ZQ-OM01601 [F 1] OUT1 23 - [F 2] OUT2 OUT2 ONOFF OUT2 OUT2ON (P_1 H_3OFF)OFF ON(P_1 H_2ON), ON ONOFF H_2H_4 (H_1 H_2 + H_4 ) P_1-70.0 kPaH_1:10.0 kPaH_2:5.0 kPaH_3:0.0 kPaH_4:1.0 kPa OUT2 () OUT1 (V) H_2 24 - <> [F 2] ON OFF OFF ON ON [F 2] OUT2 1 2 2 3ON(H_4)OFF(H_2) 25 - [F 3] <> [F 3] , [F 3] 26 - [F 4] <> [F 4] , [F 4] , (28 -) ,ON/OFF 27 - OUT1 , AP1 OUT1 OUT1 OUT1 A1L
(Value in the initial state) VA VM VR With Bracket Pilot Pressure Range (Single pilot) Body ported VH Air operated valve type 0.6 SYJA5120-M5-F VHS 0.5 Pilot pressure MPa The mounting bracket is supplied unattached.
Magnet With auto switch only 9 Magnet plate Stainless steel With auto switch only 10 Scraper 11 Rod seal 12 Piston seal NBR 13 Tube gasket 14 Piston gasket 269 CHKD Series Dimensions Basic type/CHKDB 2 x Rc P F with effective thread depth G F with effective thread depth G Q Q Width across flats f c R D R a b g e H E E h + Stroke C B + Stroke 4 x K through 8 x L counter bore 4 x K through
CHSD40-PS CHSD50-PS CHSD63-PS CHSD80-PS CHSD100-PS Seal kit consists of items @1 to @5 and @9, and can be ordered by using the seal kit number for each bore size. 335 CHSD Series Dimensions Basic: CHSDB Z + Stroke PJ + Stroke Y GB GA J MM 2 x RcP V V D E MA K F G NA Cushion valve M B C A SS NB Air release S + Stroke H ZZ + Stroke Stroke range Bore size (mm) MM A B MA V C D PJ F G NB SS GA
With manually operated handle Proximity switch T TURCK P P&F W None * Switch cassette viewed from the front.
F = mg Mass m Movement I: Inertial moment Refer to page 100. Static torque calculation Tf = F x L (Nm) Load . g = 9.8m/s2 F: Pressing force (N) : Angular acceleration Load .
M1 = F x L Port side A M2 = F x L M3 = F x L Note) Deflection: Displacement of section A when force acts on section F REAH10 REAH10 REAH10 Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL 0.08 0.03 Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 0.5 1.5 2.5 0 0.5 1.5 0 0.5 1.0 1.5 0 1.0 2.0 Moment (Nm) 1.0 Moment (Nm) Moment (Nm) REAH15, 20,
Screw-in Piping M5 X 0.8 Relieving port size 50 to 500mm/s Piston speed Mounting Basic, Axial foot, Front flange, Rear flange *Auto switch attachable Dimensions REC B/Basic H2 2-Rc(PT)P Width across flats B2 2-NN G G H1 Width across flats B1 Relieving port M5 X 0.8 Standard port I Relieving port 2-Eh8 D MM AL K A N N F lNA S+Stroke H F ZZ+Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA
Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G *BLUE links will lead to purchase pages. Replacement Parts Description Note Material Part no.
Round head combination screw Thread type Nil Rc G F Plug Inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces.
DttEl{StOlts DIMENSIONS A I c D E F o H 1,1f a r.36 (34.5) 0.874 @.4 1.10 t?f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.
(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard
Function number Function name Default setting Page F 0 (Unit) Unit selection [ PA] kPa Page 49 ISA3-F: [ 20] ISA3-G: [ 50] ISA3-H: [ 50] Switch point ISA3-F: [ 3] ISA3-G: [ 20] ISA3-H: [ 20] F 1 (oUt1) OUT1 setting Page 50 Hysteresis Display colour [ SoG] Green when ON, Orange when OFF out2: [ Ewin] Output mode OUT port side pressure detection Window comparator mode Reversed output 2ot:
Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G *BLUE links will lead to purchase pages. Replacement Parts Description Note Material Part no.
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
The compact design of series NCJP double acting pin cylinder minimizes mounting space. The NCJP is available in five mounting options to accommodate many design styles. Bore sizes include 6, 10 and 15mm with strokes ranging from 5 to 30mm. Other features include brass panel mounting nuts, stainless steel piston rod and brass bodies. The NCJP series is also available in an auto switch capable
The compact design of series NCJP double acting pin cylinder minimizes mounting space. The NCJP is available in five mounting options to accommodate many design styles. Bore sizes include 6, 10 and 15mm with strokes ranging from 5 to 30mm. Other features include brass panel mounting nuts, stainless steel piston rod and brass bodies. The NCJP series is also available in an auto switch capable
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, PIN, DBL ACT, ACTUATOR, NCJP ROUND BODY CYLINDER, GD, 15MM NCJP DOUBLE-ACTING, .39380 lb
Series VT 3port, direct operated poppet valves are compact in size, yet provide large flow capacity, and low power consumption. The series is suitable for use in vacuum applications. The VT valve is a single valve with 6 functions (universal porting type) such as N.C. valve, N.O. valve, divider valve, selector valve, etc. The manifold style valve, series VO, can be easily converted from
The compact design of series NCJP double acting pin cylinder minimizes mounting space. The NCJP is available in five mounting options to accommodate many design styles. Bore sizes include 6, 10 and 15mm with strokes ranging from 5 to 30mm. Other features include brass panel mounting nuts, stainless steel piston rod and brass bodies. The NCJP series is also available in an auto switch capable