0.4 Flow characteristics: C Max. operating frequency 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m SUP side pressure (P1) To CYL port VVQ1000-FPG-02 1 set VQ1000-FPG-C6M5-D 2 pcs.
ZX1-F Operating pressure range Operating temperature range Filtration efficiency Element Mass Standard accessory Vacuum to 0.5 MPa 5 to 50C 30 m PVF 35 g Bracket A (ZX1-OBA) Note) If not operated within the specified range of pressure and temperature, trouble may result.
Ambient and fluid temperature operation is as follows: Digital pressure switches: 0 to 50C Take measures to prevent moisture from freezing in circuits when below 5C, since this may cause damage to the O-ring and lead to a malfunction. The installation of an air dryer is recommended for eliminating condensate and moisture.
less Detection style Karman vortex Flow rate measuring range 0.4 to 4 l/min 1.8 to 20 l /min Note 1) 4 to 40 l/min Operating pressure range Note 2) 0 to 1 MPa 0 to 0.6 MPa Proof pressure Note 3) 1.5 MPa 0.9 MPa Operating fluid temperature 0 to 90C Linearity Note 4) 2.5%F.S. or less (at 25C water) Repeatability 1%F.S. or less (at 25C water) Temperature characteristics 5%F.S. or less (0 to 50C
Power Valve Regulator Valve Series VEX1 Specifications Large Capacity Relief Regulator VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 Model VEX11001 02 Air operated, External pilot Operating style Fluid Air, Inert gas 1.5MPa 1.0MPa 0.05 to 0.9MPa 0.05 to 0.7MPa 0.05 to 0.9MPa 0 to 50C(Air operated: 0 to 60C) 0.03MPa 0.01MPa 0.01MPa Free Not required (Use turbine oil No.1
Specifications Max. operating pressure Min. operating pressure 0.8MPa 0.15MPa 5 to 50C 2.7mm 2 (0.15) 180CPM VVQ1000FPG02 1set VQ1000FPGC6M5D 2pcs.
(Full span) Class 3 0 to 50C Housing: Polycarbonate/ABS resin Operating temperature range Material Port exhaust JIS Symbol Standard P V 13-7-5 6 Series ZL Option Specifications With digital vacuum pressure switch (ZSE4) Digital Vacuum Pressure Switch Specifications ZSE4-00---X105 ZSE4B-00---X105 ZSE4E-00---X105 Part no.
Specifications ZX1-F Vacuum to 0.5 MPa 5 to 50C 30 m PVF 35 g Note) If not operated within the specified range of pressure and temperature, trouble may be caused. Unit no. Operating pressure range Operating temperature range Filtration efficiency Element Weight ZX ZR ZM ZH Vacuum Pressure Switch Unit/ZSE2, ZSE3, ZSP1 Refer to page 13-2-13 to 13-2-18 for details.
Cylinder pressure (P2) VQC Specifications SQ 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 CPM Max. operating pressure Min. operating pressure SUP side pressure (P1) Ambient and fluid temperature Flow characteristics: C Max. operating frequency VQ0 To CYL port VVQ1000-FPG-02 1 set VQ1000-FPG-C6M5-D 2 pcs.
P Improvement in the maximum operating temperature from 40C to 50C (Actuator unit only) P Mounting method can be selected among 3 types.
OUT1: Green, OUT2: Red IP40 5 to 50C 1000 VAC for 1 minute between terminals and housing 50 M or more (500 VDC measured via megohmmeter) between terminals and housing 2% F.S.
Example) Customer requirement: 50C ( Temperature range 20C to 90C, H type will be appropriate.) 2. What kind of the circulating fluids will be used?
Specifications Valve construction Rubber seal Fluid Air/Inert gas Max. operating pressure 102 psi (0.7 MPa) Min. operating pressure 29 psi (0.2 MPa) 14 to 122F (10 to 50C) Note 1) Ambient and fluid temperature Valve specifications Electrical specifications Max. operating cycle 5 Hz Slim compact Plug-in manifold Bar base Plug-in manifold Stacking base Plug lead manifold Bar base Pilot valve
Note 2) 5 to 50C for the products with the digital pressure switch Note 3) Not applicable to the AC10A.
Fluid Air ZQ 0.2 to 0.5 MPa Operating pressure range Internal pilot type Ambient and fluid temperature 5 to 50C ZH Response time (For 0.5 MPa) (1) 25 ms or less ZU 5 Hz Maximum operating frequency Manual override Non-locking push type/Locking slotted type ZL With vacuum pressure gauge Pilot exhaust type Pilot valve individual exhaust, Main valve/Pilot valve common exhaust Lubrication Not
5 to 50C 5 to 50C 5 to 50C 5 to 40C 5 to 40C 5 to 40C 5 to 40C Electric energy 180VA 640VA 300VA 300VA 640VA 100VA 300VA 640VA 640VA 300VA 180VA 300VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return function Maximum positioning point setting With magnet switch as adjacent switch, and encoder Z phase signal as home position signal
Fluid Air Operating pressure range Internal pilot type 0.2 to 0.5MPa (29 to 72 psi) 5 to 50C (41 to 122F) Ambient and fluid temperature Response time (for 0.5MPa) Note 1) 25ms or less Maximum operating frequency 5Hz Manual operation Non-locking push type, Slotted locking type With vacuum pressure gauge Pilot valve individual exhaust type, Main valve/Pilot valve common exhaust Pilot exhaust
3cP) or less Detection style Karman vortex Flow rate measuring range 0.4 to 4l/min 1.8 to 20l/min Note 1) 4 to 40l/min Operating pressure range Note 2) 0 to 1MPa 0 to 0.6MPa Proof pressure Note 3) 1.5MPa 0.9MPa Operating fluid temperature 0 to 90C Linearity Note 4) 2.5%F.S. or less (at 25C water) Repeatability 1%F.S. or less (at 25C water) Temperature characteristics 5%F.S. or less (0 to 50C
vortex Detection type 2 to16l/min 0.5 to 4 (setting is 0.6 to 4) l/min 5 to 40l/min Flow rate measurement and setting range 0.1l/min 0.05l/min 0.5l/min Minimum setting unit l/min, gal (US)/min Real-time flow rate Note 1) Display units l, gal (US) Accumulated flow Operating pressure range 0 to 1MPa Withstand pressure 1.5MPa 0 to 9l Accumulated flow range Operating temperature range 0 to 50C
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric