High Vacuum L Type Valve Valve specifications Model XLF-16-2 XLF-25-2 XLF-40-2 XLF-50-2 XLF-63-2 XLF-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material
of maximums rated flow range [ 250] 250 L/min (500 L type) [ 500] 500 L/min (1000 L type) [1000] 1000 L/min (2000 L type) [P_2 ] Set value of OUT2 [F 2] 3 Page 42 5% of maximums rated flow range [ 25] 25 L/min (500 L type) [ 50] 50 L/min (1000 L type) [ 100] 100 L/min (2000 L type) [H_2 ] Hysteresis of OUT2 [dtH2] ON delay time [0.00] 0.00 s [dtL2] OFF delay time [0.00] 0.00 s [CoL ] Display
D U Applicable Plug Assembly (D-sub connector cable assembly) (Option) Component parts Plug MIL standard D-sub connector D-sub connector Number of terminals: 25 Cable: 25 cores x 0.3 mm2 Cable length 1.5 m 3 m 5 m 8 m Assembly part no. VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 3-7-5 6 Series VZS2000/3000 Caution 7.
P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60
Offset voltage adjustment mode . 54 4-4-5. Balance control selection mode . 55 4-4-6. Maintenance detection level selection mode . 56 4-4-7. Key-lock setting mode . 57 4-4-8. Ion generation stop mode . 58 4-5. Alarm function (IZT40/41/42) . 59 4-5-1. Alarms for IZT40 . 59 4-5-2. Alarms for IZT41 and IZT42 . 60 4-5-3. Details of the alarms . 61 5. Performance . 63 5-1.
or less Double 0 5 79.2 (4.4) VQ52 1 28 or less Rubber seal 25 or less 0 5 61.2 (3.4) VQ53 0 53 or less Metal seal 50 or less Closed center 0 5 63.0 (3.5) VQ53 1 63 or less Rubber seal 60 or less VQ5000 0 5 72.0 (4.0) VQ54 0 53 or less Metal seal 50 or less Exhaust center 79.2 (4.4) 0 5 VQ54 1 63 or less Rubber seal 60 or less Plug lead unit 0 5 61.2 (3.4) VQ55 0 53 or less Metal seal 50
8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting
(mm) 15 27 57 86 160 224 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCUK N S NBR 40 50 40 50 Silicon rubber Urethane rubber Fluororubber Pad type U F E EPR 63 63 AMJ H Heavy duty 80 80 100 100 AMV Add NBR mass to the table on the right for other materials. 125 125 AEP Dimensions HEP ZP H 40 50 63 80 ZP H 100 125 ZP H Related Equipment 3 x 6.5 3 x 4 4 x 8 4 x 5 4 x 9.5 4
(C) 15 10 5 15 10 5 15 10 5 15 10 5 15 10 5 1.01 0.72 0.43 1.18 0.84 0.50 1.39 1.00 0.60 1.68 1.20 0.72 2.10 1.50 0.90 25 0.90 0.64 0.39 1.05 0.75 0.45 1.24 0.89 0.53 1.50 1.07 0.64 1.87 1.34 0.80 30 0.84 0.60 0.36 0.98 0.70 0.42 1.16 0.83 0.50 1.40 1.00 0.60 1.75 1.25 0.75 32 0.76 0.54 0.32 0.88 0.63 0.38 1.05 0.75 0.45 1.26 0.90 0.54 1.58 1.13 0.68 35 0.51 0.36 0.21 0.59 0.42 0.25 0.69
(5) Bowl assembly -29- 12.
less Double 0 5 79.2 (4.4) VQ52 1 28 or less Rubber seal 25 or less 0 5 61.2 (3.4) VQ53 0 53 or less Metal seal 50 or less Closed center 0 5 63.0 (3.5) VQ53 1 63 or less Rubber seal 60 or less VQ5000 0 5 72.0 (4.0) VQ54 0 53 or less Metal seal 50 or less Exhaust center 79.2 (4.4) 0 5 VQ54 1 63 or less Rubber seal 60 or less Plug lead unit 0 5 61.2 (3.4) VQ55 0 53 or less Metal seal 50 or
5-0.03 0 5-0.03 0 24.5 12-0.05 0 Open: 37, Closed: 19 2 x M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 10 10 7 7 937
1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm] IZF10R 25 IZF10R IZF10R 25 25 20 Air flow level: 1 Discharge time [s] 20 20 Air flow level: 1 Air flow level: 1 Discharge time [s] Discharge time [s] 15 15 15 10 10 10 5 Air flow level: 4 5 5 Air flow level: 4 Air flow level: 4 0 0 300 600 900 1200 0 0 Installation distance [mm
32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth 11.5 53 51.5 56 72 74.5 83 30 38 48 5 6 7 5 6 8 M6 x 1.0 M8
VZ110 can be mounted on VV4Z1-25 and VV4Z1-25F .
4.5 System Startup and Shutdown . 4-5 4.5.1 System startup . 4-5 4.5.2 System shutdown . 4-5 Chapter 5 System Operation . 5-1 5.1 Operation Display Panel . 5-1 5.2 Flow Chart of Operation Screen. 5-2 5.3 Operation Screen . 5-3 5.3.1 Model Indication screen . 5-3 5.3.2 Status screen 1 . 5-3 5.3.3 Status screen 2 . 5-4 5.3.4 Status screen 3 . 5-4 5.3.5 Status screen 4 . 5-5 5.3.6 Menu screen
to 50 l/min 0.5 l/min 0.5 l/pulse 5 to 105 l/min 5 to 105 l/min 10 to 100 l/min 1 l/min 1 l/pulse 10 to 210 l/min 10 to 210 l/min 20 to 200 l/min 2 l/min 2 l/pulse 25 to 525 l/min 25 to 525 l/min 50 to 500 l/min 5 l/min 5 l/pulse Accumulated pulse flow rate exchange value (Pulse width: 50 ms) l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Accumulated flow Display units Note 1, 2)
end Reverse rotation stroke end (Note 5) LSP 6 LSN 7 10m max.