5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

N1: 1/8 N3: 5/32 N7: 1/4 Y Note 2) Note 1) When specifying two or more options, enter symbols in alphabetical order.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

) 10% or less (With power supply polarity protection) 55 mA or less (at no load) NPN or PNP open collector output: 1 output 80 mA 30 V (With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3) Yes 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

10% or less (With power supply polarity protection) 55 mA or less (at no load) NPN or PNP open collector output: 1 output 80 mA 30 V (With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3) Yes 1% F.S.

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1 !2 q w e r t y !1 !0 o i u Component Parts No.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 1 A single controller monitors 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 Space saving 1 40mm MPa kPa OUT1 76% OUT2 CH 1 2 3 4 PRESSURE SET reduction

240

1 t !

AR Series Modular Type Regulator

16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 43.9 5.4 15.4 55 2.3 27.3 36.5 17.5 6 AR25-A 1/4, 3/8 1/8 53 70.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 44.3 5.4 15.4 55 2.3 30.3 36.5 17.5 6 AR30-A 1/4, 3/8 1/8 53 83.5 27 28.5 M45 x 1.5 28.5 37.5 65 37.5 66 41 36 46 6.5 24 65 2.3 32.5

AR20-B to AR60-B

C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1 28.5 2 Note 2) 28 29.5 27.8 40 37.5 65 37.5 66 AR25(K)-B 1/4, 3/8 1/8 53 71.9 28 27.5 M32 x 1.5 27.5 0 28 28.5 27.8 39 37.5 64 37.5 65 AR30(K)-B 1/4, 3/8 1/8 53 85.6 30.7 29.4 M38 x 1.5 29.4 3.5 28 30.4 27.8 40.9 37.5 65.9 37.5 66.9 AR40(K)-B 1/4, 3/8, 1/2

ISE70/75/75H

Note 1) G1/4: Applicable to ISO1179-1 With bracket Output 43 Fixed setting: NPN open collector 1 output (Pin no. 4) + PNP open collector 1 output (Pin no. 2) A 2 1 65 PNP open collector 1 output (Pin no. 4) 4 3 Note) Mounting screws are not included.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3652 & 4652 1.50 (38) 2.17 (55) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: 4T, 6T Connections: N, BRN Connections: 4, 6, BR 4 6 4 6 4 6 25.4 45 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70 (43.2) NPT 1/4

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Mey = 1/3 x 3.36 x 9.8 x (50+19)/1000 = 0.76 We = 3.36 A3 = 19 Obtain Meay = 4.2 from Va = 420 in Graph (2). 2' = 0.76/4.2 = 0.18 pitch, yaw moment: Graph (2) 2 = Me/Mea Meay Nm 4.2 420 V mm/s 3-3 Sum of the Load Factors 1 + 2 + 2' = Applicable because 0.008 + 0.15 + 0.18 = 0.34 < 1 Use is possible if the sum of the load factors does not exceed 1. 1 + 2 < 1 8-9-6 6 Model Selection Series

VHS20/30/40/50

A OUT IN A OUT IN 1 2 B 3 B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 5-8-22 5 Series VHS Specific Product Precautions Be sure to read before handling.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

-Y/Yaskawa Electric Corporation (for motor)2 MR-JCCBL5M (for encoder) LJ1-1-R05 6 160 5 6 DP9320081-2 (for motor) DP9320089-2 (for encoder) LJ1-1-Y053 DP9320083-2 (for motor/brake) DP9320089-2 (for encoder) LJ1-1-Y05B 149 LXF (AC servomotor by Mitsubishi Electric Corporation) Model Manufacturer part no.

Process Gas Diaphragm Valve

Maximum operating pressure 125 psig (0.9 MPa) Size Port AZ3 AZ4 Connections Code 2P 542 2P 2PW 2PW 1/4 inch face seal (Male) 1) 1/4 inch face seal (Female) 1/4 inch tube weld 3/8 inch face seal (Male) 1) 3/8 inch face seal (Female) 3/8 inch tube weld 1/2 inch tube weld MV4 FV4 TW4 MV6 FV6 TW6 TW8 Material Body material 316L SS Code S Ports Code Ports Connection Machined Welded 2P 2PW

IC

VY1 G Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

L3 Max. 1 4 1 2 L1 L2 D Min. L3 Max. Model Port size Model Port size 120 150 AS800 AS900 1 1 , 2 74 93 204 262 192 250 80 94 AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 15-9-33

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

A OUT IN A OUT IN 1 2 3 B B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3