125

override (Light/surge voltage suppressor) 45 34 + + 36 30 Foot bracket assembly (Option) 22 45 54 60 66 60.4 49.1 L plug connector Sol.b Silencer (for PE) (Option) 29.8 Grommet Sol.a M5 (Port PE/Pilot exhaust) M plug connector VEX3321: 1/8 VEX3322: 1/8 Plug (Port P1/Pilot air) 3 x 1/4, 3/8, 1/2 [Port 1(P), 2(A), 3(R)] A B PE 8.25 121.9 112.1 104.9 R 3 84.5 P1 15 30 30 15 60 52.5 P 1 A 2 30 33

MHQG2

MHR MHQJ2-25S 14 25 49 643 Single acting MHQJ2-10C 4 MHK 10 7.8 90 6 MHQJ2-16C 16 26 181 Normally closed MHS 10 MHQJ2-20C 20 33 342 14 MHQJ2-25C 25 49 643 MHC Note 1) Values at the pressure of 0.5 MPa.

VZ3000

stations 00F VK Rc 1/8 00N NPTF 00T VZ Rc 1/8 3/5 (R) port Adapter plate assembly DXT200-3-2A Flat Ribbon Cable Type 20P How to Order Applicable solenoid valve VF 1 3 5 6 M5 C4 C6 VZ323MOZVFR VV5Z3 05 20P Applicable blanking plate assembly DXT192-13-3A Applicable connector assembly DXT192-52-1-A (For 2 position single) DXT192-52-2-A (For 2 position double, 3 position) Refer to the page 3-10-33

3 Port Solenoid Valve Rubber Seal Series SY100

.: SY100-77-1A Round head combination screw SY100-33-1 (M1.7 x 13, matt nickel plated) Round head combination screw SY100-33-2 (M1.7 x 7, matt nickel plated) Blanking plate A SY100-77-1 Gasket VJ100-20-2 VJ100-6-10 Gasket VJ100-6-8 Gasket Applicable base Sub-plate Type SS3Y1-30 Type SS3Y1-31 Type SS3Y1-S41 Applicable base Sub-plate (For body ported type) SS3Y1-30 type SS3Y1-31 type Applicable

EX120/121/122

Considering influence of noise, etc. from outside source to the Analog Input Unit, when connecting a sensor that has ground connected at one end (SMC sensor uses this method), please connect sensors ground line to unit connectors Input () terminal. 33 Fieldbus System Series EX600 Analog Characteristics Offset Binary Data Format AD value AD value AD value 63976 (F9E8) 3901 (F3D) 3868 (F1C)

Valve Single Unit

A: Orange B: Green A: Orange B: Green (Mounting hole) (Mounting hole) Polarity M5 x 0.8 M5 x 0.8 indication (External pilot port) (Light/Surge voltage suppressor) (External pilot port) (Light/Surge voltage suppressor) 300 (Lead wire length) Polarity indication (Lead wire length) 300 (Piping port) (Piping port) 1-6-33 Base Mounted Series SX3000/5000/7000 Dimensions: Series SX3000 3 position

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 Double clevis style (D): CJ5DS R V CDH9 + 0.030 0 NB GA 0.030 0.060 Clevis pin ( ) Cdd9 Piping port 2 x M5 x 0.8 GB MM CB CA D 0 0.3 0 0.3 BA BB NA A + 0.2 + 0.1 CX 0 0.3 U BA H S + Stroke Z + Stroke ZZ + Stroke R 0 0.3 BB (mm) CD (Cd) A BA BB CA CB CX D GA

H/DL/L/LL

(mm) Connection threads R Model M Effective area (mm 2) Weight (g) A L1 L2 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DT04-01 15 5.7 33 DT04-02 17 19 4 10 10 23.5 19.6 40 2-applicable tubing DT06-01 35 17 19.6 10 23.5 DT06-02 16 6 19 44 14 14 12 DT06-03 22 70 26.5 24.5 21.6 22.6 24.5 25.8 24.5 29.4 29.6 30.3 29.4 120 Reference dimensions after R thread installation.

