Microspeed Cylinder: Double Acting/Single Rod Series CJ2X ø 10, ø 16 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

A Example C73 C80 C73C C80C 100V 12V Band mounting type CDJ2XB16-60-B Relay PLC No IC circuit 100V or less 5V, 12V 2-wire Yes 24V 12V Connector No 24V or less 5V, 12V IC circuit Diagnostic indication (2-color display) Grommet Yes H7A1 H7A2 H7B H7C H7NW H7PW F79 F7P J79 3-wire (NPN) IC circuit 5V, 12V Grommet 3-wire (PNP) 12V 2-wire Connector 3-wire (NPN) F79W F7PW 5V, 12V IC circuit Diagnostic

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

F7NWV F9NW F9NWV F79W 24V IC circuit Diagnostic indication (2-color display) 5V, 12V 3-wire (PNP) Accessories included with each bracket are as follows.

Compact Cylinder with Lock Series CLQ

CLQ-D025 CLQ-F025 CLQ-L025 A96V A96 A76H IC circuit 5V CLQ-D032 CLQ-F032 CLQ-L032 A72H A72 200V Yes Reed switch CLQ-D040 CLQ-F040 CLQ-L040 Grommet A73H A73 12V 100V CLQ-D050 CLQ-F050 CLQ-L050 A93V A93 Relay, PLC CLQ-D063 CLQ-F063 CLQ-L063 100V or less IC circuit 5V, 12V No A80 A90V A90 A80H 2 wire 24V CLQ-D080 CLQ-F080 CLQ-L080 12V Yes A73C Connector CLQ-D100 CLQ-F100 CLQ-L100 5V,

Rotary Table Series MSU

Electrical entry Applicable loads Lead wire type Type DC AC 0.5 (Nil) 3 (L) None (N) 5 (Z) Parallel cord 5V, 12V 5V, 12V, 24V 90 IC circuit No 5V, 12V, 100V 5V, 12V, 24V, 100V Reed Solid state Solid state Reed Heavy duty 90A Parallel cord 97 2 wire 93A 100V MDSUA1 T99 Relay, Grommet 24V 12V T99V PLC MDSUA3 Yes Heavy duty S99 3 wire (NPN) S99V IC circuit 5V, 12V S9P 3 wire

Turntable Cylinder Series MGT

Electrical entry Wiring (output) Special functions 0.5 (Nil) 3 (L) 5 (Z) Applicable load Indicator light Type Electrical entry direction DC AC Vertical Horizontal IC circuit Z76 3 wire 5V Grommet Yes Reed switch Z73 24V 12V 100V Relay PLC 2 wire 5V 12V 100V or less IC circuit Z80 No 3 wire (NPN) IC circuit 3 wire (PNP) Y7PV Y7P Y59A Y69A 5V 12V IC circuit Lead wire indicator symbol

Compact Cylinder with Air Cushion Series RQ

IC circuit 5V A76H A96V A96 200V A72H A72 Yes Grommet Reed switch A73H A73 12V 100V A93 A93V Relay, PLC No 2 wire 5V, 12V 100V or less A90 A90V A80H A80 IC circuit 24V Yes 12V A73C Connector No 5V, 12V 24V or less A80C IC circuit Diagnostic indication (2 color indicator) Yes Grommet A79W 3 wire (NPN) Bracket part numbers F9N F9NV F79 F7NV 5V, 12V IC circuit Note 5) Note 3) 3 wire

Stopper Cylinder Adjustable Mounting Height Type Series RSG

C76 Yes 5V IC circuit Reed switches Solid state switches C73 100V 12V Grommet C80 5V, 12V 100 V or less IC circuit No Relay, PLC 2 wire 24V C73C 12V Yes Connector C80C 5V, 12V 24V or less No IC circuit H7A1 3 wire (NPN) IC circuit 5V, 12V H7A2 3 wire (PNP) Grommet H7B 2 wire 12V Connector H7C 24V H7NW 3 wire (NPN) Relay, PLC Yes IC circuit 5V, 12V Diagnostic indication H7PW

High Power Cylinder Series RHC

IC circuit 5V C76 B53 B54 B64 C73 C80 C73C C80C B59W H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA G5NT H7NF H7LF PLC Yes 12V 100V, 200V 200V or less 100V 100V or less 24V or less Grommet No Yes 12V 5V, 12V 12V 5V, 12V 24V 2 wire Relay, PLC No IC circuit Yes Connector No IC circuit Grommet Yes Diagnostic indication (2 color indicator) 3 wire (NPN) 3 wire (PNP) IC circuit 5V, 12V Grommet

Sine Rodless Cylinder Series REBR Direct Mount Type

Reed switches Solid state switches Z76 5V IC circuit Yes No 12V 5V, 12V 100V 100V or less Grommet Z73 Relay, PLC 2 wire 24V IC circuit Z80 3 wire (NPN) Y69A Y59A IC circuit 5V, 12V 3 wire (PNP) Y7PV Y7P Relay, PLC 12V 24V Y69B Yes 2 wire Y59B Grommet Diagnostic indication (2 color indicator) 3 wire (NPN) Y7NWV Y7NW IC circuit 5V, 12V 3 wire (PNP) 2 wire Y7PWV Y7PW 12V Y7BWV Y7BW

