Series VQ Metal Seal/Rubber Seal Body Ported

L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

2/3 Port Valve

1.5 0.4 340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

Vacuum

Flat vyilh rib 26 28 29 29 29 29 29.5 31 31 5 31.5 32 32.5 Deep type 95 95 95 95 107 IPI $enie ffi[r Bulfm Pad Diameters q2O . a25. s32 Pad Diameters a4O. sSO Ftat type Flai type Dep typeZPT4oD only Deep lypeZPT2sD only Flat typrg . Flat with rib Flat type.

Title not found

common 31 slave mode I iso ated comrnon As.lnlerhce 4in/21'jrt 31 slavE riode I ho aled con',1ron Wnhod Sl unitinpui block {SDo) Nole 1 ) Indimie the size in lt'e specinton sheel n ihe Ese oi CM and L^r Note 2l Symbols ior inch s zes are

Title not found

sEve rrlde 1 isolated corlra" 4Te 1 l o 4 ( 8 1 Aslnledace 4irvloul 31 sla!

Title not found

hn slencer iype d@s nol sal st rhe 1 Io t2124) N4ult'Connector kit wilh 1 5m cable Mulh-conneclor klt wlh 3 0m cable l4ulliconnector kitwiih 5 0m catr]e Botlom ported elbow Wilh03 2 One-touch fttng SeialkitwilhoulSl unit 1n212 (24) Boitom ported elbow Wilh 06 One-touch ntl ng AS. fterla@ 8 n8oul 31 s al/e mode 2 isolatd common ASrledace 4 rll4oLii 31 s ave mode 2 isolaled comfion As-lnledace

Rotary Table/

High precision type High precision type High precision type High precision type Ta = I (Nm) Basic type Basic type Basic type Basic type I: Inertial moment 1 2 3 7 10 20 30 50 70 100 200 31 41 0.56 41 Refer to page 3. 32 45 0.82 45 . : Angular acceleration Load . 33 48 1.1 48 2 = (rad/s 2) t 2 54 71 1.5 71 : Rotation angle (rad) 86 74 107 2.9 78 74 2.4 78 t: Rotation time (s) 166 137 197

Vacuum

Flat vyilh rib 26 28 29 29 29 29 29.5 31 31 5 31.5 32 32.5 Deep type ) 95 95 95 95 10 IPI $enie ffi[r Bulfm Pad Diameters q2O . a25. s32 Pad Diameters a4O. sSO Flai type Ftat type Dep typeZPT4oD only Deep lypeZPT2sD only Flat typrg . Flat with rib Flat type.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

D-C7 D-C8 D-C73C D-C80C D-A3A D-G39A D-K39A D-A44A D-H7W D-H7BAL D-H7F D-G5NTL D-H7 D-H7C D-C73C D-C80C D-B5 D-B6 D-B59W MG MGP A 1(0) 1(0) 2(0) 7 B 0(0) 0(0) 1(0) 6 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B 5(3) 5(3) 6(4) 11 B A B 1.5(0) 1.5(0) A 7(5) 7(5) 8(6) 13 B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 A Hs 22.5 25 28.5 32.5 Hs 25 27.5 31

VCL

Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size A B C D E F H K L M N Model Note) Note) Q R Q R Q R S Q R S U 22 (23) 45 (52) 44 43 58 40.5 46.5 99 43 66 83 13.5 28 64 31 6.5 12.5 27 14 12.8 M4 4.5 1/8 VCL21 22 (23) 46 (53) 44 44 58 41.5 46.5 99 44 66 86 18 36 67.5 31 8.5 12.5 27 18 12.8 M4 6 1/4 24 (25) 56.5 (63.5) 46 54.5 60 52 48.5 101 54.5 68 99 22

VZ5000

Round head combination screw Round head combination screw ( ) M3 x 47 With spring washer ( ) M3 x 31 With spring washer Adapter plate assembly DXT201-3-1A Round head combination screw ( ) M3 x 31 With spring washer Gasket Individual EXH spacer Applicable base VV5Z5-20 VV5Z5-21 VV5Z5-21P (EXH port) 2-Rc 1/8 Gasket Gasket Round head combination screw Applicable base VV5Z5-20 VV5Z5-21 ( ) M3

VS7-6

34 27 27 40 31 60 mm2 P A P B A EA B EB VFS Air exhaust side eff. area S (P2=0.5MPa) VS 53 mm2 Note 1) Maximum operating pressure of solenoid valve is 0.9 MPa.

