0.5

in 1 m increments from 1 m to 20 m.

IDX-OM-V020

IDX-OM-V020 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 BEFORE USING AIR DRYER. 1-1 1.1.1 Danger, Warning and Caution . 1-1 1.2 HAZARD CLASSIFICATIONS/ HAZARD WARNING LABELS . 1-2 1.2.1 Hazard of Electricity . 1-2 1.2.2 Hazard of Hot Surface . 1-2 1.2.3 Danger of Compressed Air Circuit . 1-2 1.2.4 Positions of Hazard Warning labels . 1-3 1.2.5 Product label . 1-4 1.3 WASTE DISPOSAL

IDX-OM-U010

IDX-OM-U010 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 BEFORE USING AIR DRYER. . 1-1 1.1.1 Danger, Warning and Caution . 1-1 1.2 HAZARD CLASSIFICATIONS/ HAZARD WARNING LABELS . 1-2 1.2.1 Hazard of Electricity . 1-2 1.2.2 Hazard of Hot Surface . 1-2 1.2.3 Danger of Compressed Air Circuit . 1-2 1.2.4 Positions of Hazard Warning labels . 1-3 1.2.5 Product label . 1-4 1.3 WASTE

PSxx-OMS0006CN

No.PS-OMS0006CN-G / / ZSE20(F) ISE20 2 8 10 11 14 14 16 18 [] 20 21 3 22 24 26 26 26 F0 28 F1 OUT1 29 F3 32 F4 33 F6 35 F10 36 F11 41 F80 42 F81 43 F82 45 F90 46 F98 48 F99 49 50 54 54 55 62 62 64 -1No.PS-OMS0006CN-G *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

VXA31/32

VX VX3 VXA VN LVC LVA LVH LVD LVQ Variations LQ LVN TI/ TIL Pilot port " ## Valve PA , 1 & ' (!)* (!+ $ $!%! PAX PB Model %# & 0 & VXA3114 VXA3124 VXA3134 VXA3224 VXA3234 VXA3244 , 1 , / , 1 , / , 1 , / , / . 1 , / . 1 , / . 1 ,!* )!).)!)./ Material 17-3-101 The VX series will be revised shortly.

Ionizer Nozzle type IZN10 Series IZS

Tube I.D.: 5 mm 5 5 4 4 Discharge time [s] Discharge time [s] 3 3 0.05 MPa 0.05 MPa 2 2 0.1 MPa 0.3 MPa 1 1 0.1 MPa 0 0 0 100 200 300 400 500 0 100 200 300 400 500 Tube length [mm] Tube length [mm] Maximum operating pressure is 0.1 MPa. Note 1) Maximum operating pressure is 0.3 MPa. Note 1) Note 1) Refer to Cautions when using the IZN10-11(female threads for piping) on page 448.

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

Modular Type Lubricator Series AL

With bracket B With float switch B 374 383 383 382 385 C E Model Port size H 25 18 16 35 35 P 47 47 AL30 AL40 AL40-06 AL50 AL60 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 324 333 333 332 335 38 40 38 41 45 53 70 75 90 95 54

ZSE40/ISE40

24 VDC 12 to 24 VDC Load Load DC () (Blue) DC () (Blue) 16-2-18 5 Series ZSE40/ISE40 High Precision, Digital Pressure Switch Description 3 1/2-digit LED kPa Displays present pressure.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Specifications 3-1.

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

VND

8 1 4 1 4 VND50D-32A VND60D-40A VND70D-50A 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 LVA LVH LVD Port size Flange: 32F, 40F, 50F LVQ J (Valve open) LQ Indicator (Option) LVN Pilot port TI/ TIL PA PAX PB 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H J Model 8 10 12 50 40 32 1 8 1 4 1 4 VND50D-32F VND60D

Support Guide/11-LEFG Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

PA3145/3165/3185

Rc 1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc A Model Mounting hole C D E F G H K L B J 3 8 1 2 3 4 VPA3145 71 3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

3 Port Air Operated Valve VPA3145/3165/3185 Series

VZA 3 x Rc Pilot port 1 8 VTA VGA VPA VPA3 VPA3 2 x Mounting hole Port size Rc (EXH port) Port size 2 x Rc (IN, OUT port) Port size Rc Model Mounting hole IN, OUT EXH A B C D E F G H J K L 3 8 1 2 3 4 VPA3145 71 3 4 8.5 85 14 52 55 93 32 87.4 36 71 80 3 4 VPA3165 82.6 1 4 8.5 1 110 17 68 75 118 45 113 36 71 95 1 1 4 1 1 1 1 4 1 2 VPA3185 118 13 2 132 14 80 95 140 52 140 41 81 105 2 1575

Electro-Pneumatic Positioner Series IP8000/8100

Within 1%F.S. Within 2%F.S. Within 0.75%F.S. Within 1%F.S. Within 0.5%F.S.

Vacuum Regulator Series IRV

U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60

Large blow and

4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--X185 4 1 M4 x 0.7 8 400 200 250 119.5 55 32 15 19.5 23.5 111 48 56 48 4.5 56.5

Model: SV2000, Valve Manifold Stations: 18

Model: SV4000, Valve Manifold Stations: 18