CXT

16 20 25 32 40 5.5 6 2.5 0.5 1 1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5 10 7.5 0 0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5(4) 4.5 5 9 10 11 15 2(4.5) Bore size (mm) 1.5(1) 3.5(1) 3(0.5) 5.5(3) Long stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5(2.5) 8 8.5 12 13 11.5 15 10

Series AP500

Specifications AP501mmA 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) AP510 1 to 100 psig (0.007 to 0.7 MPa) AP506 1 to 60 psig (0.007 to 0.4 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.06 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 563 Series VQ1000/2000 1021Construction Directional Control Valves Air Grippers Modular F.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 563 Series VQ1000/2000 1021Construction Directional Control Valves Air Grippers Modular F.

Wedge Cam Operation Gripper Series MHK2

0.4MPa 0.5MPa 0.6MPa 40 20 20 40 0.6MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Holding point L mm Holding point L mm Holding point L mm Holding point L mm Note) Distance to the holding point L of single acting type is shorten by spring return.

Nozzle Type Ionizer

8 5 Width across flats 12 10.6 17 Nozzle Type Ionizer IZN10E Series Dimensions L-bracket IZN10-B1 17 (Mounting angle adjustable range) 40 2 x M3 7.5 2 x 3.4 2 x R10 25 5 40 50 Internal mounting 2 x 3.4 20.5 33 30 30 52 46 44 26 17 11 26 12 8 x 3.4 2 x Hexagon socket head cap screw M3 x 6 (Accessory) 40 5 22.7 Internal mounting Pivot mounting 21 33 30 (Mounting angle adjustable range) (83)

Round Type Low Pressure Hydraulic Cylinder Series CH
M

7.5 M14 x 1.5 13 36 21 40 34 f8 to 800 24 60 24 41 18 21 9 9 66 36 84 14 11 54 10 11 48 7.5 M16 x 1.5 19 44 21 (mm) Bore size (mm) P NB NC NN S ZZ 20 19 15 M22 x 1.5 1/8 81 138 25 19 15 M24 x 1.5 1/8 81 143 32 M30 x 1.5 19 15 1/8 87 159 40 1/4 M33 x 2 24 21 108 183 50 Series CHM Dimensions Rear flange type: CHMG GA N Rc P 2-NN Width across flats B2 H2 GB N Rc P 4-FD H1 Width across flats

CEx-OMG0106

Solenoid Valve Wiring 36 Chapter 10: Timing Chart 3744 Chapter 11: Data Setting 11-1. Data Presetting 11-1-1. Data Classification & Content 45 11-1-2. Input Method 4548 11-1-3. Confirmation of Set Data 48 11-2. Program Setting 11-2-1. Input Method 4952 11-2-2. Confirmation of Input Data 52 11-3. Selection of Dip Switch 53 Chapter 12: Driving 12-1.

JXCx-OMU0026

Procedures to Trial run . 10 3.1 Checking the contents of the package . 10 3.2 Mounting the controller . 11 3.3 Install the setting software and the driver . 11 3.4 Wiring and connection . 11 3.5 Power supply, Start-up of controller setting software, setting date and time, Alarm and error check . 11 (1) Supplying power . 11 (2) Start-up of controller setting software . 12 (3) Setting date

JXCx-OMT0062

0 1 0 0 0 0 16 10 0 0 0 1 0 0 0 1 17 11 0 0 0 1 1 1 1 0 30 1E 0 0 0 1 1 1 1 1 31 1F 0 0 1 0 0 0 0 0 32 20 0 0 1 0 0 0 0 1 33 21 0 0 1 1 1 1 1 0 62 3E 0 0 1 1 1 1 1 1 63 3F 0 1 0 0 0 0 0 0 64 40 0 1 0 0 0 0 0 1 65 41 0 1 1 1 1 1 1 0 126 7E 0 1 1 1 1 1 1 1 127 7F 1 0 0 0 0 0 0 0 128 80 1 0 0 0 0 0 0 1 129 81 1 1 1 1 1 1 1 0 254 FE 1 1 1 1 1 1 1 1 255 FF 110 - 22.3 Installation Remote register

3 Port Solenoid Valve/

Symbol M12 connector pin number Wiring specication G1/2 terminal number Wiring specication r w (32) (12) (11) q 12 11 (12) e w w (31) e (31) (11) r q 32 31 q e (32) r VP542(R)/742(R)-X536 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) Safety limit

3 Port Solenoid Valve/

M12 connector pin number G1/2 terminal number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) r (32) w (12) r (32) w (12) r (32) w (12) 3(R) (31) e (11) q 3(R) (31) e (11) q 3(R) (31) e (11) q 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal

Compact Slide Series MXH

20 1 MXS 20 16 16 0.1 0.01 MXQ 10 10 6 6 MXF 0.01 0.001 0.1 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 MXW Overhang L (mm) Overhang L (mm) Overhang L (mm) MXJ Graph (5) Load Eccentricity 100 mm Graph (8) Load Eccentricity 100 mm Graph (11) Load Eccentricity 100 mm MXP 1 10 10 MXY Mass m (kg) 0.1 MTS 1 Mass m (kg) Mass m (kg) 20 16 10 6 1 20 20 16 10 16 0.01 0.1 10 6 6 0.001 0.1

One-touch Fittings Series KQ2

D L Q M Urethane 2.9 6.4 13.4 Nylon 3.4 6.4 13.4 3.2 4 6 KQ2T23-00 KQ2T04-00 KQ2T06-00 5 8 11 9.6 10.4 12.8 17.5 18 20 4.3 4.5 5.3 15.5 16 17 8 KQ2T08-00 15.2 23 6 18.5 25.6 17.7 16 10 KQ2T10-00 18.5 26.5 6.8 21 40 28.4 25 12 KQ2T12-00 20.9 28.5 7.5 22 57.4 45.4 29 16 KQ2T16-00 26.5 34 10 25 100 (84) 40 Note) ( ): Values for soft nylon.

45

to 20 stations: W = 22n + 140 2 to 10 stations: W = 47n + 156 11 to 20 stations: W = 47n + 190 Manifold base weight W (g) n: Stations Note) For more than 11 stations, supply pressure to P port on both sides and exhaust from R port on both sides.

JCRB-OM00003

20, 30, 40) Component Parts No.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30 L/min

CE2

50 63 80 100 25 to 850 25 to 700 45 30 10 10 10 54 32 26 11 22 20 44 16 11 15 6 27 71.5 60 42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78

IDU/IDF

(C) IDF 1D 30 35 40 50 25 IDF 2D to 240D 30 35 40 45 50 Outlet air press. dew point (C) Ambient temp.

ZQ-OM01401

ZQ-OM01401-B / / ZQA No.ZQ-OM01401-B 2 1. 5 2. 9 3. 11 3.1. 11 3.2. 12 3.3. 13 3.4. 14 3.5. 16 4. 17 5. 19 6. 20 7. 21 8. 28 9. 32 10. 35 11. 37 12. 40 13. 42 1 - No.ZQ-OM01401-B /ZQA *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery