MK

6 36 6.2 67 14 18 20 9 45 35.5 25 53.5 M8 X 1.25 61 18 6 36 6.2 67 14 18 20 9 45 43 25 M10 X 1.5 77 22 8 46 8.2 88 18 23 22 65 53 40 11.5 M10 X 1.5 22 8 46 8.2 88 18 23 22 65 52.5 40 76.5 11.5 Mounting arms for width across flats When installing the arm for the parallel section at the rod end, the strength of the piston rod might be insufficient depending on the direction in which the arm

Environment

Level Range> Without Load 800 Lead 4: LEY32C Model Pushing speed [mm/s] Pushing force (Setting input value) Model Pushing speed [mm/s] Pushing force (Setting input value) 700 Lead 8: LEY32B 1 to 4 20% to 65% 1 to 4 40% to 95% 600 LEY25 LEY25A 5 to 20 35% to 65% 5 to 20 60% to 95% Lead 16: LEY32A 500 21 to 35 50% to 65% 21 to 35 80% to 95% Force [N] 1 to 4 20% to 85% 400 LEY32 5 to 20 35%

MGP

MGPS50 50 11 12 A 13 B 14 1 2 3 4 5 50 80 7 8 9 A 10 B 15 16 6 17 NBR 18 NBR 19 A NBR 20 B NBR / (mm) 50 MGP50-PS 19 18 17 80 MG80-PS 20 17 20 GR-S-010(10g 18 18. 18-1.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 Station 2 50 41 Station 20 338 329 3 66 57 4 82 73 5 98 89 6 114 105 7 130 121 8 146 137 9 162 153 10 178 169 11 194 185 12 210 201 13 226 217 14 242 233 15 258 249 16 274 265 17 290 281 18 306 297 19 322 313 Port size One-touch fitting 26 Series SYJ500 Type 41 Manifold: Side Ported/SS3YJ5-41Stations -M5, 01 [ ] for AC For 1/8 Grommet (G) For M5 (Pitch) P=16 18 (Pitch) P

SMC

3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6-10 13-/22-MXS6-20 13-/22-MXS6-30 13-/22-MXS6-40 13-/22-MXS6-50 134 MXS Air slide table

HRS100/150

-20/40(60 Hz) 20 20 18 Facility water temperature 32C 18 Facility water temperature 32C 16 16 Cooling capacity [kW] Cooling capacity [kW] 14 14 12 12 10 10 8 8 Facility water temperature 40C 6 Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] 104 Thermo-chiller Standard Type HRS100/150 Series

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) (2 port) 16 (20) (4 port) 16 (23) (22) 16 (11) 10 12 (16) 62(72) 75(86) A B PB 50 62 (72) 75 (86) 14 2 4 1/8-2 port 12, 14 port Manual override 18 (20) (20) 18 PA R1 P R2 44 (58) 44 (58) 3/8, 1/2, 3/4-5 port 1,4, 2, 5, 3 port 49 (64) 49 (64) 2-8 mounting hole Indicator light Bottom ported M12 connector Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

+0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6-10 13-/22-MXS6-20 13-/22-MXS6-30 13-/22-MXS6-40 13-/22-MXS6-50 780 MXS

Square Tube Type Air Cylinder Series MB1

20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 19.5 27 32 32 37 37 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot Note) ZZ indicates the dimension for the double rod boot type. l h ZZ Note) Bore size (mm) e f 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to

Environment

kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500

XL

Port S (10) remains pressurized and valve S (18) remains open.

RSQ

1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 T 20 24 36 44 56 U 22.5 24.5 31.5 35 41 V 18 22 20 28 28 W 41.5 48 58.5 66 80 Y 38 47 Z 14 14 19 Bore size (mm) 16 20 32 40 50 Note 4) These figures show the piston rod extended.

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

MLGP

5 50 10 20 30 40 50 Transfer speed: (m/min) 9-11-18 18 Compact Guide Cylinder with Lock Series MLGP CL CL1 MLGC CNG MNB CNA CNS CLS CLQ MLGP RLQ MLU ML1C D-X 20Data 9-11-19 19 Compact Guide Cylinder with Lock Series MLGP 20, 25, 32, 40, 50, 63, 80, 100 How to Order M F 32 50 Y7BW MLGP Number of auto switches Compact guide cylinder with lock Nil S n 2 pcs. 1 pc. n pcs.

MK

45 36 20 53.5 67 14 18 6 6.2 M8 x 1.25 25 9 43 18 45 36 20 61 67 14 18 6 6.2 CC M10 x 1.5 40 11.5 53 23 65 46 22 77 88 18 22 8 8.2 M10 x 1.5 40 11.5 52.5 23 65 46 22 76.5 88 18 22 8 8.2 RB J Mounting arms for width across flats D-X 20Data When installing the arm for the parllel section at the rod end, the strength of the piston rod might be insufficient depending on the direction in which

Thermo-chiller

When a load is stable 0.1C 22 CH1 Circulating fluid temperature [C] Circulating fluid temperature [C] 21 20 19 8.5 kW load 18 0 kW load 17 0 10 20 30 40 When a load is stable 0.5C 27 CH2 For HRLE090-A-20 26 Outdoor air temperature: 32C Circulating fluid set temperature: 20C/25C (CH1/CH2) Heat load in the customer equipment: 9.5 kW (CH1, 2 total) Power supply: 200 V 60 Hz Circulating fluid

HRX-OM-R016

-(BJMT) . 9-5 9.3.2 HRS030-W-20-(BJMT) . 9-5 9.4 Cooling capacity . 9-6 9.4.1 HRS030--20-(BJMT) . 9-6 9.5 Heating capacity . 9-6 9.5.1 HRS030-A-20-(BJMT) . 9-6 9.5.2 HRS030-W-20-(BJMT) . 9-6 9.6 Pump capacity. 9-7 9.6.1 HRS030--20-(BJM) . 9-7 9.6.2 HRS030--20-T . 9-7 HRS Series HRX-OM-R016 Contents 9.6.3 HRS030--20-MT . 9-8 9.7 Required facility water flow (for water-cooled type) . 9-8 9.8

High Vacuum Angle Valve, XL Series

Port S (10) remains pressurized and valve S (18) remains open.