VXA31/32

44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

V

13, 16 D I M E N S I O N S PA D D I A M E T E R S 40, 50 F L AT T Y P E F L AT W I T H R I B G:M5x0.8 G:M6x1 Y Model A B C D F L AT T Y P E F L AT W I T H R I B E F E F Flat Flat with rib H:M6x1 H:M8x1 Y ZPT10 U C 10 12 12 17 20 38 25 43 3 1.7 Model A B D E C F G C F G Flat Flat with rib ZPT13 U C 13 15 12 17 20 38 25 43 3 1.8 ZPT40U C 40 43 18.5 24.5 3 15 50.5 4.5 15 40.5 6.5 3.3 ZPT16 U

HRX-OM-W060

Circulating fluid temperature[] Fig. 8-8 Cooling Capacity (HRL100/200/300-A-20) 8.4 Cooling Capacity HRL Series 8-8 HRX-OM-W060 Chapter 8 Documents 8.5 Pump Capacity 8.5.1 HRL100A20 CH1 0.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 Circulating

Rotary Table/

(Lm/2) 190 40 10 40 10 10 35 10 190 35 Most sensitive position Operating range of single auto switch Lm Rotation range m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

17 26 31 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 W 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 7 10 12 14 17 20 26 58 58 70 88 104 128 152 -X 20Data With low load shock absorber + Adjusting bolt MY1W Bore size Stroke L

VCA

48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 Q 27 30 32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

3/16" 11.4 40 17 33 NPT 1/4 AS331FG-02-06 AS231FG-N02-07 39.9 34.9 34.4 29.4 25.2 46.5 45.1 17 25.6 38.5 34.2 6 12.8 1/4" 13.2 60 18.5 19 36 17.5 20.6 18.3 12.9 AS331FG-02-08 AS231FG-N02-09 28.2 49.5 47.9 18.5 28.2 39.7 35.2 8 15.2 5/16" 15.2 63 39 12.9 R 1/4 23 43.3 48.3 21 19 42.8 37.8 AS331FG-02-10 AS231FG-N02-11 32.6 53.9 46.5 21 31 43.7 38.7 20.2 10 18.5 3/8" 17.9 67 40 23 16.2 AS331FG

Bernoulli Gripper

Material 20 20 mm 60 60 mm 30 30 mm 80 80 mm 40 40 mm VP Resin VS Stainless steel With mounting plate Material: Resin is only selectable for body size 40.

HRX-OM-O021

40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40

MGP

M 10 16. 16-1. 1 22 (mm) gfcm) (mm) 12 RTW-13 5 14 16 RTW-18 6 34 20 RTW-22 8 52 25 RTW-26 10 88 32 RTW-34 14 220 40 RTW-42 14 220 50 RTW-52 17 440 63 RTW-62 17 440 80 RTW-82 22 1,240 100 RTW-102 27 2,000 16-2. 1) 1 1 2) 2 2 11 3) 32 4) 3 3 16-3. 2JIS2 1 , 4 2 3 4 16-4. 1 5 5 6 6 12 () 32 () 32 7 7 () 8 2 1 13 17. 17-1.

7

R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

LJ1H

Work piece mounting reference plane Rc 1/4 Vacuum suction port Rc 1/4 Vacuum suction port 80 Stroke + 115 (table movement range) 7.5 194 (249) 41 46 58 2-T-slot 1 57 65 69 90 95 9.3 44 40 (T-slot pitch) 2-T-slot 2 Stroke + 350 (405) 17 28 23 (78) 40 36 Body mounting reference plane 3-5H10 depth 5 3.3 5.8 1.7 5.3 T-slot 1 dimensions (switch groove) 11.5 45 27 (82) 40 80 Stroke + 145 9.4 4.5

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

) 12 (14) 104 11 21 47.5 175 37 46 28.3 40 25 25 25 107 (115) 12 (14) 104 11 21 48 201 37 52 31.3 43 32 32 32 110 (118) 12 (14) 106 11 21 49 238 44 62 38.3 52.5 40 40 40 121 (130) 12 (15) 123 11 25 53 285 55 75 44.5 58.5 50 50 50 137 (149) 14 (16) 140 16 26 59 Note) ( ): Denotes the dimensions for long stroke.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 563 Series VQ1000/2000 1021Construction Directional Control Valves Air Grippers Modular F.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 563 Series VQ1000/2000 1021Construction Directional Control Valves Air Grippers Modular F.

Series AS-FM/AS-M/ASD-FM

32.1 31.1 27.1 36.1 14.2 14.3 R1/8 12 13.5 18.5 16 17 18.5 21.0 19 32 18.2 18.5 R1/4 17 34.4 35.4 29.4 40.4 34 36 20.0 Reference dimensions for M5 and R threads after installation.

Refrigerated Air Dryer

IDF4E to 11E IDU3E to 6E IDF4E, 6E, 8E, 11E IDU3E, 4E, 6E 34 Circuit breaker Signal cord outlet (17) GROMMET WITH MEMBRANE = Rubber grommet with integrated membrane for wire protection Terminal block 32 97 15 Power cord outlet (17) GROMMET WITH MEMBRANE = Rubber grommet with integrated membrane for wire protection 40 67 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

HRX-OM-Y098

fluid outlet 0.6 60 Pressure [MPa] 0.5 50 Lifting head [m] Usable flow rate range 0.4 40 0.3 30 Circulating fluid return 0.2 20 0.1 10 0 0 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow[L/min] Fig. 8-11 Pump capacity(HRL300-A-20 CH1) 8.5.4 HRL-A-20CH2 0.6 60 0.5 50 Lifting head [m] Pressure [MPa] 0.4 40 Usable flow rate range Circulating fluid outlet 0.3 30 0.2 20 Chiller display

Square Tube Type Air Cylinder Series MB1

Port Cushion valve Bore size (mm) Double clevis type/(D) Z ZZ CDH10 32 40 50, 63 80, 100 160 164 190 238 170.5 175 205 261 Double clevis type U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 750 to 750 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5