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.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P 27 30 (2) 7 12.7 VR A 9.2 VH 2 15 (Bracket) 10 VHS 11 Base mounted: SYJA34-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing

Type of actuation C (dm3/(sbar)) b Cv C (dm3/(sbar)) b 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Cv P, EA, EB A, B 35 37 Single Double 2 position 0.44 0.61 0.16 0.64 0.45 0.18 0.46 0.13 0.47 0.43 0.48 0.13 Closed center Exhaust center Pressure center SA SYA320-M5 M5 x 0.8 0.42 0.47 0.13 0.47 (0.44) 0.41 (0.37) 0.13 (0.12) 3 position 39 VA 0.50 (0.41) 0.48 (0.35) 0.15 (0.11) 0.47 0.43 0.13 44 46

Recommended tightening torque Unit: Nm Connection thread 3/4 28 to 30 1/8 7 to 9 1/4 12 to 14 3/8 22 to 24 1/2 28 to 30 1 36 to 38 Torque 5-8-23

Membrane Air Dryers 361 405 428 468 548 618 83 187 53 113 212 54 1/4 73 140 40 Port size L B A Port size L A B C 70 91 3/8 1/2 3/8 IN Port size: 1/4 OUT Port size: 1/4 IDG30, 30L IDG50, 50L IDG60 IDG75, 100 IDG60L, 60S IDG75L, 75S IDG100L, 100S Model Model (67) (46) (26) IDG3, 5 IDG10 IDG20 Width across flats 17 Width across flats 14 Width across flats 14 Purge air outlet for dehumidification

Table 1 Display Real-time flow rate l/min Accumulated flow l, m, m x 10 ft, ft x 10, ft x 10 CFM Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min, or l, m or m x 10)]. 14 For Air Digital Flow Switch Series PFA 4. Output Specification Selection Mode For For Flow rate setting SET SET Press the SET button.

Caution Please refer to the actuator manual or the catalogue for the maximum speed of the actuator. 46 No.SFOD-OMT0012-A Name of the controller Group How to reset the alarm Alarms and countermeasures setting software (code) < Details > The motor drive power supply (M24V) voltage outside the specified range is detected.

SFOD-OMT0011 2015 7 2016 3 A 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2016 SMC Corporation All Rights Reserved No.SFOD-OMT0011CN-A

Series 1-1 1 2 IDX-OM-W029 1 IDU55E,75E OUT IN (ONOFF ) (EVAPORATING TEMP) 5-2 5-2 (6 ) AC200V AC230V L1 L2 L3 PE L N PE M3 6.5mm 1.25mm M3 6.5mm 1.25mm 2 2 IDU Series 1-1 1 3 IDX-OM-W029 1 () IDU Series 1-1 1 4 IDX-OM-W029 2 2 2-1 IDU22E75E 90170kg 2-2 2 2 1 2000m 240 050 600 mm 600 mm 600 mm 600 mm 600 mm ( ) IDU Series 2-1 2 1 IDX-OM-W029 2 2 2 2 6 6-3 IDF-AB501 14

IDX-OM-W095 1.3 HFC 1-4 IDFC60/70/80/90 Series 1-5 IDX-OM-W095 1.4 / 1 1.5 () IDFC60/70/80/90 Series 1-6 IDX-OM-W095 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFC60/70/80/90 Series 2-1 IDX-OM-W095 () IDFC60/70/80/90 Series 2-2 IDX-OM-W095 3 3.1 50kg IDFC60/70/80/90 Series 3-1 IDX-OM-W095 3.2 3.2.1 (85%) 2045 050 () 2000m 600 mm 600 mm 600 mm 600 mm 600 mm 3.2.2 7 7.3 IDF-AB500 14

16 No.VQZ100V-OMT0001 Revision history TW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved No.VQZ100V-OMT0001

Display Wiring (continued ) EX9 Series General Purpose Output Block Part Names Settings for display Display Description 2 4 6 8 10 Input unit 12 14 1 3 5 7 9 11 13 15 0 1 0 1 0 1 0 1 0 1 0 Indicator LED Power LED 1 0 1 0 1 0 Note1: For wiring method, refer to subsection "Wiring" ( page 34 ) of section "EX9 Series General Purpose Output Block" in this manual.

Load(kg): 12, Operating Speed(mm/s): 50~500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Left-side centralized piping, Port Screw Type: Rc, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): None, Lead Wire Connector: None, The number of the switches: None

Load(kg): 12, Operating Speed(mm/s): 50~500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Left-side centralized piping, Port Screw Type: Rc, Auto Switches: M9N, Lead Wire Length(m): 0.5, Lead Wire Connector: None, The number of the switches: 2 pcs., Custom-made: Without auto switch

Load(kg): 12, Operating Speed(mm/s): 50~500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Left-side centralized piping, Port Screw Type: Rc, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): None, Lead Wire Connector: None, The number of the switches: None

Load(kg): 12, Operating Speed(mm/s): 50~500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Left-side centralized piping, Port Screw Type: Rc, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): None, Lead Wire Connector: None, The number of the switches: None

Load(kg): 12, Operating Speed(mm/s): 50~500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Left-side centralized piping, Port Screw Type: Rc, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): None, Lead Wire Connector: None, The number of the switches: None

Load(kg): 12, Operating Speed(mm/s): 50~500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Left-side centralized piping, Port Screw Type: Rc, Auto Switches: A93, Lead Wire Length(m): 0.5, Lead Wire Connector: None, The number of the switches: 2 pcs., Custom-made: Without auto switch

Load(kg): 12, Operating Speed(mm/s): 50~500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Left-side centralized piping, Port Screw Type: Rc, Auto Switches: A93V, Lead Wire Length(m): 0.5, Lead Wire Connector: None, The number of the switches: 2 pcs., Custom-made: Without auto switch

Load(kg): 12, Operating Speed(mm/s): 50~500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Left-side centralized piping, Port Screw Type: Rc, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): None, Lead Wire Connector: None, The number of the switches: None

Load(kg): 12, Operating Speed(mm/s): 50~500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Left-side centralized piping, Port Screw Type: Rc, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): None, Lead Wire Connector: None, The number of the switches: None