MHx-OMU0057

6 MHZ2-16 M40.7 1.6 4.5 MHZ2-20 M50.8 3.3 8 L L MHZ2-25 M61 5.9 10 MHZ2-32 M61 5.9 10 MHZ2-40 M81.25 13.7 13 Nm Lmm MHZ2-10 M30.5 0.69 5 MHZ2-16 M40.7 2.1 8 MHZ2-20 M50.8 4.3 10 MHZ2-25 M61 7.3 12 MHZ2-32 M61 7.9 13 MHZ2-40 M81.25 17.7 16 Nm MHZ2-10 M2.50.45 0.49 MHZ2-16 M30.5 0.88 MHZ2-20 M40.7 2.1 MHZ2-25 M50.8 4.3 MHZ2-32 M50.8 4.3 MHZ2-40 M61 7.3 D-Y59 D-Y69 D-Y7P 7 - 1. 2. 1.

air-filter-e

x 3) L1000 (L250 x 4) A B C D AIR VENT Note) For a comparison with the nominal filtration accuracy according to the element category, refer to Best Pneumatics No.7.

Air Preparation Equipment

x 3) L1000 (L250 x 4) A B C D AIR VENT Note) For a comparison with the nominal filtration accuracy according to the element category, refer to Best Pneumatics No.7.

Thermo-chiller

Flashes during stand-by for stop or antifreezing function, or independent operation of the pump. y [ALARM] lamp Flashes with buzzer when alarm occurs. u [ ] lamp Lights up when the surface of the uid level indicator falls below the L level. 13 Accumulation time reset Reset function when the pump, the fan or the compressor is replaced.

Electric Slide Table / High Precision Type 《 AC servo motor 》

Size Order No. 11 Socket Carbon steel Electroless nickel plated 16 LE-D-2-2 12 Connect shaft Carbon steel Electroless nickel plated 21 25 LE-D-2-3 13 Rolling bearing 14 Return box Aluminum die-cast Painting Maintenance parts/Grease 15 Return plate Aluminum die-cast Painting Apply for Grease pack 16 Magnet order No. 17 Wear ring holder Stainless Size 25,150st only For Piston rod GR-S-010(10

IDX-OM-W026

T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-2 13-6 . 13-3 14 14-1 . 14-1 2 IDX-OM-W026 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W026 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W026 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDF Series i-2 i-3 IDX-OM-W026 i i 2 6 WARNING !

Flow Control Equipment

D The air in the cylinder initially opens the piston valve and the check valve and discharges rapidly through the switching valve. The fully opened piston valve closes as shown in Fig. D when the pressure in the cylinder is lower than the set pressure. Then the air passes through the check valve and becomes discharged (Fig. D).

240

Dimensions [mm] Model L1 L2 L3 A B C D E F G J LEPS6-25 127.1 138.6 11.5 16.5 21 24.5 28 16.5 28 36 76.4 LEPS6-50 156.6 169.6 13 22 45 30 52 22 52 60 107.4 393 LEPS Series Step Motor (Servo/24 VDC) Dimensions LEPS10 D E C B 4 10 22 ( ) +0.025 0 ( ) +0.025 0 3H9 depth 3 3H9 depth 3 2 x M5 x 0.8 thread depth 10 4 x M4 x 0.7 thread depth 6 28 24 16 K 25 14 Table operating range Note 1) [1] 1

MGP-OM0242Q

Part number of auto switch mounting bracket D-M9 Applicable auto switches D-M9W D-A9 Bore(mm) 12 to 63 Surface with auto switch mounting slot Auto switch mounting surfaces Mounting of auto switch Tightening torque Auto switch Mounting Screw (Nm) Auto switch model Tightening torque D-M9 D-M9W 0.05 to 0.15 D-A9 0.10 to 0.20 NoteAuto switch mounting brackets and auto switches are enclosed with

VKF300

Printed in Japan. 1st printing August, 1998 D-SMC.L.A. P-69.5 (JT)

VXA21/22

11 13 C 10.5 13 [ ]: Individual pressure style 4.1-66 Direct Air Operated 3 Port Valve Series VXA31/32 For Air, Gas, Vacuum, Water and Oil Proper selection of body and sealing materials permits application of a wide variety of fluids.

NCQ8

D-rod dia.

2–4

HS A B Reed switch Solid state switch D-A7 H D-A80H D-F7 D-J79 D-F7 W D-J79W D-F7BAL D-F7 F D-F7NTL 32, 40, 50 (mm) D-F7 D-J79 D-F7 W D-F79F D-J79W D-F7BAL D-F7LF D-A7 H D-A80H D-F7NTL Auto switch model A B Hs 9.5 13.5 11.5 Symbol A B Hs A B Hs A B Hs 32 40 50 32.5 36 42 10.5 13 16 13.5 17.5 15.5 32.5 36 42 11.5 14 17 14.5 18.5 16.5 32.5 36 42 32.5 36 42 6.5 9 12 6.5 9 12 9.5 13.5 11.5 Bore

Slide Tables MX Series

D 1.Body tapped H H l Guide block D l Max.tightening torque ftlb (Nm) Locating pin hole D x H (mm) Max.screw-in depth l (mm) Bolt used Model Use a bolt that is less 0.5mm than max.(l)screw-in depth to avoid contacting the guide with mounting bolt.

CLS

97.5 96 97.5 144 154 10 8 15 13 3.5 1.5 5.5 200 200 10 107.0 108.0 107.5 108.0 154 164 12.5 10.5 17.5 15.5 6 4 8 D-Y7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL Operating Range Auto switch model Bore size (mm) 125 140 160 180 200 D-Z7/Z80 14.5 14 13 14 14.5 Hs D-A3/A44 D-A5/A6 A 10 10 10 10 10 D-A59W Ht 17 17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 8 7.5 7 12 13 D-Y7BAL

3 Port Solenoid Valve Rubber Seal Series SY100 1

(Values at the initial period) Solenoid Specifications Base mounted 13 24 SY1 A 13 24 Series SY1 Grommet (G)/(H), L plug connector (L) M plug connector (M) Electrical entry Coil rated voltage (V) DC 24, 12, 6, 5, 3 AC 50/60 Hz 100, 110, 200, 220 JIS Symbol SY113 4 (A) SY123 4 (A) 10 to +10% Allowable voltage fluctuation Power consumption (W) DC 0.75 W (With indicator light: 0.8 W) (A) 2

Series CQ2

, Z8 D-Y5, Y6, Y7 D-Y7W, D-Y7BAL 180, 200 2 pcs.

Large Bore Compact Cylinder Series CQ2

, Z8 D-Y5, Y6, Y7 D-Y7W, D-Y7BAL 180, 200 2 pcs.

CU

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

IDX-OM-W023

T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W023 13 T 13-4 1 PE L N 3 2 L,N: PE: LN PE M3 (0.63Nm) 6.5mm 1.25mm 17 17 2 () () IDU Series 13-4 13 2 IDX-OM-W023 13 T 13-5 IDU8E-10-T IDU8E/11E-20-T GFCI GFCI R For Option R R For Option R R For Option R R For Option R TB N L 3 2 1 PE 3 2 1 PE L N TB ILS ILS MC TDR