3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Refer to p.1.12-57 for latching style. 1.12-31 Series VQZ Base Mounted Be sure to read before handling. Refer to p.0-33 to 0-36 for Safety lnstructions and common precautions. Precautions How to Wire the DIN Connector Connection of Lead Wire (Not necessary if ordering the lead wire pre-connected model.)

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5 3 38.5 75 15.3 4.2 28 7.5 3 38.5 57 12.8 3.2 24 6 6 6 6 6 6 10 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com One-touch

Ejector Valve Unit Series ZYY/ZYX 1

(M3: Port PE) Pilot valve exhaust port Hysteresis setting trimmer (AN203-KM8) Silencer 62.1 57.1 49.4 41.6 33.6 29.5 23.5 21 10 Vacuum port (8.25) 3.75 6 One-touch fitting Port V (5.25) (13.5) 19 88 18.75 16.75 Supply port Button for block separation 6 One-touch fitting Port P1 27 ZYX35LOZ-10S1 (Specifications without vacuum switch) End plate (P44027A) 31 20 EXH.

Size: 31 (3/8), Model Combination: AF+AR+AL, Port Size: 03 (3/8, Size 31), Accessory: D (Float Auto Drain, N.O., Size 31 & 41), Pressure Relief Valve: V (Downstream Valve), Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41), Handle Orientation: A (Upward Handle)

Size: 31 (3/8), Model Combination: AF+AR+AL, Port Size: 03 (3/8, Size 31), Accessory: D (Float Auto Drain, N.O., Size 31 & 41), Pressure Relief Valve: w/o Valve, Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41)

Size: 31 (3/8), Model Combination: AF+AR+AL, Port Size: 03 (3/8, Size 31), Accessory: C (Float Auto Drain, N.C., Size 31 & 41), Pressure Relief Valve: V (Downstream Valve), Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41), Handle Orientation: A (Upward Handle)

Size: 31 (3/8), Model Combination: AF+AR+AL, Port Size: 03 (3/8, Size 31), Accessory: C (Float Auto Drain, N.C., Size 31 & 41), Pressure Relief Valve: w/o Valve, Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41), Handle Orientation: A (Upward Handle)

Size: 31 (3/8), Model Combination: AF+AR+AL, Port Size: 03 (3/8, Size 31), Accessory: C (Float Auto Drain, N.C., Size 31 & 41), Pressure Relief Valve: V (Downstream Valve), Option: 8R (Metal Bowl w/Sight Glass, Flow Direction: Right to Left, Size 31 & 41)

Size: 31 (3/8), Model Combination: AF+AR+AL, Port Size: 03 (3/8, Size 31), Accessory: D (Float Auto Drain, N.O., Size 31 & 41), Pressure Relief Valve: w/o Valve, Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41), Handle Orientation: A (Upward Handle)

Size: 31 (3/8), Model Combination: B (AF+AR), Port Size: 03 (3/8, Size 31), Accessory: C (Float Auto Drain, N.C., Size 31 & 41), Pressure Relief Valve: w/o Valve, Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41), Handle Orientation: A (Upward Handle)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

14.3 31.1 36.1 27.5 3.2 9.3 1/4" 12 12 32.1 13.5 R 1/8 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 4 9.3 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 13.4 27.5 6 11.6 5/32" 14.2 13.4 27.1 30.2 35.2 12 32.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 23.1 12.7 30.2 19 18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01-07 23.9 31

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-07 18.3 23.1 11.7 13.5 18.1 22.9 11.6 12 6 1/4" 13.5 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 14.3 13.5 20.4 27.5 11.6 6 5/32" 14.2 31.1 36.1 12 32.1 27.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 12.7 14.3 23.1 30.2 19 18.5 25.3 32.4 15.2 11.4 36.1 8 3/16" 31.1 32.1 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01-07 23.9 31

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS231FM-02-04 AS231FM-02-06 AS231FM-02-08 AS231FM-02-10 19.8 20.3 21.4 24.4 24.9 26.9 30.9 30.6 34 35.2 38.7 8.4 9.3 11.6 8.4 9.3 11.6 15.2 10.4 12.8 15.2 18.5 28.7 12.7 17.5 M5 x 0.8 8 8 28.8 33.8 25.1 30.1 9.6 9.3 10.8 31.8 13.5 20.6 ASV 17 31.8 12.7 17.5 9.3 13.1 AK 36.1 31.1 32.1 27.1 R 1/8 14.2 14.2 18 21 37.2 41.7 40.1 42.6 45.6 48.4 13.5 18.5 16 17 18.5 21 22.9 28.2 21.9 25.2 28.2 31

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Size: 10 to 50 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed auto switch Solid state auto switch Hysteresis angle DM9 DA9, DA9V Size Rotating angle Operating angle m 10 10 10 10 Operating angle m 10 10 10 10 B 45 62 68 83 B 49 66 72 87 A 27 35 39 49 A 31 39 43 53 Hysteresis angle 90 80 65 50 42 35 30 24

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRB2 CRBU2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MRQ D2011-7-31 32 Series CRA1 (Size 30, 50, 63, 80, 100) Simple Specials: -XA1 to -XA24: Shaft Pattern Sequencing I Shaft shape pattern is dealt with simple made-to-order system.

CXS

If the plate is not required for your application, use the cylinder that does not come with a plate, available through made-to-order (-X593) on page 8-31-124. 2. When disassembling and reassembling the cylinder, please contact SMC or refer to the separate instruction manual.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Conduit terminal: VP3185-T A B DIN terminal: VP3185-D A B [110] 81 35 Light (For TL, TZ) Max.12 31.3 G1/2 Applicable cable 6 to 12 Light position (For DL, DZ) G1/2 NO NO PE PE [243] 237.6 239 228.5 213 31 31 130 130 52 52 41 41 105 105 [ ]: With indicator light (TL, TZ) 1312 Note) CE-compliant: D/DO only (Electrical entry) VP3145/3165/3185 Series Made to Order [Option] Please contact SMC

0.4

0.18 Metal seal 26 or less Pressure center VQ1501 47 or less 25 or less 0.85 0.20 0.21 0.65 0.42 0.18 Rubber seal 33 or less A B C Dual 3-port valve VQ1 01 47 or less 25 or less 0.70 0.20 0.16 0.70 0.20 0.16 Rubber seal 33 or less VQ2100 49 or less 22 or less 2.0 0.15 0.46 2.6 0.15 0.60 Metal seal 29 or less 95 Single VQ2101 51 or less 24 or less 2.2 0.28 0.55 3.2 0.30 0.80 Rubber seal 31

High Vacuum Angle Valve

C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31

Vacuum Saving Valve

Example of Selection from Minimum Operating Flow 100 Example) Vacuum saving valve used: ZP2V-A8-05 From Table 1, Q2 can be calculated as 5.0 l/min (ANR). 90 31 {l/min (ANR)} 5 {l/min (ANR)} 80 N = 6 (unit) Vacuum pressure (kPa) 70 Q2 = 5.0 l/min (ANR) 60 Table 1.