LX

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 224 17 Courtesy of Steven Engineering

Modular F.R.L. Unit

Pressure switch Page 16 Compact switch M5 x 0.8 1/8, 1/4, 3/8, 1/2 Cross interface Page 17 Allows piping in all 4 directions. 3-port valve for residual pressure release Page 17 Releases residual pressure in lines. 1/8, 1/4, 3/8, 1/2 Made to Order specification Refer to page 20 for details. Accessories Refer to pages 18 and 19 for interfaces and brackets. Features 5 Feature 6 F.R.L.

Series IDG

Page 17 Order Made . Page 33 Model Selection .Page 37 Flow Rate Characteristics . Page 39 Purge Air Flow Rate Charts ... Page 41 Precautions .

Modular F.R.L. Unit

Pressure switch Page 16 Compact switch M5 x 0.8 1/8, 1/4, 3/8, 1/2 Cross interface Page 17 Allows piping in all 4 directions. 3-port valve for residual pressure release Page 17 Releases residual pressure in lines. 1/8, 1/4, 3/8, 1/2, 3/4, 1 Attachment Accessories Refer to pages 18 and 19 for interfaces and brackets. Made to Order specifications Refer to page 20 for details.

Compact Cylinder with Lock Series CLQ

L D d m t d H B C C type 8 for shaft C type 10 for shaft C type 10 for shaft C type 14 for shaft C type 18 for shaft C type 22 for shaft 20 25 32, 40 50, 63 80 100 21 25.6 41.6 50.6 64 72 7.6 9.6 9.6 13.4 17 21 16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.55 1.55 2.05 2.55 2.55 0.9 1.15 1.15 1.15 1.35 1.35 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 5 6 8 11 13 16 13 17 22 27 32 41

Rotary One-touch Fittings Manifold Series KM

D1 Port B min. port size Weight (g) D2 L1 L2 L3 L4 P Q1 Q2 M1 M2 4 4 6 KM16-06-06-3 12.8 4 6 KM16-04-04-3 16 17 17 KM16-04-06-3 6 16 16 17 19 18 3 4.5 18 4.5 12.8 68 20.9 16 11 14.5 50 10.5 65

VXD21/22/23

Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 18.2 17 25.2 34.4 12.8 10.4 6 5/32" 16 18.5 35.4 40.4 17 34.4 29.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 18.2 24.9 34.2 34 18.5 27.2 36.4 15.2 11.4 8 3/16" 17 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 17.5 25.2 34.5 20 36 21 33.9 43.2 18.5 13.2 10 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 AS321FG-02-06 AS221FG-N02-09 27.2 36.4 60 17 27.8 39.3 12.8 15.2 6

CJP

Symbol A A' Bore size (mm) NN MM K J H GB GA E D C CD B CK Q R 6 10 15 +0.040 0 3 M3 x 0.5 8 6 17 11 6 10.5 3 16.5 14 4 9 7 7 M10 x 1.0 0 0.5 17 +0.065 0 5 M4 x 0.7 8 7 20 17 6 13 5 20 15 6.5 12 8 10 M12 x 1.0 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 12 M14 x 1.0 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15

High Vacuum Angle Valve

For details, refer to Common Option [2] Mounting position of the heater on page 17.

REC

B 4-LD LH MM 2-4 3.2 N N X X Y S+Stroke Y LX Z LS+Stroke LZ ZZ+Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore size Stroke range 20 M8 X 1.25 18 15.5 40 13 26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55 20 30 150 to 700 M10 X 1.25 25 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 47 17 32 49.5 12 13 11 45 6

REC

LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS + Stroke LZ ZZ + Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore (mm) Stroke range 20 M8 x 1.25 Up to 700 18 15.5 40 13 26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55 20 30 25 M10 x 1.25 Up to 700 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 32 M10 x 1.25 Up to 1000 22 19.5 47 17 32 49.5 12 13 11

CJP

Symbol A A' Bore size (mm) NN MM K J H GB GA E D C CD B CK Q R 6 10 15 +0.040 0 3 M3 x 0.5 8 6 17 11 6 10.5 3 16.5 14 4 9 7 M10 x 1.0 7 0 0.5 17 +0.065 0 5 M4 x 0.7 8 7 20 17 6 13 5 20 15 6.5 12 8 M12 x 1.0 10 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 M14 x 1.0 12 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15

MG

27 18 120 200 77 117 167 28 70 3 30 3.5 81 M6 x 1.0 54 12 72 17 44 24 44 300 29 39 26 120 200 77 117 167 34 78 4 38 4.5 91 M6 x 1.0 64 12 82 17 50 24 44 300 29 39 MGPM (Slide bearing) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Over 100 st Over 50 st to 100 st Over 50 st to 100 st Bore size (mm) Bore size (mm) Over 100 st Over 30 st to 100 st Over 30

CLQ

Additional Weight (g) 20 25 32 40 50 63 80 100 Bore size (mm) 77 27 17 7 149 208 192 64 26 17 3 137 174 159 Magnet 380 175 116 56 1009 1307 1251 45 12 8 3 174 149 140 118 53 32 9 221 351 326 158 53 32 18 288 523 498 261 120 49 31 638 998 959 35 6 4 2 152 127 121 Thread Nut Rod end male thread With rubber bumper Foot style (Including mounting bolt) Auto switch mounting screw (M3 x 0.5 x 10l

Floating Joint

17 17 19 19 19 22 DA00155 DA00154 DA00156 DA00158 DA00159 DA00157 DA00160 DA00161 DA00162 30 30 32 36 36 36 41 41 41 M30.5 M40.7 M50.8 M61 M81 M81.25 M101 M101.25 M101.5 M121.25 M121.5 M121.75 M141.5 2.4 3.2 4 5 5 5 6 6 6 7 7 7 8 6.4 8.1 9.2 11.5 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 M201.5 M202.5 M221.5 M241.5 M242 M243 M261.5 M271.5 M272 12 12 13 14 14 14 16 16 16 34.6 34.6 37 41.6

Integrated Controller

Outside diameter [mm] 0.88 Conductor Effective area [mm2] 0.15 Strand diameter [mm] 0.05 Min. bending radius [mm] (Reference values) 17 Refer to the Web Catalog for solid state auto switch common specifications. Refer to the Web Catalog for lead wire lengths.

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 Parts included 11 Gasket 1 11 Gasket 1 11 Gasket 1 11 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 in seal kit 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 Please refer to P19 to 21 for the product construction.

VFS

14 16 17 9.0 9.0 9.0 VFS600 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 15 16 17 15 16 17 14 16 16 14 16 17 14 16 18 9.0 9.0 9.0 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 3 8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100 VFS5110

Rotary One-touch Fittings Series KS/KX

14 12.8 1 8 1 4 1 8 17 23 23 29 37 55 63 81 75 92 14 4 13.4 10.4 8 1 4 17 17 18.5 15.2 6 26.1 18.0 3 8 1 4 10 3 8 1 2 3 8 1 2 22 18.5 21 7 22 36.3 29.5 24 12 24 20.9 8 22 46.1 46.1 Reference dimensions after R(PT) thread installation.