.5 51 48.5 59 93.5 101.5 55.5 50 54 50 94 107 102 107 49 51.5 49 54 49 57 58.5 56 59 56 69.5 104 112 63 57.5 62 57.5 104 121 112 121 56 59.5 56 62.5 56 D-A9 and D-A9V cannot be mounted on 50.
Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150
Y1 Plate 25 31 X 41 Z A A port B port B port A port 29 F 0 0.036 9h9 A parallel key is used instead of single flat for size 40.
51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."
Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.