LEKF-OMZ0035

50 LECSB2-T8 to to LECSC2-T8 T8 400 40 LECSN2-T81200 1200 LECSS2-T8 *Refet to Applicable Stroke Table.

Vacuum System Peripherals:

Solenoid valve rated voltage 5 12 VDC 24 VDC 6 V S R 1 Slotted locking type Non-locking push type Manual override 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 110 VAC 50/60 Hz 3 Nil Number of stations w-2 Individual specifications (Symbol , , , , ) Indicate X for required station.

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(NPN) 2-wire 5 V, 12 V 12 V Terminal conduit Relay, PLC Yes Yes No No No Yes Yes Yes 24 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Grommet 12 V 2-wire Water resistant (2-color indication) 4-wire (NPN) With diagnostic output (2-color indication) IC circuit 5 V, 12 V 3-wire (NPN equivalent) A96 IC circuit 5 V A93 A90 B54 B64 C73C C80C A33A

Digital Flow Switch (Remote type monitor unit)

Accuracy 5 5%F.S. max.

JXCx-OMT0061CN

(OUT05)OFF 11INPOFF ... 12BUSY ON 0mm 50mm 60mm 100mm 5 13DRIVEOFF 14No.2 ON (OUT1ON) 15INPON 16BUSYOFF 10mm 57 - 13.2 100mm/s 100mm (No.1 ) 100mm ,10mm/s 50% 5mm (INPON )50mm/s 50mm (No.2 ) No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 100.00 1000 1000 50 40 10 100 0 0 5 2 ABS 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1

5 Port Solenoid Valve Series SV

SV B00 SOL.b SOL.a 3(EB) 5(EA) 1(P) 4(A) 2(B) N.C. valve N.O. valve SOL.b SOL.a 1 2 SV C00 3(EB) 5(EA) 1(P) External pilot specification is not available for 4 position dual 3 port valves.

K35-OMW0030

/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 8 9 Speed adjustment rotary switch set value Speed adjustment rotary switch set value (5) IN-777-200TF-300F*-HL (6) IN-777-250TF-350F*-HL 150 150 average speed [mm/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6

VZ1000

Rated voltage VFN M5 x 0.8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Light/Surge voltage suppressor 4 Nil None Z 5 6 24 VDC 12 VDC S With light/surge voltage suppressor 9 With surge voltage suppressor Other Option Not available for GZ, HZ and DOZ Electrical entry Grommet L plug connector M plug connector DIN terminal G: Lead wire length 300 mm L:

DOC1001322

temperature alarm (AL35) and maintenance alarm (AL36) .5-46 TEMP OUT signal .5-47 Data reset .5-48 5.4.9 Communication setting screen .5-49 Setting for communication error (AL34)/contact input signal detection (AL30 and AL31) .5-50 Serial communication setting .5-51 Setting of analog output signal .5-53 Setting of contact input signal form.5-54 Setting of contact output signal 1 to 3 .5-

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Electrical entry G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire

SFOD-OMT0005CN

Movement Speed Position Acceleration Deceleration Area 1 Area 2 In pos force Force speed force 2 2 mode mm/s mm mm/s mm/s mm mm mm Value mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () (1)No.

LFE-OMZ0013

If an instantaneous flow of 10 L/min lasts for 5 minutes, the accumulated flow will be 10 x 5=50 L. Accumulated pulse output A type of output where a pulse is generated every time a predefined accumulated flow passes.It is possible to calculate the total accumulated flow by counting the pulses.

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40 40 50 P1 = 1 MPa P1 = 0.8 MPa P1 = 0.6 MPa 30 30 Example 2 20 20 P1 = 0.5 MPa P1 = 0.4 MPa Example 1 10 10 P1 = 0.3 MPa P1 = 0.2 MPa 4 5 5 4 P1 = 0.1 MPa 3 3 2 2 1 1 0.001 0.01 0.1 0.002 0.003 0.02 0.03 0.04 0.004 Pressure differential P [MPa] Graph (2) Flow rate characteristics Example 1) Obtain the pressure difference when water [15 L/min] runs through the solenoid valve with a Kv =

PSE550/300

Displayed values of the pressure sensors can be adjusted to within 5%. Applicable pressure sensor PSE531 PSE541 PSE561 PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) pressure range 5%R.D.

SMC Pneumatic Clean Series

Proper auto switch mounting position (mm) Auto switch mounting height (mm) D-Z7 D-Y59 D-Y7P D-Y7W D-Y7BAL D-Z7 D-Y59 D-Y7P D-Y7BAL D-Y7W Auto switch model Auto switch model D-A54 D-A59W D-J51 D-F59F D-A54 D-A59W D-J51 D-F59F Bore size (mm) A 40 50 63 Bore size (mm) Hs 40 50 63 B 3.5 3.5 6 Ht 30 34 41 A B 0 0 2.5 A B 4 4 6.5 A B 7 6.5 12.5 Hs Ht 38.5 42 46.5 Hs Ht 38 42 47 1.5 1.5 5 30 34

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

OUT1: Orange Digital filter*4 0, 10, 50, 100, 500, 1000, 5000 ms Enclosure IP40 Withstand voltage 1000 VAC for 1 minute between terminals and housing Insulation resistance 50 M or more (500 VDC measured via megohmmeter) between terminals and housing Environment Operating temperature range Operating: 5 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating humidity range Operating

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F (C) Correction factor 1.41 41 to 86 (5 to 30) Air ow capacity scfm (m3/min) (ANR) 50 Hz 565 (16) 709.8 (20.1) 882.8 (25) 50 (10) 1 1.21 95 (35) 60 Hz 663.8 (18.8) 836.9 (23.7) 953.4 (27) 59 (15) 1.4 1 104 (40) 61 (16) or more 1.5 0.92 113 (45) The maximum coefficient value is 1.5 due to the drainage separation performance. 0.75 122 (50) 0.63 131 (55) Data D: Inlet Air Pressure 0.53 140

High-precision Digital Pressure Switch ( compatible)

(Example: When the value can be displayed down to 0.1 MPa for the product for 0 to 50 MPa, the resolution is 1/500) Display resolving power Displayed pressure value can be adjusted within the range of 5%R.D. (5% of displayed value).

VZS2000

Electrical entry F: Plug-in type Option Port size Nil 01 Without sub-plate Rc 1 8 50 01 F Z VZS2 1 2 Plug-in 5 G 50 VZS2 Non plug-in 2 01 2 Coil rated voltage Symbol Thread type 1 2 3 2 position single 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Option Nil N T F Standard Rc NPT 1 Nil Z None With light/surge voltage suppressor Option NPTF 4 G S With surge voltage

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

VAC, 50/60 Hz G 2 position double 5 6 9 24 VDC 12 VDC Note) Indicator light is not available for grommet type.