How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1 STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) HEC 3-2
Communication Format
See Specific Product Precautions. 0.2 GD 0 0 10 20 30 40 50 Operating temperature (C) Port size Model Rated flow (L/min (ANR)) Note 1) Weight 60 80 100 100 100 100 300 400 500 500 35 g 35 g 35 g 35 g 60 g 150 g 190 g 190 g 190 g 260 g 4 (One-touch fittings) 6 (One-touch fittings) 8 (One-touch fittings) Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 8 (One-touch fittings) 10 (One-touch fittings
Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2.
Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur . 2.
1 -57No.EX-OMN0027CN-D (Range) (Lwr_Lmt) (Upr_Lmt) -10..10 V -10.50+10.45 V -10.45+10.50 V -5..5 V -5.25+5.22 V -5.22+5.25 V -20..20 mA -21.00+20.90mA -20.90+21.00mA 0..10 V 0.00+10.45 V +0.05+10.50 V 0..5 V 0.00+5.22 V +0.03+5.25 V 1..5 V +0.75+5.22 V +0.78+5.25 V 0..20 mA 0.00+20.90mA +0.10+21.00mA 4..20 mA +3.00+20.90mA +3.10+21.00mA -58No.EX-OMN0027CN-D (1) No.
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
250 200 150 10 100 50 0 1 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time (min) Test method and conditions The liquid contact portions were filled with sulphuric acid and left untouched for half an hour.
Repetition Pressure characteristics Flow characteristics 0 1 10kPa 20kPa -20 Output deviation factor % F.S. 0.5 40kPa -40 Set pressure kPa Out 60kPa -60 0 Return 80kPa -80 -0.5 100kPa -100 -120 -100 -80 -60 -40 -1 0 1 1.5 0.5 2 2.5 3 3.5 -120 -20 4 Flow rate l/min (ANR) Supply pressure MPa 5 Compact Electro-pneumatic Regulator Series ITV0 Dimensions Single unit 4-6 2-6 PWR L bracket (optional
Repetition Pressure characteristics Flow characteristics 0 1 10kPa 20kPa -20 Output deviation factor % F.S. 0.5 40kPa -40 Set pressure kPa Out 60kPa -60 0 Return 80kPa -80 -0.5 100kPa -100 -120 -100 -80 -60 -40 -1 0 1 1.5 0.5 2 2.5 3 3.5 -120 -20 4 Flow rate l/min (ANR) Supply pressure MPa 5 Compact Electro-pneumatic Regulator Series ITV0 Dimensions Single unit 4-6 2-6 PWR L bracket (optional
Zone 40 :/ 1 30 " /' i 20 ;/ Danger Zone 10 SOOO 1
Port side side Minimum stroke 10 20 75 15 3.
(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel
Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15 10 5 0 0.1 0 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) 13-9-3 4 Series ZQ Specifications Ejector Weight Switch and suction
Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 400 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 400 Symbol Specifications -XAl Change of rod end shape -XC3 Special port location -XC9 Adjustable stroke cylinder/Adjustable retraction type Note 1) Manufacture of intermediate strokes at 1 mm intervals is possible.
L L 2 . 3 . 6 4 . 5 . 6 . 2 2-3. 1 2 Nm mm 16 5 20 M30.5 0.59 6 25 6 8 32 40 M40.7 1.4 8 10 50 63 M50.8 2.8 10 80 M61 4.8 12 100 M81.25 12 16 125 M101.5 24 20 3 P9P11 7 Nm mm MHSH(J)3-32DA,B M30.5 0.6 6 40DA,B M50.8 2.8 10 50DA,B M61 4.8 12 63DA,B M81.25 12 16 80DA,B M101.5 24 20 A J/ / 8 MHS2 Nm mm MHS2-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3
(Max. 20 stations) SUP/EXH block assembly mounting position Valve stations Series 3 5 7 02 2 stations SY3000 SY5000 SY7000 20 20 stations Symbol Mounting position U side D side Both sides Special specifications Applicable stations U D B M 2 to 10 stations 2 to 20 stations In case of special specifications, indicate separately on a manifold specification sheet.
G1/4 OUT port 0.5 to 2 0.5 to 2 20 G1/4 OUT port n-1 9 7 5 3 1 122.2 <124.2> 142.2 <144.2> 142.2 <144.2> 120 122.2 <124.2> 100 22.6 100 120 80 25 75 50 n 1 0 8 6 4 2 50 67.5 <69.5> L1 8 67.5 <69.5> 64.9 L2 4 x 9 (for M8 mounting) 3 port valve 2 port valve 64.9 50 8 10.5 Leakage detection port Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) 30
A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room
2-M3 x 0.5 depth 4 8.45 20 Piping port M5 x 0.8 depth 5 6.4 Piping port R, NPT 1/4 18.35 3.5 12.4 7 7.8 25.1 2.5 10.7 2.6 8.45 10.1 12.4 30 15.2 14.5 22 Piping port G 1/4 Piping port G 7 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20 45 55