Compact and Lightweight

Supply valve (3 port valve) + Variable throttle + Suction filter Ex. 2 Supply/Release valve (5 port valve with 3-position) + Variable throttle Ex. 5 3 port valve 5 port valve with 3-position closed center Silencer 3 port valve is used to generate and release the vacuum.

High Vacuum L Type Valve

This will allow for incremental spacing to prevent harmful large initial surge. 10 XL-OMS0001-B 5. Construction and Dimensions 5-1.

Lubrication Equipment

5 !6 NBR 1: 100V AC, 2: 200V AC, 4: 220V AC, 5: 24V DC, 9: Others 1.17-23 Booster Lube ALB900 Dimensions AC AV AU AF AR IR VEX AW AMR AWM AWD ITV VBA VE VY G By-pass Lubrication Adapter Related equipment/Strainer ALBA90-30 ALBA90-10, -20 AL At the terminal of an air pressure line in which a D.P.

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stattons : l : 20 | 20 staitons Type /rc Nvv5z3-4o-@2g|5 Stations I asize of A, B port lils | 10.32 Nom.

New

100 0 25 50 75 100 Input signal (%F.S.)

High Vacuum L Type Valve

Refer to Web Catalog for details of the solenoid valve. 9 XL-OMV0019 5. Construction and Dimensions 5-1.

KS/KX

Torque/Allowable Number of Rotations 5 32 1 4 5 16 3 8 Applicable tubing O.D

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

When attaching a tube, resin plug, metal rod, etc., do not attach while pressing on the release bushing. 5.

High Vacuum L Type Valve

Refer to Web Catalog for specifications of the solenoid valve SYJ300/500 series. 9 XL-OMV0016 5. Construction and Dimensions 5-1.

VXA21/22

Min. 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500cSt or less Note 3) "V" in the parenthesis is option symbol. Options Material Tightness of Valve(Leakage) No. Description Standard Brass (Base is aluminum.)

AMX-OM-Q015E

to 55 -5 to 50 -5 to 55 -5 to 50 *Note1 Ambient temperature oC -5 to 55 -5 to 50 -5 to 55 -5 to 50 *Note1 Standard Performance 31 62 125 250 360 586 28 56 111 222 329 550 Outlet air atmospheric -20 -15 *Note2 pressure dew point oC Inlet air flow rate L/min(ANR) Standard Performance conditions Outlet air flow rate L/min(ANR) 25 50 100 200 300 500 25 50 100 200 300 500 6 12 25 50 60 86 3 6

AMX-OM-Q018E

to 55 -5 to 50 -5 to 55 -5 to 50 *Note1 Ambient temperature oC -5 to 55 -5 to 50 -5 to 55 -5 to 50 *Note1 Standard Performance 31 62 125 250 360 586 28 56 111 222 329 550 Outlet air atmospheric -15 -20 *Note2 pressure dew point oC Inlet air flow rate L/min(ANR) Standard Performance conditions 25 50 100 200 300 500 25 50 100 200 300 500 Outlet air flow rate L/min(ANR) 6 12 25 50 60 86 3 6

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center 2 position SX340 78 3 position 75 83 2 position SX540 89 3 position 36 Series SX3000/5000 SX3000: Flat Cable Type/Plug-in Stations SS5X3-45GUDC4 C6 Note) L1 to L4 dimensions of SS5X345GUStations Uare the same as SS5X3-45GUStations D-. 2 Stations 3 4 5 6 7 8 9 10 135.5 125 102 16.5 148 148 160.5 150

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

VXF

530 10 to 60 VXF2150 VXFA2150 170 0.03 1.0 2.0 20 3 4 VXFA 2150 5 to 40 350 0.7 DC DC VXF 2160 5 to 60 580 VC 1.0 AC AC 10 to 60 VXF2160 VXFA2160 1.0 0.03 330 2.0 1 27 VXFA 2160 5 to 40 400 0.7 DC DC VDW Solenoid type VXF 2280 5 to 60 1.0 1500 AC AC VXF2280 VXFA2280 VQ 10 to 60 1.0 0.03 810 2.0 40 1 2 1 VXFA 2280 5 to 40 0.7 1300 DC DC VX2 Note 1) Dew point shall be 10C or less.

Dedicated Controller Series LC1 Uniaxial Type

to 50C 5 to 50C 5 to 50C 5 to 50C 5 to 40C 5 to 40C 5 to 40C 5 to 40C Electric energy 180VA 640VA 300VA 300VA 640VA 100VA 300VA 640VA 640VA 300VA 180VA 300VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return function Maximum positioning point setting With magnet switch as adjacent switch, and encoder Z phase signal as home position

Slide Tables MX Series

OUT port (on both sides) OUT OUT port IN Table 1 (mm) d 5 5 10 15 L 21 25 35 47 Bore size (mm) MXH6 MXH10 MXH16 MXH20 IN port IN port (on both sides) d L Operating Precautions Stroke Direction Backlash Caution Caution Since the connection between the piston rod and table is a floating structure, there is a maximum table backlash of 0.15mm in the stroke direction.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Filtration degree should be 5 m or less. ( ): VHS500 1943 1944

XLA Series

5.

XL-OMY0002

) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0002 2.2 A6063SUS316LSUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0002 /H0 H4 H5 () 510% O 0.1mm0.2mm O 9 P15 3 3P7P8 5 P11 O 10 P16