EXxx-OMO0027

Enum0807 0=Disable 1=Enable 0=Offset binary 1=Sign & Magnitude 2=2's complement 3=Scaled 80x1:0D Data format Enum0802 80x2:0 Slot x: Fault mode USINT 2 80x2:01 Channel 2 / Output setting during communication fault Enum0807 0=Disable (Hold) 1=Enable (Fault value) 80x2:02 Channel 3 / Output setting during communication fault 80x3:0 Slot x: Fault value USINT 2 80x3:01 Channel 2 / Output setting

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

1/8 (P, R1, R2 port) 27.2 L plug connector (L): 10-SYJ7223-L-01 M plug connector (M): 10-SYJ7223-M-01 DIN Terminal (D): 10-SYJ7223-D-01 M8 connector (WO): 10-SYJ7223-WO-01 Approx. 300 (Lead wire length) 65 31.5[38.5] MAX.10 57.5 16.1 46.2 31.1 M8 x 1 36 18.5 42.6[49.6] Approx. 300 (Lead wire length) 2-3.2 (For mounting) 2-3.2 127.2[131.6] 2-3.2 (For mounting) 2-3.2 107.6[112] (For mounting

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

.) 10-SYJ7123-5LOU-01 (-Q) 3 sets (Single solenoid part no.) 10-SYJ7223-5LOU-01 (-Q) 2 sets (Double solenoid part no.)

13

86.5 39 23 14 35 7 61 86.5 39 23 14 35 7 61 B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL

Table of Contents

VX 2 2 21 01 1 G 1 1 1 G Normally Closed (N.C.)

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Body type Plug-in type Non plug-in type VVFS2000-R-01-1 VVFS2000-R-01-2 VVFS2000-R-02-1 VVFS2000-R-02-2 Body type Plug-in type Non plug-in type ARBF2000-00-P-1 ARBF2000-00-P-2 P port regulation 1 8 Rc 1 4 Rc For details, refer to page 1247.

SYJ300/500/700

SY100-61-3-05 SY100-61-3-06 SY100-61-2-01 SY100-61-2-02 SY100-61-2-03 SY100-61-2-04 Caution When making connections, take note that using other than the supported size (3.5 to 7) heavy-duty cord will not satisfy IP65 (enclosure) standards. Also, be sure to tighten the ground nut and holding screw within their specified torque ranges.

OMU0023

Check End Details of code error sum code ) 1 byte 2 bytes 2 bytes 2 bytes 2 bytes 2 bytes The MSB of the Problems 01-FF code Note 4) LRC CR, LF function code is changed to 1.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Function Port size Rc Valve model VHS VZA4121-01 VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49

G15/G27

Model (Standard) Model (Made to Order) Pressure range (1) Indication unit Connection thread Note MPa G46-2-01/02 G46-4-01/02 G46-7-01/02 G46-10-01/02 G46-2-01 to 02M G46-4-01 to 02M G46-7-01 to 02M G46-10-01 to 02M GA46-10-01 to 02 Model Pressure range (1) Indication unit Connection thread Model Note MPa G46-2-01 to 02-C/C1 G46-4-01 to 02-C/C1 G46-7-01 to 02-C/C1 G46-10-01 to 02-C/C1 G46-

Pressure Gauge Guide

VE 3 Bleed port Model (Made to Order) Pressure range Note) Indication unit Connection thread VY1 Note Model MPa G43-2-01 to 02-X2 G43-4-01 to 02-X2 G43-6-01-X2 G43-7-01 to 02-X2 G43-10-01 to 02-X2 G43-2-01 to 02-X3 G43-4-01 to 02-X3 G43-6-01-X3 G43-7-01 to 02-X3 G43-10-01 to 02-X3 G43-2-01 to 02-X4 G43-4-01 to 02-X4 G43-6-01-X4 G43-7-01 to 02-X4 G43-10-01 to 02-X4 0 to 0.2 0 to 0.4 0 to 0.6

