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Note) +12 to 24V 4.7k 13 14 Servo ON 1Ry 0V SV-ON 5mA 1Ry ON for servo ON 2Ry Proportional control (P actuation) 15 P-CON 2Ry ON for proportional control Reverse drive suppression Normal drive suppression N-LS 16 N-OT N-LS Open for reverse drive suppression P-LS 17 P-OT P-LS Open for normal drive suppression 3Ry 18 ALM RST Alarm reset 3Ry ON for alarm release 30VDC 50mA or less 5Ry +12 to

AW*-OMF0053-A PRODUCT NAME MICRO MIST SEPARATOR REGULATOR MODEL/ Series AWD20-(F,N)01(F,N)02(B,C,E,G,H)(-1,2,6,C,J,N,R,Z) AWD30-(F,N)02(F,N)03(B,C,D,E,G,H)(-1,2,6,8,J,N,R,W,Z) AWD40-(F,N)02(F,N)04(B,C,D,E,G,H)(1,2,6,8,J,N,R,W,Z) Contents PAGE 1. SAFETY INSTRUCTIONS 15 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 6 5. MAXIMUM APPLICABLE FLOW RATE 7 6.

magnet Number of auto switches MNB 2 pcs. 1 pc. n pcs.

Mounting style Nil Rc n n pcs. TN NPT B Basic style Auto switch L Axial foot style Nil Without auto switch F Rod side flange style For the applicable auto switch model, refer to the table below. G Head side flange style U Rod side trunnion style Locking direction T Head side trunnion style D Both directions D Clevis style Mounting brackets are shipped together, (but not assembled).

04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling.

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved This pamphlet is printed on recycled paper with concern for the global environment. 1st printing GR D-036 P-400(N) Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

1 3 Port Air Operated Valve Series VPA3145/3165/3185 How to Order SA 04 4 5 1 VPA3 VA Thread type SA VPA Air operated valve Nil Rc G NPT NPTF F N T VA 1 Number of pilot VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QW printing QW 8150SZ Printed in Japan. D-DN

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: BE (w/Bracket + Square embedded type pressure gauge, with limit indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: BM (w/Bracket + Round type pressure gauge, with color zone), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: B (w/Bracket), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: w/o Mounting Option, Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: BE1 (w/Bracket + Output: NPN output / Electrical entry: Wiring bottom entry), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: ZA (Digital Pressure Switch: w/Unit Selection Function)

Body Size: 40, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: BE2 (w/Bracket + Output: NPN output / Electrical entry: Wiring top entry), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: ZA (Digital Pressure Switch: w/Unit Selection Function)

Body Size: 40, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: BE3 (w/Bracket + Output: PNP output / Electrical entry: Wiring bottom entry), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: ZA (Digital Pressure Switch: w/Unit Selection Function)

Body Size: 40, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: BE4 (w/Bracket + Output: PNP output / Electrical entry: Wiring top entry), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: ZA (Digital Pressure Switch: w/Unit Selection Function)

Body Size: 40, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: BE (w/Bracket + Square embedded type pressure gauge, with limit indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: BM (w/Bracket + Round type pressure gauge, with color zone), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)