Guide Cylinder Series MGG

(PNP) G79 G59 G5P K59 IC circuit 5V, 12V Grommet K79 K79C 2 wire 12V Connector G59W G5PW K59W G5BA 3 wire (NPN) 3 wire (PNP) IC circuit 5V, 12V Diagnostic indication (2 color indicator) Relay, PLC 24V Yes 2 wire 12V Water resistant (2 color indicator) With timer Grommet (G5NT) G5NT 3 wire (NPN) 5V, 12V With diagnostic output (2 color indicator) IC circuit G59F H7NF 4 wire (NPN) Latch

Table of Contents

Note 5) Includes 1 l/min (ANR) of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG3M/3V/5M/5V). Note 6) When highly purified air is required, refer to Caution on Design on page 14-19-7.

IDG

Note 5) Includes 1 l/min (ANR) of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG3M/3V/5M/5V). Note 6) When highly purified air is required, refer to Caution on Design on page 14-19-7.

RSH

Lead wire length(m)* Auto switch model Lead wire entry Perpendicular In-line Load voltage Special function Indicator light Electrical entry Wiring (Output) Applicable load Model 0.5 (-) 3 (L) 5 (Z) DC AC P P Z76 3 wire 5V IC Grommet Yes Reed switch P P P Z73 100V 24V 12V Relay PLC 2 wire 5V 12V P P Z80 No 100V IC 3 wire (NPN) 5V 12V P P Y59A Y69A p IC 3 wire (PNP) 5V 12V Y7PV Y7P P P p 2

PF-OMN0011_C

F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] A 1-5V 1-5V 4-20mA (Hysteresis) ON OFF 90% () Ka (copy function) () 10 L/min 10 L Sa ON OFF ON OFF , , 2 5 10 L/min 5 ,10550 L ON-OFF 1 L/min ,10 11 12 1 L/min -13No.PF-OMN0011CN-C SI SI Ta ON-OFF Na ON 0 Ha -14No.PF-OMN0011CN-C M38 L(2 ) (ZS-26-B) (ZS-26-01) ZS-26-01 1 (ZS-26-B) 190 2,1/41/2 72 2, , -15No.PF-OMN0011CN-C , 1 DC(

CEx-OMG0106

Together with +5V, photo-couple is insulated.

CRQ2

Indicator light Special function Electrical entry Wiring (output) Electrical entry direction 0.5 (Nil) 3 (L) 5 (Z) Applicable loads Type DC AC Perpendicular In-line A96 A96V 3 wire (NPN equiv.) 5V IC circuit A96L A96VL Reed switch Solid state switch Yes A93 A93V 100V Grommet A93L A93VL Relay, PLC 2 wire 24V A90 A90V 5V, 12V No 100V or less IC circuit A90L A90VL F9N F9NV

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

2 wire 24V 5V, 12V IC circuit No A64 200V 12V A59W Yes Diagnostic indication (2 color) F59 3 wire (NPN) IC circuit 5V, 12V 24V F5P 3 wire (PNP) J51 100V, 200V 2 wire J59 12V 3 wire (NPN) F59W IC circuit 5V, 12V Diagnostic indication (2 color) Relay PLC 3 wire (PNP) F5PW Grommet Yes J59W 12V 24V 2 wire Water resistant (2 color) F5BA * Lead wire length 0.5m (Example): A53 3m

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

indication (2 color) F59 3 wire (NPN) IC circuit 5V, 12V 24V F5P 3 wire (PNP) J51 100V, 200V 2 wire J59 12V 3 wire (NPN) F59W IC circuit 5V, 12V Diagnostic indication (2 color) Relay PLC 3 wire (PNP) F5PW Grommet Yes J59W 12V 24V 2 wire Water resistant (2 color) F5BA * Lead wire length 0.5m (Example): A53 3m L (Example): A53L 5m Z (Example): A53Z IC circuit 3 wire (NPN) F5NT

MHZ2/MHZJ2

Type Special function Electrical entry Indicator light Wiring (output) Electrical entry direction 0.5 (Nil) 3 (L) Perpendicular In-line IC circuit Y59A 5V, 12V Y69A 3 wire (NPN) F9N 12V F9NV 5V, 12V Y7P IC circuit Y7PV 3 wire (PNP) Solid state switch 12V F9P F9PV Y59B Y69B 12V 2 wire F9B F9BV Relay, PLC Grommet Yes 24V 5V, 12V IC circuit Y7NW Y7NWV 3 wire (NPN) 12V F9NW

ML1

E76A 3 wire IC Relay PLC S 2 1 Yes Yes No Grommet Reed Solid state E73A 100V 12V 5V 12V 2 wire 24V 100V or less E80A IC O O O O O O O O 3 wire (NPN) 3 wire (PNP) M5N 5V 12V IC M5P Options M5B 12V 2 wire 3 wire (NPN) Stroke Adjusting Unit M5NW Grommet Relay PLC 5V 12V 24V IC Diagnosis indication (2 color) 3 wire (PNP) Cylinder bore size (mm) Part No.