HAW

AFF 17 36 40 45 5 5 AM 0.03 0.03 0.06 0.002 Even heat exchange Sharp edge of flower fin causes air turbulence resulting in even heat exchange and high cooling efficiency.

Series 10-, 21- AW-B Filter Regulator

Clearance for maintenance G 1/4 Drain E CC A AW60-B 1021S N T D J J M U Applicable tubing 6/4 R C Q BB K H IN OUT P2 Pressure gauge (Option) 2 x P1 (Port size) (Pressure gauge port size) B Hexagon width across flats 17 Clearance for maintenance G 1/4 Drain E A CC Metal bowl 10-/21-AW20-B 10-/21-AW30-B to 60-B Semi-standard specifications Applicable model Model With bowl guard Metal bowl

Coolant Valve

(mm) Model Conversion Cv 1.2 1.3 1.5 3.9 5.0 4.5 5.8 7.0 11 9.1 15 17 23 17 23 26 34 30 40 41 62 41 66 49 70 73 100 Threaded Note) Flange Kv VNC1-6A VNC1-8A VNC1-10A VNC24-10A VNC2-10A VNC24-15A VNC2-15A VNC34-20A VNC3-20A VNC44-25A VNC4-25A VNC54-32A VNC5-32A VNC54-32F VNC5-32F VNC64-40A VNC6-40A VNC64-40F VNC6-40F VNC74-50A VNC7-50A VNC74-50F VNC7-50F 1 8 1 4 1.1 1.1 1.3 3.4 4.3 3.9 5.0

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet A J 3 30 17 M6 x 0.75 10 8 5 4 6 37 20 14 N S U F GN GS ZP3 Y 015 02 035 U B3 K 3 34 17 M8 x 0.75 11 10 7 6 6 40.5 20 14.5 13 B Dimensions Per Vacuum Inlet: One-touch Fitting 7 Model H J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

ML2B

For details, refer to page 10-20-41. Reed switch D-X 20Data 10-13-17

ML2B

For details, refer to page 10-20-41. Reed switch D-X 20Data 10-13-17

Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

25

IZS 41 IZS 42 IZF Sensor not connected Offset voltage (V) 30 Total number of ionizers that may be connected IZS41: Max. 8 units. IZS42: Max. 5 units.

PFxx-OMU0002

Peak/ Bottom value reset: A function to clear the peak value or bottom value when an external input signal is applied. 41 No.PF-OMU0002-D Display [F_5] by pressing or button in function selection mode. Press the S button. Move on to select FUNC.

LUBRICATOR

HOW TO ORDER" (P7). 17 9. REPLACEMENT PROCEDURE WARNING Before replacement, ensure that the lubricator is not pressurized. Replace refering to "10. DISASSEMBLY DRAWING" P22 to P25.

Low torque Metal seal type Rotary joint

counter bore 5 4-3.2 through P.C.D.48 4-8 counter bore 5.5 4-4.5 through32 drill through 4-4.5 through 2-4.2 through 3 *at 2 points 27 drill through 45 25 R4 R4 45 3.5 (43) 41 5 (55) 7 45 ( 50) 46.5 4 Series MQR Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

3 Port Solenoid Valve/

Applicable models Page 17 VP544/744-X538 VP544/744-X555 Please contact SMC for the VP542/742-X536.

10

Leakage Rate.12 How to Order (Solenoid Valve for Manifold, Manifold Base), Blanking Plate Assembly Part No., How to Order Manifold Assembly (Example).13 For Water Model/Valve Specifications, Fluid and Ambient Temperature, Valve Leakage Rate.14 How to Order (Single Unit).15 For Oil Model/Valve Specifications, Fluid and Ambient Temperature, Valve Leakage Rate.16 How to Order (Single Unit).17

ZB-OM00301

No.ZB-OM00301 / ZB No.ZB-OM00301 2 9 12 13 15 16 16 V Assy 17 21 25 26 28 28 29 30 30 31 31 32 35 37 38 39 40 Assy 40 Assy 41 42 1 - No.ZB-OM00301 1) (ISO/IEC) (JIS) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

PSxx-OMU0008CN

No.PS-OMU0008CN-D // ZSE20C(F) ISE20C(H) 2 9 11 12 16 16 19 21 [] 24 25 3 26 28 30 30 30 F0 32 F1 OUT1 33 F2 OUT2 36 F3 38 F4 39 F5 FUNC 41 F6 43 F10 44 F11 50 F80 51 F81 52 F82 54 F90 55 F96 57 F97 58 F98 60 F99 62 63 67 67 68 77 77 79 -1No.PS-OMU0008CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

Multistage Ejector (N)ZL Series

Fluid Air Operating pressure range Internal pilot type 0.2 to 0.5MPa (29 to 72 psi) 5 to 50C (41 to 122F) Ambient and fluid temperature Response time (for 0.5MPa) Note 1) 25ms or less Maximum operating frequency 5Hz Manual operation Non-locking push type, Slotted locking type With vacuum pressure gauge Pilot valve individual exhaust type, Main valve/Pilot valve common exhaust Pilot exhaust

5 Port Solenoid Valve SY Series

In common Type 60 SY3 60 Cassette type Individual wiring SY5 60 P. 59 R Size and weight reduced by eliminating the manifold base + + P SY7 60 Type 41 Compact bar stock type Individual wiring SY3 40 SY5 40 + + + + P. 79 The base mounting facilitates maintenance after valves are changed.

Digital Pressure Switch

Copy function error Incorrect wiring Correct the wiring. 17 (2) Check the power supply wiring. Unable to copy Product failure Replace the product. -74No.PS-OMU0009-D Problem No.

LZ-OM004xx

D E F G H J L[]ZC[]5[] 38 58 22 27.5 L[][]ZC[]3[] 24 38 14 17 Model Model no. A B C D 41 Directly mounts onto the rod cover Tightening torque of accessories (foot) Fix with 4 holes "D" as shown below. Fix with 4 holes "H" as shown below. 42 Foot m ounting 4. Mounting end for tightening so as not to apply a rotating force to the end.

Slider Type Ball Screw Drive/11-LEFS Series

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%