2-Color Display

.: ZS-27-D) 42.4 11 17.8 8 9.5 33.5 33.5 Panel thickness 0.5 to 6 8 2-Color Display High-Precision Digital Pressure Switch Series ZSE30A(F)/ISE30A Panel-cut dimensions 1 pc. mounting Multiple (2 pcs. or more) horizontal mounting 31 0 0.4 31 x n pcs. + 3.5 x (n pcs. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less 24 or more Multiple (2 pcs. or more) vertical mounting 31 0 0.4 24 or more

Fieldbus System

(For DIN rail mounting) 4(A) port side : Blue (For rubber seal) : Gray (For metal seal) 2(B) port side: Yellow Communication connector (DIN rail) Light/surge voltage suppressor Power connector Marker groove 0 1 (5.5) B A B A B A B A B A (35) 3 2 14 A 14 A 14 A 14 A A 14 90 128.8 115 96.7 (77.1) 5.5 0 1 5 4 PWR 2 3 FE terminal PCI BUS OUT BUS IN (8) 75.8 7 8 B 12 B 12 B 12 B 12 12 B 22.8 31

155

29 14.5 103.3 111.3 155.8 26 26 52 4.5 44.5 25 26.3 115 74.2 1/2 63 49.6 29 14.5 103.3 111.3 155.8 26 26 52 4.5 44.5 25 26.3 115 74.2 3/4 80 59 35 17.5 112 120.5 165 35 31 62 5.5 48 30 31 124.2 80.1 1 90 74 44 22 135.9 144.5 189 40 36 72 6.5 60 35 39.5 148.2 91.1 382 Coolant Valve Series SGC Dimensions External pilot solenoid type (DIN terminal) PP J Pilot port 2 x 1/8" (Back side PE: Filter

10

The KQ2 series information can be downloaded from the following SMC website, http://www.smcworld.com 6, 8 8, 10 10, 12 53.5 66 68 29 36 37 65.5 (71.5) 76.5 (84.5) 84 (92) 30 35 40 13.5 15 16.5 20 22 24.5 22 27 31 52 62 67 26 31 33.5 30 35 40 Electrical entry Size One-touch fitting P Grommet Grommet (with surge voltage suppressor) DIN terminal Conduit terminal Q 42.5 (48) 51 (59) 56.5 (64.5

VQ7-6/7-8

(Values at the initial period) (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-23 Series VQ7-8 DIN Terminal Type 2 position single : VQ7-8-FG-S single (Reverse pressure): VQ7-8-YZ-S 154 154 71.5 82.5 82.5 56(71) 56(71) 49(64) 49(64) 16(20)(B port) 16(20)(A port) 31(42) 31(42) Mounting hole 2-7.5 P R2 R1 Manual

17

50 100 101 200 300 1.1 (0.5) 10 20 30 31 50 100 101 200 300 Stroke (mm) Stroke (mm) MGPL32 to 63, MGPA32 to 63 MGPL32 to 63, MGPA32 to 63 110 (50) 110 (50) Load mass m lbs (kg) Load mass m lbs (kg) 50,63 50,63 50,63 50,63 50,63 32,40 32,40 32,40 32,40 22 (10) 22 (10) 50,63 32,40 32,40 11 (5) 10 20 30 40 51 50 100 101 300 200 11 (5) 10 20 30 40 51 50 100 101 300 200 Stroke (mm) Stroke (mm

AC Servo Motor Driver (CC-Link Type)

(When the point table occupies 1 station, a maximum of 31 points are usable. 255 points become usable when 2 stations are occupied.)

OMS0020

Card Motor Controller Operation Examples. 31 6.1 Basic Settings, I/O Configuration . 31 6.2 Step Data Configuration . 31 6.3 Operation Data Acquisition . 32 6.4 Operation Instruction Method . 32 6.5 Program Examples . 33 (1) Basic Settings . 33 (2) Communication check . 33 (3) Step Data Configuration Examples . 33 (4) Return to Origin . 34 2 (5) Positioning Operation (Step Data Operation)