Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: Direct mounting, Port pipe connection port diameter: ø10 single-action pipe fitting (A-, B-Port) / ø12" single-action pipe fitting (P-, E-Port), Specification: Internal Pilot

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: Direct mounting, Port pipe connection port diameter: ø10 single-action pipe fitting (A-, B-Port) / ø12" single-action pipe fitting (P-, E-Port), Specification: Internal pilot

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: Direct mounting, Port pipe connection port diameter: ø10 single-action pipe fitting (A-, B-Port) / ø12" single-action pipe fitting (P-, E-Port), Specification: Internal Pilot

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: Direct mounting, Port pipe connection port diameter: ø10 single-action pipe fitting (A-, B-Port) / ø12" single-action pipe fitting (P-, E-Port), Specification: Internal pilot

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: Direct mounting, Port pipe connection port diameter: ø10 single-action pipe fitting (A-, B-Port) / ø12" single-action pipe fitting (P-, E-Port), Specification: Internal Pilot

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: Direct mounting, Port pipe connection port diameter: ø10 single-action pipe fitting (A-, B-Port) / ø12" single-action pipe fitting (P-, E-Port), Specification: Internal Pilot

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: Direct mounting, Port pipe connection port diameter: ø10 single-action pipe fitting (A-, B-Port) / ø12" single-action pipe fitting (P-, E-Port), Specification: Internal Pilot

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: Direct mounting, Port pipe connection port diameter: ø10 single-action pipe fitting (A-, B-Port) / ø12" single-action pipe fitting (P-, E-Port), Specification: Internal pilot

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: Direct mounting, Port pipe connection port diameter: ø10 single-action pipe fitting (A-, B-Port) / ø12" single-action pipe fitting (P-, E-Port), Specification: Internal Pilot

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: D-sub connector compatible tie-rod base manifold, Number of Inputs/Outputs: -, Connector: Upward Connector, Mounting Method: Direct mounting, Port pipe connection port diameter: ø10 single-action pipe fitting (A-, B-Port) / ø12" single-action pipe fitting (P-, E-Port), Specification: Internal pilot

VDW30/40-XF

Rz 3.2 or less for sheet surface 500 Compact / Lightweight 2 Port Solenoid Valve VDW30/40-XF Series For Air/Water Dimensions VDW30-G--C4 C6 /One-touch fitting for 4, 6 VDW40-G-/One-touch fitting for 8, 10 C8 C10 36 30 21 23 Approx. 300 32 17.5 20 Approx. 300 27 56 48 10 9 18 21 3 3 21 23 26 A A C4, C6 1 (IN) port C4, C6 2 (OUT) port C8, C10 1 (IN) port C8, C10 2 (OUT) port Dimentions A 3

VQ20/30

VN VQ30 LVC LVA JIS Symbol LVH (A) 2 Characteristic Specifications LVD VQ20 VQ30 Series LVQ 1 (P) C8 C6 C10 C12 N.C.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

0.82 3.8 0.26 0.86 3.2 0.34 C10 ( ) 0.70 [0.56] 0.59 0.25 0.27 0.59 0.67 2.7 [2.0] 2.4 0.38 [0.38] 0.21 2.8 One-touch 3 position 189 2.5 3.8 [2.4] Exhaust center Pressure center fitting for 10 0.61 0.25 [0.31] 0.89 [0.61] 2.3 0.38 Note) [ ]: Denotes normal position.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

0.82 3.8 0.26 0.86 3.2 0.34 C10 ( ) 0.70 [0.56] 0.59 0.25 0.27 0.59 0.67 2.7 [2.0] 2.4 0.38 [0.38] 0.21 2.8 One-touch 3 position 189 2.5 3.8 [2.4] Exhaust center Pressure center fitting for 10 0.61 0.25 [0.31] 0.89 [0.61] 2.3 0.38 Note) [ ]: Denotes normal position.

Series VQ Base Mounted Metal Seal/Rubber Seal

(Series VQ2000) Porting specifications Applicable stations Port size Port location A, B P, R Series Side Side Max. 24 Max. 20 C3, C4, C6, M5 C4, C6, C8 C8 C10 VQ1000 VQ2000 Terminal Block Connection Open the terminal block cover for wire connection. Sequence 1.

SYA3000/5000/7000

SYA720-C10 2.7 [2.0] 2.4 0.38 [0.38] 0.21 0.70 [0.56] 0.59 0.25 0.27 0.59 0.67 2.8 One-touch ( ) 3 position 113 2.5 3.8 [2.4] Exhaust center Pressure center fitting for 10 2.3 0.38 0.61 0.25 [0.31] 0.89 [0.61] Note) [ ]: denotes normal position.

5 Port Air Operated Valve SYA3000/5000/7000 Series

( ) SYA720-C10 0.25 0.27 0.59 0.67 2.7 [2.0] 2.4 0.38 [0.38] 0.21 0.70 [0.56] 0.59 2.8 One-touch 3 position 113 2.5 3.8 [2.4] Exhaust center Pressure center fitting for 10 0.25 [0.31] 0.89 [0.61] 2.3 0.38 0.61 Note) [ ]: denotes normal position.

Fieldbus System

C10: 10 (SMC) N11: 3/8" (SMC) (C12: 12 (SMC) (In case of double sided type)) [Communication connector D-sub] (DIN rail clamping screw) R R R BUS OUT BUS 76.7 76.5 12 3 12 3 3 72 BUS IN X 49.5 B B B B B B B B P X P X P 12 PWR PWR 30 25 A 1 1 A 1 A A A A A A A 55 25 13 (7.5) 18 55 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.

Vacuum Regulator

SET side tubing O.D. 6, 8, 10 1/4" , 5/16" , 3/8" 6, 8 1/4" , 5/16" 135 g (IRV10-C08) 125 g (IRV10A-C08) 250 g (IRV20-C10) 250 g (IRV20A-C10) Weight (Without accessories) Standard connections Single sided connections Note 1) Use caution it varies depending on the pressure in vacuum pump side.

5 Port Solenoid Valve

C10: 10 (SMC) N11: 3/8" (SMC) (C12: 12 (SMC) (In case of double sided type)) [Communication connector D-sub] (DIN rail clamping screw) R R R BUS OUT BUS 76.7 76.5 12 3 12 3 3 72 BUS IN X 49.5 B B B B B B B B P X P X P 12 PWR PWR 30 25 A 1 1 A 1 A A A A A A A 55 25 13 (7.5) 18 55 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.