SYJ3000/5000/7000

] 21 1.6 P R2 R1 18 1.6 (PE port) 1/8 (P, R1, R2 port) 27.2 L plug connector (L): SYJ7220-L-01 M plug connector (M): SYJ7220-M-01 DIN terminal (D): SYJ7220-D-01 M8 connector (WO): SYJ7220-WO-01 Approx. 300 (Lead wire length) 65 31.5 [38.5] Max. 10 57.5 16.1 46.2 31.1 M8 x 1 36 18.5 Approx. 300 (Lead wire length) 42.6 [49.6] 2-3.2 (For mounting) 2-3.2 127.2 [131.6] 2-3.2 2-3.2 (For mounting

Speed Controller with Indicator

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 0 2 06 AS 1F S E M5 Body size 1 S Body size 2/3/4 AS 01 2 0 2 1F S 06 With indicator Made to Order Refer to page 15 for details. Body size 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) Note) Face seal type is used for the G thread type.

VFR

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VZS G 1/2 VFS 2-5 (Mounting hole) 3-2.3 (Electrical entry) VS4 VQ7 Light/Surge voltage suppressor (At FZ) EVS VFN 2-Rc 1/8 (EA, EB port) 3-Rc 1/8, 1/4 (P , A, B port) ( ): Rc 1/8 01 02 01 02 01 02 2 position double:

Fieldbus system EtherCAT compatible SI Unit

50x2:0 2 Under range error 2 UNSIGNED8 Number of Channels 50x2:01 2 50x2:04 Channel 0 2 Channel 3 Enum081C 0=No error 1=Error 50x3:0 Over upper limit error UNSIGNED8 Number of Channels 50x3:01 50x3:04 Channel 0 Channel 3 Enum081C 0=No error 1=Error 50x4:0 Under lower limit error UNSIGNED8 Number of Channels 50x4:01 50x4:04 Channel 0 Channel 3 Enum081C 0=No error 1=Error 1: x = Unit

Table of Contents

PF2 27 27 IF 2-M2.5 x 24L Mounting threads 2-M2.5 x 24L Mounting threads Data Connector type: SE1-14C/-15C/-18C/-19C Grommet type: SE1-14/-15/-18/-19 01 T1 01 T1 I Z I Z Pressure setting trimmer Hysteresis setting trimmer Hysteresis setting trimmer Pressure setting trimmer SET HYS SET HYS L L H H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16/-17 I Z I Z SE1-01

VZM400

-01-34B Twist selector (2 position) VM-34CG Green VZM550-01-34G VM-34CY Yellow VZM550-01-34Y VM-36C Key selector (2 position) VZM550-01-36 Black Push-pull VZM550-01-37 Note 1) Actuator replacement is available for all types.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2 39.5 60 12 3.2 33.5 5.8 2 39.5 75 17 4.2 36.5 7.5 3 50 75 17 4.2 36.5 7.5 3 50 13-5-6 7

Modular F.R.L. Unit

Model Description AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 G36-10-01 GC3-10AS G36-2-01 GC3-2AS G36-10-01 GC3-10AS G36-2-01 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G-27-10-R1 Note 1) Pressure gauge

V

1.5 1/8 VX2110-01 2 0.17 3 Water 1.1 0.6 0.9 0.5 1 0.5 0.5 (6A) VX2120-01 3 0.33 6 0.45 0.2 0.4 0.2 0.45 0.2 0.15 VX2130-01 4.5 0.61 11 Oil 2 1.5 2 1.5 1 1.5 1.5 VX2110-02 2 0.17 3 1.1 0.6 0.9 0.5 1 0.5 0.5 VX2120-02 3 0.33 6 Air 5 2 1.5 1.7 1.5 1 1.2 1.2 VX2220-02 3 0.33 6 3 3 3 2.5 3 1.7 2 VX2320-02 3 0.33 6 0.45 0.2 0.4 0.2 0.45 0.2 0.15 VX2130-02 4.5 0.61 11 0.75 0.35 0.6 0.35 0.75