5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

25 to 85C (with no freezing and condensation)NPN open collector: Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA); Maximum applied voltage: 30 V; 2 outputsPNP open collector: Maximum load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates when output

DIQ-69200-OM002

When a current of approx.150 mA or more is applied, the over current circuit will operate, Er.5 will be displayed and the operation will stop.

IZx-OMV0005

voltage: 1 V or less (Load current at 40 mA) Maximum applied voltage: 26.4 VDC Maximum load current: 40 mA Residual voltage: 1V or less (Load current at 40 mA) Output signal Error signal Maintenance signal Effective static neutralization distance 20 mm to 500 mm Ambient temperature During operation/storage 0 to 55 oC Ambient humidity During operation/storage 35 to 65% Rh (With no condensation

HRX-OM-R026

Table 3-4 Power supply cable and Earth Leakage Breaker(Recommended Earth leakage Terminal Recomme breaker *1 Power block nded Cable qty. x Sensitivity supply Model Rated size*2 screw crimp of leak current voltage current diameter terminal [A] [mA] AC200/ 4 cores x AWG10 200-230V HRSH090-A-2030 (4 cores x 5.5mm2) R5.5-5 50/60Hz HRSH090-W-20*including ground 3phase R5.5-5 AC380-415V 3 x 5.5

INFORMATION Step Motor Controller 5 types of communication protocols New New

or less 130 mA or less 200 mA or less 100 mA or less 100 mA or less Compatible encoder Incremental A/B phase (800 pulse/rotation) Protocol EtherCAT*2 EtherNet/IP*2 PROFINET*2 DeviceNet IO-Link Communication specifications Applicable system Version*1 Conformance Test Record V.1.2.6 Volume 1 (Edition 3.14) Volume 2 (Edition 1.15) Specification Version 2.32 Volume 1 (Edition 3.14) Volume 3

Refrigerated Air Dryer

Replacement Parts 230 V type IDFA15E1-23, IDFA22E-23 IDFA37E-23, IDFA55E-23 IDFA75E-23 10 A 30 mA Model Part no.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

NPN or PNP open collector 1 output Switch output Main circuit Main circuit Load 12 to 24 VDC Maximum load current 80 mA + Black OUT Maximum applied voltage 30 V (at NPN output) Residual voltage 1 V or less (with load current of 80 mA) Response time Anti-chattering function 1 s (0.25, 0.5, 2, 3) Blue DC () PNP open collector Max. 80 mA Residual voltage 1 V or less Short-circuit protection

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

, 40 mA, 20 mA IC circuit, Relay, PLC No Reed auto switch D-A90 D-M9B, D-F8B D-M9N, D-F8N 2-wire 3-wire 24 VDC relay, PLC 24 VDC relay, PLC Solid state auto switch Yes 24 VDC (10 to 28 VDC) 24 VDC (4.5 to 28 VDC) Yes 2.5 to 40 mA 40 mA or less Refer to page 920 for the applicable auto switch list. 909 Rotary Table MSQ 1122Specifications Suction Flow Rate of Vacuum Suction Type (Reference

Ejector Valve Unit Series ZYY/ZYX

NPN open collector 30 V Max. 80 mA ON-OFF output Analog output None None 1 to 5V Setting points 1 point 1 point 2 point Lights up when ON (Red) Lights up when ON (Red) Lights up when ON Operation indicator light (OUT1: Red, OUT2: Green) Setting trimmer rotation angle 3 turns 200 degrees 3 turns 200 degrees 3 turns 200 degrees 200 degrees 17 mA or less (When 24 VDC is ON) 25 mA or less (When

Table of Contents

Note 4) Install a circuit breaker with a sensitivity of 30 mA or less.

Refrigerated Air Dryer

Note 4) Install a circuit breaker with a sensitivity of 30 mA or less.

Fieldbus system IO-Link Master Unit

Typ. 5.8 mA Typ. 5.8 mA ON voltage 13 V or more OFF voltage 8 V or less Pin No. 4 Digital output Output type PNP Max. load current (C/Q line) 0.25 A / output (Supplied from the power supply for control / input) Over current protection Built-in short circuit prevention Current consumption 50 mA or less Operating temperature range -10 to 50 oC Storage temperature range -20 to 60 oC Enclosure