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a %silrc q"s cAT.ES60-15o Electro-Pneumatic Regu lator Sensitivitfo;, 2 Xp^(l00 kpa speciricarions) Linearity: Within *,tg6-{f.S.)

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KQ2C Caps P Plugs Q Cartridge KR Fitting Boot . . . . . . . .6 .7 .7 .7 P .8 .8 .9 .9 o 't0 1 0 1 0 1 1 1 1 1 1 1 2 Spucial [nnlhunilions Page 14 IIU lrlylon lltliltg Page 15 Bmss Phe tittittg$ pase N i p p l e s . . . . . . . . . 1 7 Cdinlinars -. -14 Bushings Aalaolers 1 8 '18 1 q Ts6s .20 .20 Pftr^q 21 SAE 45" Flares . -..22-23 .24 General Assembly..,.. lmoortant Oo's and Dont's Chemical

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7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: SM.9.

PF2D

1 q t i 10 FKM O-ring PF2D540 o !0 u !0 !2ywr e 11 Stainless steel 304 Thread 12 PVC Lead wire !

TABLE OF CONTENTS

AVAILABLE OPTIONS OPTION SERIES HOUSING & COIL OPTIONS CODE 15 20 30 50 70 COMMENTS Strain Relief Connector Q Standard no-molded Others Consult Factory Single Automotive AS Requires potting Consult Factory Double Automotive AD Requires potting Consult Factory AN Connector (2 Wire) S Recommended potting/other option Consult Factory J.I.C.

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

5 o y i q t u !0 !1 e w r !3 !8 !7 @3 @0 !9 @4 @1 @2 @6 @5 @7 @8 LVM No.

Electro-Pneumatic Proportional Valve Series VEF/VEP

flow Q: Air flow rate [L/mi (ANR)] P: Valve-inlet pressure [MPa] S : Effective area [mm2] t : Temperature [C] 293 273 + t Q = 120 x S (P + 0.1) 888 Series VEF/VEP Electro-Pneumatic Proportional Valve Pressure Type: VEP Diagram of Working Principle Flow Characteristics Current-Pressure Characteristics The horizontal axis of the characteristics represents the output amperage of the power

VER2000/4000

Subsonic flow at P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P (P2 + 0.1013) Sonic flow of P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area [mm2] P: Amount of pressure drop P1 P2 [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Cylinder stroke (st/mm) Applicable area Unapplicable area Outlet pressure (MPa) Outlet pressure

125

r y u y r t Port 23(P2) (Pilot air port) Port 12(P1) (Pilot air port) e t w t Port 3(R) e r Port 3 (R) Port 2 (A) Port 1 (P) Port 23(P2) (Pilot air port) y i Port 2(A) u r y Port 1(P) t q VEX3320 (Air operated) VEX3420 (Air operated) w e q r y y t w r e u t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No

EX500

SI Unit Dimensions / Parts Description EX500-S001 Position indicator LED 79.4 28.6 68.5 Branch connector (M12, 8 pins, socket) Branch connector (M12, 8 pins, plug) 54.5 39 15.5 1687 Series EX500 How to Order SI Unit SI Unit EX500 Q 0 1 0 VQC1000/2000/4000 S0700 Applicable solenoid valve: VQC/S0700 series SI unit COM. 0 1 +COM. COM.

Air Checker:

R06 L PS 00 10 Option (CE-compliant ) Output specifications Nil None 10 11 12 For positive pressure Q CE-compliant For vacuum and residual pressure The PS1200 series is CEFor vacuum compliant (with Q) only.

Air Slide Table/Long Stroke Type Series MXY

H Section AA TH (Head height of mounting bolt) +0.03 0 RL 10 10 T TB +0.03 0 R RH Detail of part U Q QL (n x 1) x Q B -Mounting reference planes D PR PR max18 B B PH PH Type of centralized piping on one side without switch rail Type of shock absorber (Only for MXY12) FH FW MA L LA M HR J JH F FL H HA MM MB Model M5 x 0.8 (Width across flats 2.5) MXY6 24 8.5 32 28 M3 x 0.5 18 0.5 60 20 3 12

Pressure Switch/Reed Switch Type

Place them in alphanumerical order. q e w Switch Characteristics Description Symbol Example) IS10-N01-6PZ Nil N Rc NPT q q Thread type Max. contact capacity AC 2 A, DC 2 W 24 V or less Note 1) Set pressure range of 6P(L, Z) is 0.2 to 0.6 MPa (30 to 90 psi). This product is for overseas use only according to the new Measurement Law.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Electric Gripper 2-Finger Type LEHZ10, 16, 20, 25, 32, 40 Series LEHZ ® Step Motor (Servo/24 VDC)

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEL25 Series LEL Electric Actuator/Guide Rod Slider Belt Drive Step Motor (Servo/24 VDC)

q Check the actuator label for model number. This matches the controller. w Check Parallel I/O configuration matches (NPN or PNP).

How to Order LER10, 30, 50 Series LER Step Motor (Servo/24 VDC) Electric Rotary Table ®

Step Motor (Servo/24 VDC) Electric Rotary Table How to Order LER10, 30, 50 Series LER RoHS LER 10 1 1 S K 6N q w e r t y u i o !

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/ Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5 (Made to Order) Series LEY25, 32

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O conguration matches (NPN or PNP). q w Refer to the operation manual for using the products.

AP10PA

w q w q 1) Refer to gauge guide (P.1058) for gauge specifications.