Silencer Series AN

AN AMC Flow Characteristics (Initial conditions) Model A B D Dimensions (mm) AN202 to 402 Model Effective area (mm2) Weight (g) Port size R Recommended flow (m3/min (ANR)) 3 or less 5 or less 8 or less 1 4 3 8 1 2 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 1 AN302-03 60 AN402-04 90 0.5 Inlet pressure (MPa) Noise level (dB (A)) Construction/Parts/Dimensions 0.2 0.1 AN302/402 AN202 0.05

KJ

(mm) Applicable fitting size d 4 6 6 Applicable tubing Note) Weight (g) Model D L A M KJR23-04 KJR23-06 KJR04-06 8.4 32 33 19.3 19.5 33.5 9.3 0.9 1.1 1.3 Note) D: Max. diameter 3.2 12.7 3 2.5 4 20 12.7 4 4 Applicable fitting Bulkhead Union: KJE H (width across flats) Effective area (mm2) Applicable tubing O.D.

Compact Proportional Solenoid Valve Series PVQ

ARM 31 16 01 5 G PVQ Body ported ARP Base mounted 33 16 01 5 G PVQ IR IRV Symbol Body / (Sub-plate) Seal material Valve type Seal Body 33 N.C. VEX1 Nil H C37 Stainless steel FKM Voltage SRH 5 6 24 VDC Thread type (with sub-plate) 12 VDC SRP Nil F N T Rc Electrical entry: Grommet G SRF NPT NPTF Orifice size ARX20 Port size Orifice dia.

Air Slide Table/Long Stroke Type Series MXY

O-ring 27 10 Wear ring A Resin NBR O-ring 28 11 Wear ring B Resin Rubber stopper NBR Adjustment bumper 29 12 Spacer Brass Polyurethane Electroless nickel plated Plug 30 13 Magnet A Electroless nickel plated Brass Nickel plated Switch rail 31 14 Magnet B Hard anodized Aluminium alloy Nickel plated Stud 32 15 Yoke A Steel Electroless nickel plated Brass Electroless nickel plated Gasket 33

ISG

29 9 33 29 9 26 99 79 79 99 126 R 3/8 R 3/8 126 JIS F 8801 A type 20a Cable gland JIS F 8801 A type 20a Cable gland 16-9-7 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Process Valve: 2 Port Valve For Flow Control VNB Series

Symbol Electrical entry Valve size 1 to 4 Valve size 5 to 7 7 50 2B 50F 33 50 Flange G GS E EZ T TZ D DZ Grommet Grommet with surge voltage suppressor Grommet terminal Grommet terminal with light/surge voltage suppressor Conduit terminal Conduit terminal with light/surge voltage suppressor DIN terminal DIN terminal with light/surge voltage suppressor Note 1) Air operated only Note 2) The

VS7-6 How to Order E Q VS7 6 FG S 1 Symbol Option Connector Rated voltage Port size of sub-plate Number of solenoid Single — Without sub-plate None 100V AC 1 S — — Connector SV ∗ Indicator light 1 4 A02 200V AC 2 0 N Double D FG Side piping FJG W/o conn

Protective class class I (Mark: ) Option VK Ordering source area code Note: Manifold exploded view see page 1.19-33 for details. Code Japan, Asia Australia areas VZ VF E Europe N North America VFR Precautions VP7 Be sure to read before handling. Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

Air Cylinder/With End Lock Series CBA2

Contents Bore size (mm) #0 #1 #2 33 #4 35 #6 Single end lock Rod seal NBR Piston seal MBB40-PS NBR 40 50 63 80 100 MBB40-PS MBB50-PS MBB63-PS MBB80-PS MBB100-PS MBB50-PS 33 and 35 are non-replaceable parts, so they are not included in the seal kit. Cylinder tube gasket NBR Set of left nos. #0, #1, #2, #4, #6.

Large Capacity Compressed Air Filters Series AFW

1,214 AFW11200-N100FGM-E* 11,200 61 43.20 24 18 33 1,214 AFW12600-N100FGM-E* 12,600 C C/F C/F C/F 23 C/F C/F 12 AFW16100-N120FGM-E* 16,100 1) Specify filtration grade by replacing; *: 5 = 5m; 1 = 1m; A = 0.01 m; C = activated carbon Technical Notes Correction Factor Threaded & Flanged Operating pressure Correction factor 1.

Speed Controller: Standard Type Series AS In-line Type

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

Plug-in/Plug Lead: Single Unit

75 29 Effective area at supply side (mm2) S at P1 = 0.7 MPa/P2 = 0.5 MPa 0.5 P B 64 33 28 0.4 A EA 36 75 78 Effective area at exhaust side (mm2) S at P2 = 0.5 MPa 0.3 B EB 68 38 69 0.2 Note 1) Set the pressure within the operating pressure range of the solenoid valve.

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note